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Extreme Ultraviolet (EUV) Lithography Market by Component (Light Sources, Optics, Masks), System Type (0.33 NA EUV System (NXE), 0.55 NA EUV System (EXE)), Integrated Device Manufacturers, Foundries, Logic Chips, Memory Chips - Global Forecast to 2032

Publisher MarketsandMarkets
Published Feb 03, 2026
Length 206 Pages
SKU # MKMK20831456

Description

The global extreme ultraviolet (EUV) lithography market is expected to grow from USD 15.84 billion in 2026 to USD 30.36 billion by 2032, at a CAGR of 11.4%. The rapid advancements in consumer electronics, including smartphones, wearables, tablets, and gaming devices, are driving sustained demand for advanced semiconductor chips that offer higher performance, compact designs, and improved energy efficiency. To support faster processing, enhanced graphics, and longer battery life, manufacturers increasingly rely on EUV lithography to enable smaller transistors and higher transistor density. The shift toward next-generation technologies, including foldable displays, augmented reality, and virtual reality, is further increasing chip complexity and reinforcing the need for high-precision EUV-based manufacturing. As performance and miniaturization requirements continue to rise across consumer electronics and autonomous applications, EUV lithography is becoming a critical enabler for producing reliable, high-performance integrated circuits at advanced nodes.

“Light sources to exhibit highest CAGR from 2026 to 2032.”

Light sources are expected to witness the highest CAGR in the extreme ultraviolet (EUV) lithography market due to their direct impact on system productivity, throughput, and cost efficiency at advanced semiconductor nodes. Continuous demand for higher wafer throughput is driving the need for increased EUV source power, improved stability, and longer uptime, prompting frequent upgrades and replacements of existing light source modules. In addition, the transition toward more advanced process nodes and the gradual shift to next-generation EUV platforms are increasing performance requirements for light sources, accelerating R&D investments and adoption. The high technical complexity, limited supplier base, and strong focus on productivity-driven enhancements further support faster revenue growth for this component compared to other EUV system elements.

“Logic chips held largest share of extreme ultraviolet (EUV) lithography market in 2025.”

Logic chips held the largest market share in the application segment of the extreme ultraviolet (EUV) lithography market in 2025, driven by early and widespread adoption of EUV at advanced process nodes. Leading-edge logic devices at 7 nm, 5 nm, and 3 nm require extremely fine patterning, tight overlay control, and high transistor density, all of which are more efficiently achieved using EUV compared with multi-patterning DUV techniques. The rapid growth of applications such as artificial intelligence, high-performance computing, data centers, and advanced automotive electronics is driving strong demand for high-performance logic chips, accelerating EUV tool utilization and capacity expansion. In contrast, memory manufacturers have adopted EUV more selectively, focusing on specific layers, which further reinforces the dominance of logic chips in overall extreme ultraviolet (EUV) lithography demand.

“Asia Pacific to be fastest-growing regional market for EUV lithography from 2026 to 2032.”

Asia Pacific is expected to register the highest CAGR during the forecast period, driven by its strong concentration of leading semiconductor foundries and integrated device manufacturers (IDMs), as well as continuous investments in advanced-node manufacturing. The region’s dominance is supported by large-scale capacity expansions at 5 nm, 3 nm, and sub-3 nm nodes, rising demand for logic chips used in AI, high-performance computing, and advanced consumer electronics, and a mature semiconductor supply chain that enables rapid EUV adoption. In addition, sustained capital expenditure, aggressive technology roadmaps, and government-backed initiatives to strengthen domestic semiconductor capabilities are accelerating EUV tool installations. These factors collectively position Asia Pacific as the primary demand center and growth engine for the global extreme ultraviolet (EUV) lithography market.

