Global EUV Mask Defect Inspection Equipment Competitive Landscape Professional Research Report 2026
Description
Market Overview
According to DIResearch＇s in-depth investigation and research, the global EUV Mask Defect Inspection Equipment market size will reach 2,173.87 Million USD in 2026 and is projected to reach 5,063.78 Million USD by 2033, with a CAGR of 12.84% (2026-2033). Notably, the China EUV Mask Defect Inspection Equipment market has changed rapidly in the past few years. By 2026, China＇s market size is expected to be Million USD, representing approximately % of the global market share.
Research Summary
EUV (Extreme Ultraviolet) Mask Defect Inspection Equipment is a highly specialized system used in semiconductor manufacturing to detect and characterize defects on EUV photomasks, which are critical components for printing ultra-fine patterns onto silicon wafers at advanced technology nodes (typically 7nm and below). These masks operate at a wavelength of 13.5 nm, requiring inspection tools capable of extreme precision and sensitivity due to the small feature sizes and reflective mask structures. The equipment uses various advanced techniques, such as actinic (wavelength-matching) inspection, high-resolution imaging, and sophisticated algorithms, to identify even the smallest defects—such as phase defects, particles, or absorber pattern errors—that could affect chip yield or performance. Ensuring defect-free EUV masks is essential for the reliable production of next-generation integrated circuits.
The major global manufacturers of EUV Mask Defect Inspection Equipment include Lasertec, KLA-Tencor, Advantest, etc. The global players competition landscape in this report is divided into three tiers. The first tier comprises global leading enterprises that command a substantial market share, hold a dominant industry position, possess strong competitiveness and influence, and generate significant revenue. The second tier includes companies with a notable market presence and reputation; these firms actively follow industry leaders in product, service, or technological innovation and maintain a moderate revenue scale. The third tier consists of smaller companies with limited market share and lower brand recognition, primarily focused on local markets and generating comparatively lower revenue.
This report studies the market size, price trends and future development prospects of EUV Mask Defect Inspection Equipment. Focus on analysing the market share, product portfolio, prices, sales, revenue and gross profit margin of global major manufacturers, as well as the market status and trends of different product types and applications in the global EUV Mask Defect Inspection Equipment market. The report data covers historical data from 2021 to 2025, based year in 2026 and forecast data from 2027 to 2033.
The regions and countries in the report include North America, Europe, China, APAC (excl. China), Latin America and Middle East and Africa, covering the EUV Mask Defect Inspection Equipment market conditions and future development trends of key regions and countries, combined with industry-related policies and the latest technological developments, analyze the development characteristics of EUV Mask Defect Inspection Equipment industries in various regions and countries, help companies understand the development characteristics of each region, help companies formulate business strategies, and achieve the ultimate goal of the company's global development strategy.
The data sources of this report mainly include the National Bureau of Statistics, customs databases, industry associations, corporate financial reports, third-party databases, etc. Among them, macroeconomic data mainly comes from the National Bureau of Statistics, International Economic Research Organization; industry statistical data mainly come from industry associations; company data mainly comes from interviews, public information collection, third-party reliable databases, and price data mainly comes from various markets monitoring database.
Global Key Manufacturers of EUV Mask Defect Inspection Equipment Include:
Lasertec
KLA-Tencor
Advantest
EUV Mask Defect Inspection Equipment Product Segment Include:
5-7nm Process
3nm and Below Process
EUV Mask Defect Inspection Equipment Product Application Include:
Mask Shop
Fab
Chapter Scope
Chapter 1: Product Research Range, Product Types and Applications, Market Overview, Market Situation and Trends
Chapter 2: Global EUV Mask Defect Inspection Equipment Industry PESTEL Analysis
Chapter 3: Global EUV Mask Defect Inspection Equipment Industry Porter’s Five Forces Analysis
Chapter 4: Global EUV Mask Defect Inspection Equipment Major Regional Market Size (Revenue, Sales, Price) and Forecast Analysis
Chapter 5: Global EUV Mask Defect Inspection Equipment Market Size and Forecast by Type and Application Analysis
Chapter 6: North America EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 7: Europe EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 8: China EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 9: APAC (Excl. China) EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 10: Latin America EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 11: Middle East and Africa EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 12: Global EUV Mask Defect Inspection Equipment Competitive Analysis of Key Manufacturers (Sales, Revenue, Market Share, Price, Regional Distribution and Industry Concentration)
Chapter 13: Key Company Profiles (Product Portfolio, Sales, Revenue, Price and Gross Margin)
Chapter 14: Industrial Chain Analysis, Include Raw Material Suppliers, Distributors and Customers
Chapter 15: Research Findings and Conclusion
Chapter 16: Methodology and Data Sources
According to DIResearch＇s in-depth investigation and research, the global EUV Mask Defect Inspection Equipment market size will reach 2,173.87 Million USD in 2026 and is projected to reach 5,063.78 Million USD by 2033, with a CAGR of 12.84% (2026-2033). Notably, the China EUV Mask Defect Inspection Equipment market has changed rapidly in the past few years. By 2026, China＇s market size is expected to be Million USD, representing approximately % of the global market share.
