Atomic Layer Deposition

Published by: BCC Research

Published: Jan. 1, 2010 - 217 Pages

Table of Contents

CHAPTER ONE : INTRODUCTION

STUDY GOALS AND OBJECTIVES

REASONS FOR DOING THIS STUDY

INTENDED AUDIENCE

SCOPE OF REPORT

METHODOLOGY AND INFORMATION SOURCES

RELATED BCC RESEARCH STUDIES

ANALYST CREDENTIALS

BCC ONLINE SERVICES

DISCLAIMER

CHAPTER TWO: EXECUTIVE SUMMARY

EXECUTIVE SUMMARY

SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION MARKET,THROUGH 2014 ($ MILLIONS)

SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)

CHAPTER THREE: OVERVIEW

INTRODUCTION

THIN FILMS, NANOFILMS, AND ALD FILMS

TABLE 1 THIN FILM TECHNOLOGIES, 2009

FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, AND SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2008 (%)

REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT EVENTS

TABLE 2 ATOMIC LAYER DEPOSITION—TECHNOLOGICAL MILESTONES

FIGURE 2 ATOMIC LAYER DEPOSITION—WORLDWIDE PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2008

CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION

TABLE 3 ALD FILMS AND APPLICATIONS, 2009

ELECTRONICS

Established Applications

Semiconductor Devices

Passive Components and Embedded Devices

Recording Heads

Optoelectronic Devices

Advanced Displays

Emerging Applications

TABLE 4 ALD APPLICATIONS IN ELECTRONICS, 2009

MECHANICAL/CHEMICAL

Established Applications

Wear and Corrosion Resistant Coatings

MEMS and MOEMS

Sensors

Particle Coatings

Catalysts and Membranes

Emerging Applications

TABLE 5 ALD APPLICATIONS IN THE MECHANICAL/CHEMICAL SECTOR, 2009

ENERGY

Established Applications

Photovoltaic Cells and Photothermal Coatings

High Temperature Superconductors

Solid Oxide Fuel Cells

Batteries

Emerging Applications

TABLE 6 ALD APPLICATIONS IN THE ENERGY SECTOR, 2009

OPTICS

Established Applications

Optical Coatings

X-ray Diffraction Devices

Emerging Applications

TABLE 7 ALD APPLICATIONS IN OPTICS, 2009

MEDICAL/BIOLOGICAL/DENTAL

Established Applications

Biocompatible Coatings

Emerging Applications

TABLE 8 ALD APPLICATIONS IN THE

MEDICAL/BIOLOGICAL/DENTAL SECTOR, 2009

NANOTECHNOLOGY

Established Applications

Nanoparticles

Nanowires

Nanotubes

Nanolaminates and Nanocomposites

Emerging Applications

TABLE 9 ALD APPLICATIONS IN NANOTECHNOLOGY, 2009

CHAPTER FOUR: GLOBAL MARKET

ALD MATERIALS AND EQUIPMENT—ANALYSIS OUTLINE

GLOBAL MARKET SUMMARY

TABLE 10 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005 THROUGH 2014 ($ MILLIONS)

FIGURE 3 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)

ALD MATERIALS

INTRODUCTION

METAL SOURCES

TABLE 11 METAL SOURCES, 2009

Earlier Metal Precursors

Current Technical Issues

Latest Technological Developments, 2006 to Present

Metal Beta-Ketoiminate and Beta-Diiminate

Complexes

Diimine Copper Complexes

Precursors Containing Electron Donating Group-

Substituted Alkenyl Ligands

Phosphoamidinate Precursors

Organometallic Precursors for High-Purity Metal

Films

FUNCTIONAL GROUP SOURCES

Elemental Films Using Boron Compounds

INERT GASES

CURRENT MARKET STATUS

Current Market Summary

TABLE 12 GLOBAL MARKET FOR ALD MATERIALS, THROUGH 2009 ($ MILLIONS)

Revenues by Material Type

TABLE 13 ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, 2009 ($ MILLIONS/%)

TABLE 14 ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE,2009 ($ MILLIONS/%)

FIGURE 4 ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2009

(%)

Revenues by Application

TABLE 15 ALD MATERIALS: GLOBAL REVENUES BY APPLICATION,

2009 ($ MILLIONS/%)

FIGURE 5 ALD MATERIALS: MARKET SHARE BY APPLICATION,

2009 (%)

TABLE 16 ALD PRECURSORS FOR SEMICONDUCTOR DEVICES:

GLOBAL REVENUES BY FUNCTION, 2009 ($ MILLIONS/%)

Revenues by Region

TABLE 17 ALD MATERIALS: REVENUES BY REGION, THROUGH

2009 ($ MILLIONS)