Research Summary
EUV (Extreme Ultraviolet) Mask Defect Inspection Equipment is a highly specialized system used in semiconductor manufacturing to detect and characterize defects on EUV photomasks, which are critical components for printing ultra-fine patterns onto silicon wafers at advanced technology nodes (typically 7nm and below). These masks operate at a wavelength of 13.5 nm, requiring inspection tools capable of extreme precision and sensitivity due to the small feature sizes and reflective mask structures. The equipment uses various advanced techniques, such as actinic (wavelength-matching) inspection, high-resolution imaging, and sophisticated algorithms, to identify even the smallest defects—such as phase defects, particles, or absorber pattern errors—that could affect chip yield or performance. Ensuring defect-free EUV masks is essential for the reliable production of next-generation integrated circuits.
The major global manufacturers of EUV Mask Defect Inspection Equipment include Lasertec, KLA-Tencor, Advantest, etc. The global players competition landscape in this report is divided into three tiers. The first tier comprises global leading enterprises that command a substantial market share, hold a dominant industry position, possess strong competitiveness and influence, and generate significant revenue. The second tier includes companies with a notable market presence and reputation; these firms actively follow industry leaders in product, service, or technological innovation and maintain a moderate revenue scale. The third tier consists of smaller companies with limited market share and lower brand recognition, primarily focused on local markets and generating comparatively lower revenue.
This report studies the market size, price trends and future development prospects of EUV Mask Defect Inspection Equipment. Focus on analysing the market share, product portfolio, prices, sales, revenue and gross profit margin of global major manufacturers, as well as the market status and trends of different product types and applications in the global EUV Mask Defect Inspection Equipment market. The report data covers historical data from 2021 to 2025, based year in 2026 and forecast data from 2027 to 2033.
The regions and countries in the report include North America, Europe, China, APAC (excl. China), Latin America and Middle East and Africa, covering the EUV Mask Defect Inspection Equipment market conditions and future development trends of key regions and countries, combined with industry-related policies and the latest technological developments, analyze the development characteristics of EUV Mask Defect Inspection Equipment industries in various regions and countries, help companies understand the development characteristics of each region, help companies formulate business strategies, and achieve the ultimate goal of the company's global development strategy.
The data sources of this report mainly include the National Bureau of Statistics, customs databases, industry associations, corporate financial reports, third-party databases, etc. Among them, macroeconomic data mainly comes from the National Bureau of Statistics, International Economic Research Organization; industry statistical data mainly come from industry associations; company data mainly comes from interviews, public information collection, third-party reliable databases, and price data mainly comes from various markets monitoring database.
Global Key Manufacturers of EUV Mask Defect Inspection Equipment Include:
Lasertec
KLA-Tencor
Advantest
EUV Mask Defect Inspection Equipment Product Segment Include:
5-7nm Process
3nm and Below Process
EUV Mask Defect Inspection Equipment Product Application Include:
Mask Shop
Fab
Chapter Scope
Chapter 1: Product Research Range, Product Types and Applications, Market Overview, Market Situation and Trends
Chapter 2: Global EUV Mask Defect Inspection Equipment Industry PESTEL Analysis
Chapter 3: Global EUV Mask Defect Inspection Equipment Industry Porter’s Five Forces Analysis
Chapter 4: Global EUV Mask Defect Inspection Equipment Major Regional Market Size (Revenue, Sales, Price) and Forecast Analysis
Chapter 5: Global EUV Mask Defect Inspection Equipment Market Size and Forecast by Type and Application Analysis
Chapter 6: North America EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 7: Europe EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 8: China EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 9: APAC (Excl. China) EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 10: Latin America EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 11: Middle East and Africa EUV Mask Defect Inspection Equipment Competitive Analysis (Market Size, Key Players and Market Share, Product Type and Application Segment Analysis, Countries Analysis)
Chapter 12: Global EUV Mask Defect Inspection Equipment Competitive Analysis of Key Manufacturers (Sales, Revenue, Market Share, Price, Regional Distribution and Industry Concentration)
Chapter 13: Key Company Profiles (Product Portfolio, Sales, Revenue, Price and Gross Margin)
Chapter 14: Industrial Chain Analysis, Include Raw Material Suppliers, Distributors and Customers
Chapter 15: Research Findings and Conclusion
Chapter 16: Methodology and Data Sources
Table of Contents
170 Pages
- 1 EUV Mask Defect Inspection Equipment Market Overview
- 1.1 Product Definition and Statistical Scope
- 1.2 EUV Mask Defect Inspection Equipment Product by Type
- 1.2.1 5-7nm Process
- 1.2.2 3nm and Below Process
- 1.3 EUV Mask Defect Inspection Equipment Product by Application
- 1.3.1 Mask Shop
- 1.3.2 Fab
- 1.4 Global EUV Mask Defect Inspection Equipment Market Revenue and Sales Analysis
- 1.4.1 Global EUV Mask Defect Inspection Equipment Revenue Market Size Analysis (2021-2033)
- 1.4.2 Global EUV Mask Defect Inspection Equipment Sales Market Size Analysis (2021-2033)
- 1.4.3 Global EUV Mask Defect Inspection Equipment Market Sales Price Trend Analysis (2021-2033)
- 1.5 EUV Mask Defect Inspection Equipment Industry Trends and Innovation
- 1.5.1 EUV Mask Defect Inspection Equipment Industry Trends and Innovation
- 1.5.2 EUV Mask Defect Inspection Equipment Market Drivers and Challenges
- 2 EUV Mask Defect Inspection Equipment Market PESTEL Analysis
- 2.1 Political Factors Analysis
- 2.2 Economic Factors Analysis
- 2.3 Social Factors Analysis
- 2.4 Technological Factors Analysis
- 2.5 Environmental Factors Analysis
- 2.6 Legal Factors Analysis
- 3 EUV Mask Defect Inspection Equipment Market Porter's Five Forces Analysis
- 3.1 Competitive Rivalry
- 3.2 Threat of New Entrants
- 3.3 Bargaining Power of Suppliers
- 3.4 Bargaining Power of Buyers
- 3.5 Threat of Substitutes
- 4 Global EUV Mask Defect Inspection Equipment Market Analysis by Regions
- 4.1 EUV Mask Defect Inspection Equipment Overall Market: 2025 VS 2026 VS 2033
- 4.2 Global EUV Mask Defect Inspection Equipment Revenue and Forecast Analysis (2021-2033)
- 4.2.1 Global EUV Mask Defect Inspection Equipment Revenue and Market Share by Region (2021-2026)
- 4.2.2 Global EUV Mask Defect Inspection Equipment Revenue and Market Share Forecast by Region (2027-2033)
- 4.3 Global EUV Mask Defect Inspection Equipment Sales and Forecast Analysis (2021-2033)
- 4.3.1 Global EUV Mask Defect Inspection Equipment Sales and Market Share by Region (2021-2026)
- 4.3.2 Global EUV Mask Defect Inspection Equipment Sales and Market Share Forecast by Region (2027-2033)
- 4.4 Global EUV Mask Defect Inspection Equipment Sales Price Trend Analysis (2021-2033)