FIGURE 6 ALD MATERIALS: MARKET SHARE BY REGION, 2009 (%)

ALD EQUIPMENT AND TECHNOLOGIES

EXISTING TECHNOLOGIES

TABLE 18 ALD TECHNOLOGIES

LATEST TECHNOLOGICAL DEVELOPMENTS, 2006 TO PRESENT

Rapid Vapor Deposition ALD

Variable Temperature and Dose Atomic Layer Deposition

Microwave-aided ALD

Hybrid Chemical Vapor Deposition

Field-aided Preferential Deposition

CURRENT MARKET STATUS

Current Market Summary

TABLE 19 GLOBAL MARKET FOR ALD EQUIPMENT, THROUGH 2009 ($ MILLIONS)

Revenues by Equipment Type

TABLE 20 ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, 2009 ($MILLIONS/%)

FIGURE 7 ALD EQUIPMENT: MARKET SHARE BY TYPE, 2009 (%)

Revenues by Application

TABLE 21 ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%)

FIGURE 8 ALD EQUIPMENT: MARKET SHARE BY APPLICATION,2009 (%)

Revenues by Region

TABLE 22 ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)

FIGURE 9 ALD EQUIPMENT: MARKET SHARE BY REGION, 2009 (%)

MARKET GROWTH TRENDS

INDUSTRY GROWTH AND TECHNOLOGICAL TRENDS

Semiconductor Devices

Industry Growth

TABLE 23 FORECAST—SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2014 ($ BILLIONS)

Technological Trends

TABLE 24 IC CONFIGURATIONS, 2006-2015

Magnetic Recording Media

Industry Growth

TABLE 25 FORECAST—HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)

FIGURE 10 FORECAST—HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2014 (%)

TABLE 26 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)

FIGURE 11 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2009 AND 2014 (MILLION UNITS)

FIGURE 12 FORECAST—HARD DISKS: PRODUCTION SHARE BY TYPE, 2014 (%)

Technological Trends

Advanced Displays

Industry Growth

TABLE 27 FORECAST—ADVANCED DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ BILLIONS)

Technological Trends

New Films

Roll-to-roll and Large Area Coatings

Other Applications

EQUIPMENT UPGRADES

NANOTECHNOLOGY AND OTHER TECHNOLOGICAL

FACTORS

Nanotechnology

TABLE 28 THE NANOTECHNOLOGY INDUSTRY

TABLE 29 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT, THROUGH 2014 ($ BILLIONS)

Comparison with Alternative Technologies

TABLE 30 DEPOSITION METHODS FOR NANOFILMS

New Product Development

New Generation of Composite Materials

REGIONAL TRENDS

PROJECTED ATOMIC LAYER DEPOSITION MARKET

KEY OBSERVATIONS

TABLE 31 FACTORS AFFECTING SALES OF ALD PRECURSORS AND EQUIPMENT, 2010-2014

ALD MATERIALS MARKET FORECAST

Revenues by Material Type

TABLE 32 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, THROUGH 2014 ($ MILLIONS)

TABLE 33 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, THROUGH 2014 ($ MILLIONS)

FIGURE 13 FORECAST—ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2014 (%)

Revenues by Application

TABLE 34 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)

FIGURE 14 FORECAST—ALD MATERIALS: MARKET SHARE BY APPLICATION, 2014 (%)

TABLE 35 FORECAST—ALD PRECURSORS FOR SEMICONDUCTOR

DEVICES: GLOBAL REVENUES BY FUNCTION, THROUGH 2014 ($

MILLIONS)

Revenues by Region

TABLE 36 FORECAST—ALD MATERIALS: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)

FIGURE 15 FORECAST—ALD MATERIALS: MARKET SHARE BY REGION, 2014 (%)

ALD EQUIPMENT MARKET FORECAST

Revenues by Equipment Type

TABLE 37 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ MILLIONS)

FIGURE 16 FORECAST—ALD EQUIPMENT: MARKET SHARE BY TYPE, 2014 (%)

Revenues by Application

TABLE 38 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)

FIGURE 17 FORECAST—ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2014 (%)

Revenues by Region

TABLE 39 FORECAST—ALD EQUIPMENT: REVENUES BY REGION,THROUGH 2014 ($ MILLIONS)

FIGURE 18 FORECAST—ALD EQUIPMENT: MARKET SHARE BY REGION, 2014 (%)

CHAPTER FIVE: GLOBAL INDUSTRY STRUCTURE

GLOBAL INDUSTRY STRUCTURE

MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT

TABLE 40 MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT

FIGURE 19 ALD MANUFACTURERS: DISTRIBUTION BY SIZE, 2009 (NUMBER OF COMPANIES)