- 5 Global EUV Mask Defect Inspection Equipment Market Size by Type and Application
- 5.1 Global EUV Mask Defect Inspection Equipment Market Size by Type
- 5.1.1 Global EUV Mask Defect Inspection Equipment Revenue and Forecast Analysis by Type (2021-2033)
- 5.1.2 Global EUV Mask Defect Inspection Equipment Sales and Forecast Analysis by Type (2021-2033)
- 5.2 Global EUV Mask Defect Inspection Equipment Market Size by Application
- 5.2.1 Global EUV Mask Defect Inspection Equipment Revenue and Forecast Analysis by Application (2021-2033)
- 5.2.2 Global EUV Mask Defect Inspection Equipment Sales and Forecast Analysis by Application (2021-2033)
- 6 North America
- 6.1 North America EUV Mask Defect Inspection Equipment Market Size and Growth Rate Analysis (2021-2033)
- 6.2 North America Key Manufacturers Analysis
- 6.3 North America EUV Mask Defect Inspection Equipment Market Size by Type
- 6.3.1 North America EUV Mask Defect Inspection Equipment Sales by Type (2021-2033)
- 6.3.2 North America EUV Mask Defect Inspection Equipment Revenue by Type (2021-2033)
- 6.4 North America EUV Mask Defect Inspection Equipment Market Size by Application
- 6.4.1 North America EUV Mask Defect Inspection Equipment Sales by Application (2021-2033)
- 6.4.2 North America EUV Mask Defect Inspection Equipment Revenue by Application (2021-2033)
- 6.5 North America EUV Mask Defect Inspection Equipment Market Size by Country
- 6.5.1 US
- 6.5.2 Canada
- 7 Europe
- 7.1 Europe EUV Mask Defect Inspection Equipment Market Size and Growth Rate Analysis (2021-2033)
- 7.2 Europe Key Manufacturers Analysis
- 7.3 Europe EUV Mask Defect Inspection Equipment Market Size by Type
- 7.3.1 Europe EUV Mask Defect Inspection Equipment Sales by Type (2021-2033)
- 7.3.2 Europe EUV Mask Defect Inspection Equipment Revenue by Type (2021-2033)
- 7.4 Europe EUV Mask Defect Inspection Equipment Market Size by Application
- 7.4.1 Europe EUV Mask Defect Inspection Equipment Sales by Application (2021-2033)
- 7.4.2 Europe EUV Mask Defect Inspection Equipment Revenue by Application (2021-2033)
- 7.5 Europe EUV Mask Defect Inspection Equipment Market Size by Country
- 7.5.1 Germany
- 7.5.2 France
- 7.5.3 United Kingdom
- 7.5.4 Italy
- 7.5.5 Spain
- 7.5.6 Benelux
- 8 China
- 8.1 China EUV Mask Defect Inspection Equipment Market Size and Growth Rate Analysis (2021-2033)
- 8.2 China Key Manufacturers Analysis
- 8.3 China EUV Mask Defect Inspection Equipment Market Size by Type
- 8.3.1 China EUV Mask Defect Inspection Equipment Sales by Type (2021-2033)
- 8.3.2 China EUV Mask Defect Inspection Equipment Revenue by Type (2021-2033)
- 8.4 China EUV Mask Defect Inspection Equipment Market Size by Application
- 8.4.1 China EUV Mask Defect Inspection Equipment Sales by Application (2021-2033)
- 8.4.2 China EUV Mask Defect Inspection Equipment Revenue by Application (2021-2033)
- 9 APAC (excl. China)
- 9.1 APAC (excl. China) EUV Mask Defect Inspection Equipment Market Size and Growth Rate Analysis (2021-2033)
- 9.2 APAC (excl. China) Key Manufacturers Analysis
- 9.3 APAC (excl. China) EUV Mask Defect Inspection Equipment Market Size by Type
- 9.3.1 APAC (excl. China) EUV Mask Defect Inspection Equipment Sales by Type (2021-2033)
- 9.3.2 APAC (excl. China) EUV Mask Defect Inspection Equipment Revenue by Type (2021-2033)
- 9.4 APAC (excl. China) EUV Mask Defect Inspection Equipment Market Size by Application
- 9.4.1 APAC (excl. China) EUV Mask Defect Inspection Equipment Sales by Application (2021-2033)
- 9.4.2 APAC (excl. China) EUV Mask Defect Inspection Equipment Revenue by Application (2021-2033)
- 9.5 APAC (excl. China) EUV Mask Defect Inspection Equipment Market Size by Country
- 9.5.1 Japan
- 9.5.2 South Korea
- 9.5.3 India
- 9.5.4 Australia
- 9.5.5 Southeast Asia
- 10 Latin America
- 10.1 Latin America EUV Mask Defect Inspection Equipment Market Size and Growth Rate Analysis (2021-2033)
- 10.2 Latin America Key Manufacturers Analysis
- 10.3 Latin America EUV Mask Defect Inspection Equipment Market Size by Type