TABLE 41 ALD MANUFACTURERS: DISTRIBUTION BY REGION, 2005 AND 2009 (NUMBER OF COMPANIES)

TABLE 42 NOTABLE INDUSTRY CHANGES SINCE 2005 OTHER PLAYERS IN THE ALD INDUSTRY

TABLE 43 OTHER RELEVANT INDUSTRY PLAYERS ATOMIC LAYER DEPOSITION PRODUCTION BY REGION

TABLE 44 ALD PRODUCTION BY REGION, 2007-2014 (PERCENT OF SALES)

ATOMIC LAYER DEPOSITION CONSUMPTION BY REGION

TABLE 45 ALD CONSUMPTION BY REGION, 2007-2014 (PERCENT OF SALES)

COMPANY PROFILES

ADEKA

AIR LIQUIDE

AIR PRODUCTS AND CHEMICALS

AIXTRON

AKZO NOBEL

APPLIED MATERIALS

ASM INTERNATIONAL

ASM International (Continued)

ATMI

BENEQ

Beneq (Continued)

CAMBRIDGE NANOTECH

H. C. STARCK

HITACHI KOKUSAI ELECTRIC

INTEGRATED PROCESS SYSTEMS

JOHNSON MATTHEY

JUSUNG ENGINEERING

KURT J. LESKER

LINDE

NOVELLUS SYSTEMS

OXFORD INSTRUMENTS

PICOSUN

PRAXAIR

ROHM AND HAAS

SHIN-ETSU CHEMICAL

SIGMA-ALDRICH

Sigma-Aldrich (Continued)

TEGAL

TOP PLAYERS MARKET SHARE

FIGURE 20 ATOMIC LAYER DEPOSITION—TOP 25 MANUFACTURERS BY REGION, 2009 (%)

TABLE 46 ALD MATERIALS—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)

TABLE 47 ALD EQUIPMENT—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)

CHAPTER SIX: INDUSTRY COMPETITIVENESS

ALD DEVELOPMENT ACTIVITIES

TABLE 48 ORGANIZATIONS INVOLVED IN ALD RESEARCH,WORLDWIDE UNITED STATES

Albany Nanotech

TABLE 49 ALBANY NANOTECH RESEARCH

Argonne National Laboratory

TABLE 50 ARGONNE NATIONAL LABORATORY RESEARCH

Harvard University

TABLE 51 HARVARD UNIVERSITY RESEARCH

Stanford University

TABLE 52 STANFORD UNIVERSITY RESEARCH

SVTC Technologies

University of California, Los Angeles

TABLE 53 UCLA RESEARCH

University of Colorado at Boulder

TABLE 54 UNIVERSITY OF COLORADO AT BOULDER RESEARCH

EUROPE

Eindhoven University of Technology

TABLE 55 EINDHOVEN UNIVERSITY OF TECHNOLOGY RESEARCH

Helsinki University of Technology

TABLE 56 TKK RESEARCH

IMEC

TABLE 57 IMEC RESEARCH

University of Helsinki

TABLE 58 UNIVERSITY OF HELSINKI RESEARCH

ASIA PACIFIC

Korea Advanced Institute of Science and Technology

TABLE 59 KAIST RESEARCH

Semiconductor Leading Edge Technologies

SUMMARY OF GLOBAL R&D ACTIVITIES IN ALD TECHNOLOGY

Summary of Global …(Continued)

FIGURE 21 CURRENT GLOBAL ALD RESEARCH AND

DEVELOPMENT BY SUBJECT (%)

OTHER CONSIDERATIONS

KEY GROWTH MARKETS

TABLE 60 GLOBAL GROWTH FORECAST FOR CURRENT AND

POTENTIAL ALD APPLICATIONS, 2009-2014

DRIVING FORCES AND THEIR IMPACT ON MARKET

GROWTH

TABLE 61 PERCENTAGE IMPACT OF MAJOR COMPETITIVE

FACTORS ON THE GROWTH OF THE ALD MARKET, 2009-2014

CHAPTER SEVEN: U.S. PATENT ANALYSIS

INTRODUCTION

SUMMARY OF PATENTS AWARDED DURING THE PERIOD 2007 THROUGH 2009

TABLE 62 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2009

TABLE 63 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2008

TABLE 64 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2007

GENERAL TRENDS

TABLE 65 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS,2003-2009

FIGURE 22 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS,2003-2009 (NUMBER OF PATENTS)

TRENDS BY COUNTRY AND REGION

FIGURE 23 SHARES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION BY REGION, 2007-2009 (%)