- 10.3.1 Latin America EUV Mask Defect Inspection Equipment Sales by Type (2021-2033)
- 10.3.2 Latin America EUV Mask Defect Inspection Equipment Revenue by Type (2021-2033)
- 10.4 Latin America EUV Mask Defect Inspection Equipment Market Size by Application
- 10.4.1 Latin America EUV Mask Defect Inspection Equipment Sales by Application (2021-2033)
- 10.4.2 Latin America EUV Mask Defect Inspection Equipment Revenue by Application (2021-2033)
- 10.5 Latin America EUV Mask Defect Inspection Equipment Market Size by Country
- 10.6 Latin America EUV Mask Defect Inspection Equipment Market Size by Country
- 10.6.1 Mexico
- 10.6.2 Brazil
- 11 Middle East & Africa
- 11.1 Middle East & Africa EUV Mask Defect Inspection Equipment Market Size and Growth Rate Analysis (2021-2033)
- 11.2 Middle East & Africa Key Manufacturers Analysis
- 11.3 Middle East & Africa EUV Mask Defect Inspection Equipment Market Size by Type
- 11.3.1 Middle East & Africa EUV Mask Defect Inspection Equipment Sales by Type (2021-2033)
- 11.3.2 Middle East & Africa EUV Mask Defect Inspection Equipment Revenue by Type (2021-2033)
- 11.4 Middle East & Africa EUV Mask Defect Inspection Equipment Market Size by Application
- 11.4.1 Middle East & Africa EUV Mask Defect Inspection Equipment Sales by Application (2021-2033)
- 11.4.2 Middle East & Africa EUV Mask Defect Inspection Equipment Revenue by Application (2021-2033)
- 11.5 Middle East EUV Mask Defect Inspection Equipment Market Size by Country
- 11.5.1 Saudi Arabia
- 11.5.2 South Africa
- 12 Competition by Manufacturers
- 12.1 Global EUV Mask Defect Inspection Equipment Market Sales, Revenue and Price by Key Manufacturers (2021-2026)
- 12.1.1 Global EUV Mask Defect Inspection Equipment Market Sales by Key Manufacturers (2021-2026)
- 12.1.2 Global EUV Mask Defect Inspection Equipment Market Revenue by Key Manufacturers (2021-2026)
- 12.1.3 Global EUV Mask Defect Inspection Equipment Average Sales Price by Manufacturers (2021-2026)
- 12.2 EUV Mask Defect Inspection Equipment Competitive Landscape Analysis and Market Dynamic
- 12.2.1 EUV Mask Defect Inspection Equipment Competitive Landscape Analysis
- 12.2.2 Global Key Manufacturers Headquarter Location and Key Area Sales
- 12.2.3 Market Dynamic
- 13 Key Companies Analysis
- 13.1 Lasertec
- 13.1.1 Lasertec Basic Company Profile (Employees, Areas Service, Competitors and Contact Information)
- 13.1.2 Lasertec EUV Mask Defect Inspection Equipment Product Portfolio
- 13.1.3 Lasertec EUV Mask Defect Inspection Equipment Market Data Analysis (Revenue, Sales, Price, Gross Margin and Market Share) (2021-2026)
- 13.2 KLA-Tencor
- 13.2.1 KLA-Tencor Basic Company Profile (Employees, Areas Service, Competitors and Contact Information)
- 13.2.2 KLA-Tencor EUV Mask Defect Inspection Equipment Product Portfolio
- 13.2.3 KLA-Tencor EUV Mask Defect Inspection Equipment Market Data Analysis (Revenue, Sales, Price, Gross Margin and Market Share) (2021-2026)
- 13.3 Advantest
- 13.3.1 Advantest Basic Company Profile (Employees, Areas Service, Competitors and Contact Information)
- 13.3.2 Advantest EUV Mask Defect Inspection Equipment Product Portfolio
- 13.3.3 Advantest EUV Mask Defect Inspection Equipment Market Data Analysis (Revenue, Sales, Price, Gross Margin and Market Share) (2021-2026)
- 14 Industry Chain Analysis
- 14.1 EUV Mask Defect Inspection Equipment Industry Chain Analysis
- 14.2 EUV Mask Defect Inspection Equipment Industry Raw Material and Suppliers Analysis
- 14.2.1 EUV Mask Defect Inspection Equipment Key Raw Material Supply Analysis
- 14.2.2 Raw Material Suppliers and Contact Information
- 14.3 EUV Mask Defect Inspection Equipment Typical Downstream Customers
- 14.4 EUV Mask Defect Inspection Equipment Sales Channel Analysis
- 15 Research Findings and Conclusion
- 16 Methodology and Data Source
- 16.1 Methodology/Research Approach
- 16.2 Research Scope
- 16.3 Benchmarks and Assumptions
- 16.4 Date Source
- 16.4.1 Primary Sources
- 16.4.2 Secondary Sources
- 16.5 Data Cross Validation
- 16.6 Disclaimer
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