FIGURE 24 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2007-2009 (%)

FIGURE 25 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY,2003-2005 (NUMBER OF PATENTS)

TRENDS BY ASSIGNEE

TABLE 66 ASSIGNEES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION, 2007-2009

FIGURE 26 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2007-2009 (%)

TRENDS BY PATENT CATEGORY

FIGURE 27 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY CATEGORY, 2007-2009 (%)

TRENDS BY APPLICATION

FIGURE 28 ATOMIC LAYER DEPOSITION: SHARES OF U.S.PATENTS BY APPLICATION, 2007-2009 (%)

TRENDS BY FILM TYPE

FIGURE 29 ATOMIC LAYER DEPOSITON: SHARES OF U.S.PATENTS BY FILM TYPE, 2007-2009 (%)

LIST OF TABLES

SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION MARKET, THROUGH 2014 ($ MILLIONS)

TABLE 1 THIN FILM TECHNOLOGIES, 2009

TABLE 2 ATOMIC LAYER DEPOSITION—TECHNOLOGICAL MILESTONES

TABLE 3 ALD FILMS AND APPLICATIONS, 2009

TABLE 4 ALD APPLICATIONS IN ELECTRONICS, 2009

TABLE 5 ALD APPLICATIONS IN THE MECHANICAL/CHEMICAL SECTOR, 2009

TABLE 6 ALD APPLICATIONS IN THE ENERGY SECTOR, 2009

TABLE 7 ALD APPLICATIONS IN OPTICS, 2009

TABLE 8 ALD APPLICATIONS IN THE MEDICAL/BIOLOGICAL/DENTAL SECTOR, 2009

TABLE 9 ALD APPLICATIONS IN NANOTECHNOLOGY, 2009

TABLE 10 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005 THROUGH 2014 ($ MILLIONS)

TABLE 11 METAL SOURCES, 2009

TABLE 12 GLOBAL MARKET FOR ALD MATERIALS, THROUGH 2009 ($MILLIONS)

TABLE 13 ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, 2009 ($ MILLIONS/%)

TABLE 14 ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, 2009 ($ MILLIONS/%)

TABLE 15 ALD MATERIALS: GLOBAL REVENUES BY APPLICATION,2009 ($ MILLIONS/%)

TABLE 16 ALD PRECURSORS FOR SEMICONDUCTOR DEVICES:GLOBAL REVENUES BY FUNCTION, 2009 ($ MILLIONS/%)

TABLE 17 ALD MATERIALS: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)

TABLE 18 ALD TECHNOLOGIES

TABLE 19 GLOBAL MARKET FOR ALD EQUIPMENT, THROUGH 2009 ($MILLIONS)

TABLE 20 ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, 2009 ($ MILLIONS/%)

TABLE 21 ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%)

TABLE 22 ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)

TABLE 23 FORECAST—SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2014 ($ BILLIONS)

TABLE 24 IC CONFIGURATIONS, 2006-2015

TABLE 25 FORECAST—HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)

TABLE 26 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)

TABLE 27 FORECAST—ADVANCED DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ BILLIONS)

TABLE 28 THE NANOTECHNOLOGY INDUSTRY

TABLE 29 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT, THROUGH 2014 ($ BILLIONS)

TABLE 30 DEPOSITION METHODS FOR NANOFILMS

TABLE 31 FACTORS AFFECTING SALES OF ALD PRECURSORS AND EQUIPMENT, 2010-2014

TABLE 32 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, THROUGH 2014 ($ MILLIONS)

TABLE 33 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, THROUGH 2014 ($ MILLIONS)

TABLE 34 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)

TABLE 35 FORECAST—ALD PRECURSORS FOR SEMICONDUCTOR DEVICES: GLOBAL REVENUES BY FUNCTION, THROUGH 2014 ($ MILLIONS)

TABLE 36 FORECAST—ALD MATERIALS: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)

TABLE 37 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ MILLIONS)

TABLE 38 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)

TABLE 39 FORECAST—ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)

TABLE 40 MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT

TABLE 41 ALD MANUFACTURERS: DISTRIBUTION BY REGION, 2005 AND 2009 (NUMBER OF COMPANIES)

TABLE 42 NOTABLE INDUSTRY CHANGES SINCE 2005

TABLE 43 OTHER RELEVANT INDUSTRY PLAYERS

TABLE 44 ALD PRODUCTION BY REGION, 2007-2014 (PERCENT OF SALES)

TABLE 45 ALD CONSUMPTION BY REGION, 2007-2014 (PERCENT OF SALES)

TABLE 46 ALD MATERIALS—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)

TABLE 47 ALD EQUIPMENT—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)

TABLE 48 ORGANIZATIONS INVOLVED IN ALD RESEARCH,WORLDWIDE

TABLE 49 ALBANY NANOTECH RESEARCH

TABLE 50 ARGONNE NATIONAL LABORATORY RESEARCH

TABLE 51 HARVARD UNIVERSITY RESEARCH

TABLE 52 STANFORD UNIVERSITY RESEARCH

TABLE 53 UCLA RESEARCH

TABLE 54 UNIVERSITY OF COLORADO AT BOULDER RESEARCH

TABLE 55 EINDHOVEN UNIVERSITY OF TECHNOLOGY RESEARCH

TABLE 56 TKK RESEARCH

TABLE 57 IMEC RESEARCH

TABLE 58 UNIVERSITY OF HELSINKI RESEARCH

TABLE 59 KAIST RESEARCH

TABLE 60 GLOBAL GROWTH FORECAST FOR CURRENT AND POTENTIAL ALD APPLICATIONS, 2009-2014

TABLE 61 PERCENTAGE IMPACT OF MAJOR COMPETITIVE FACTORS ON THE GROWTH OF THE ALD MARKET, 2009-2014

TABLE 62 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2009

TABLE 63 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2008

TABLE 64 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2007

TABLE 65 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS, 2003-2009

TABLE 66 ASSIGNEES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION, 2007-2009

LIST OF FIGURES

SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION MARKET,2005-2014 ($ MILLIONS)

FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, AND SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2008 (%)

FIGURE 2 ATOMIC LAYER DEPOSITION—WORLDWIDE PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2008

FIGURE 3 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)

FIGURE 4 ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2009 (%)

FIGURE 5 ALD MATERIALS: MARKET SHARE BY APPLICATION, 2009 (%)

FIGURE 6 ALD MATERIALS: MARKET SHARE BY REGION, 2009 (%)

FIGURE 7 ALD EQUIPMENT: MARKET SHARE BY TYPE, 2009 (%)

FIGURE 8 ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2009 (%)

FIGURE 9 ALD EQUIPMENT: MARKET SHARE BY REGION, 2009 (%)

FIGURE 10 FORECAST—HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2014 (%)

FIGURE 11 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2009 AND 2014 (MILLION UNITS)

FIGURE 12 FORECAST—HARD DISKS: PRODUCTION SHARE BY TYPE, 2014 (%)

FIGURE 13 FORECAST—ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2014 (%)

FIGURE 14 FORECAST—ALD MATERIALS: MARKET SHARE BY APPLICATION, 2014 (%)

FIGURE 15 FORECAST—ALD MATERIALS: MARKET SHARE BY REGION, 2014 (%)

FIGURE 16 FORECAST—ALD EQUIPMENT: MARKET SHARE BY TYPE, 2014 (%)

FIGURE 17 FORECAST—ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2014 (%)

FIGURE 18 FORECAST—ALD EQUIPMENT: MARKET SHARE BY REGION, 2014 (%)

FIGURE 19 ALD MANUFACTURERS: DISTRIBUTION BY SIZE, 2009 (NUMBER OF COMPANIES)

FIGURE 20 ATOMIC LAYER DEPOSITION—TOP 25 MANUFACTURERS BY REGION, 2009 (%)

FIGURE 21 CURRENT GLOBAL ALD RESEARCH AND DEVELOPMENT BY SUBJECT (%)

FIGURE 22 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS,2003-2009 (NUMBER OF PATENTS)

FIGURE 23 SHARES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION BY REGION, 2007-2009 (%)

FIGURE 24 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2007-2009 (%)

FIGURE 25 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2003-2005 (NUMBER OF PATENTS)

FIGURE 26 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2007-2009 (%)

FIGURE 27 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY CATEGORY, 2007-2009 (%)

FIGURE 28 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY APPLICATION, 2007-2009 (%)

FIGURE 29 ATOMIC LAYER DEPOSITON: SHARES OF U.S. PATENTS BY FILM TYPE, 2007-2009 (%)

Abstract

THIS REPORT:

• Provides information on the basic atomic layer deposition (ALD) process, with its variants and upgrades, focusing on raw materials and equipment used
• Identifies various types of precursors and production systems, determines their current market status, defines trends, and presents forecasts of growth, with data for 2008, estimates for 2009, and compound annual growth rates (CAGRs) through 2014
• Discusses technological issues, including the latest process developments, and compares them with alternative thin film methods
• Analyzes the ALD industry on a worldwide basis from the standpoint of both manufacturing and consumption
• Supplies a detailed description of current and potential applications of ALD technology
• Examines commercial and public research activities in major regions of the world.

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