Breakdown of Primaries

Various executives from key organizations operating in the extreme ultraviolet (EUV) lithography market were interviewed in-depth, including CEOs, marketing directors, and innovation and technology directors.
  • By Company Type: Tier 1–30%, Tier 2–50%, and Tier 3–20%
  • By Designation: C-level Executives–25%, Directors–35%, and Others–40%
  • By Region: Asia Pacific–40%, Americas–25%, and EMEA- 35%
The extreme ultraviolet (EUV) lithography market is dominated by ASML (Netherlands) as the sole manufacturer of EUV lithography products, as well as by component manufacturers such as TRUMPF (Germany), Ushio Inc. (Japan), Energetiq (US), Zeiss Group (Germany), NTT Advanced Technology Corporation (Japan), Rigaku Holdings Corporation (Japan), Edmund Optics Inc. (US), AGC Inc. (Japan), Tekscend Photomask (Japan), Lasertec Corporation (Japan), HOYA Corporation (Japan), NuFlare Technology, Inc. (Japan), KLA Corporation (US), ADVANTEST CORPORATION (Japan), SUSS MicroTec SE (Germany), Applied Materials, Inc. (US), Park Systems (South Korea), Imagine Optic (France), MKS Inc. (US), Taiwan Semiconductor Manufacturing Company Limited (TSMC) (Taiwan), Intel Corporation (US), Samsung (South Korea), SK HYNIX INC. (South Korea), and Micron Technology (US). The study includes an in-depth competitive analysis of these key players in the extreme ultraviolet (EUV) lithography market, with their company profiles, recent developments, and key market strategies.

Study Coverage

The report segments the extreme ultraviolet (EUV) lithography market and forecasts its components, system types, end users, applications, and regions. The report also discusses the drivers, restraints, opportunities, and challenges pertaining to the market. It provides a detailed view of the market across three main regions—Americas, Asia Pacific, and EMEA. The report includes a value chain analysis of the key players and their competitive analysis of the EUV lithography ecosystem.

Key Benefits of Buying the Report
  • Analysis of key drivers (surging deployment of EUV lithography across leading-edge foundry nodes), restraints (high upfront capital investment), opportunities (increasing investments in advanced EUV lithography and semiconductor devices), and challenges (competition from alternative lithography techniques) influencing the growth of the extreme ultraviolet (EUV) lithography market
  • Products/Solution/Service Development/Innovation: Detailed insights into upcoming components, technologies, research, and development activities in the extreme ultraviolet (EUV) lithography market
  • Market Development: Comprehensive information about lucrative markets–the report analyzes the extreme ultraviolet (EUV) lithography market across varied regions
  • Market Diversification: Exhaustive information about new EUV lithography in untapped geographies, recent developments, and investments in the extreme ultraviolet (EUV) lithography market
  • Competitive Assessment: In-depth assessment of market shares and growth strategies, and offerings of leading players offering components of EUV lithography, such as KLA Corporation (US), ZEISS Group (Germany), TRUMPF (Germany), AGC Inc. (Japan), and Lasertec Corporation (Japan)
Tables List
Table 1 Extreme Ultraviolet (Euv) Lithography Market: Inclusions And Exclusions
Table 2 Extreme Ultraviolet (Euv) Lithography Market: Summary Of Changes
Table 3 Porter's Five Forces Analysis: Extreme Ultraviolet (Euv)
Lithography Market
Table 4 Gdp Percentage Change, By Key Country, 2021–2029
Table 5 Role Of Companies In Euv Lithography Ecosystem
Table 6 Average Selling Price Trend Of Euv Lithography System Types Offered By Asml, 2021–2025 (Usd)
Table 7 Average Selling Price Trend Of Euv Lithography System, By Region, 2021–2025 (Usd Million)
Table 8 Import Data For Hs Code 8442-compliant Products, By Country,
2020–2024 (Usd Million)
Table 9 Export Data For Hs Code 8442-compliant Products, By Country,
2020–2024 (Usd Million)
Table 10 Extreme Ultraviolet (Euv) Lithography Market: Key Conferences And Events, 2026–2027
Table 11 Us-adjusted Reciprocal Tariff Rates
Table 12 List Of Major Patents, 2023–2024
Table 13 Top Use Cases And Market Potential
Table 14 Best Practices Followed By Companies
Table 15 Extreme Ultraviolet (Euv) Lithography Market: Case Studies Related To Ai Implementation
Table 16 Interconnected/Adjacent Ecosystem And Impact On Market Players
Table 17 Americas: Regulatory Bodies, Government Agencies, And Other Organizations
Table 18 Europe: Regulatory Bodies, Government Agencies, And Other Organizations
Table 19 Asia Pacific: Regulatory Bodies, Government Agencies, And Other Organizations
Table 20 Euv Lithography: Regulations
Table 21 Influence Of Stakeholders On Buying Process For End Users (%)
Table 22 Key Buying Criteria For End Users
Table 23 Unmet Needs Of End Users Of Euv Lithography Technology
Table 24 Extreme Ultraviolet (Euv) Lithography Market, By Component,
2022–2025 (Usd Million)
Table 25 Extreme Ultraviolet (Euv) Lithography Market, By Component,
2026–2032 (Usd Million)
Table 26 Extreme Ultraviolet (Euv) Lithography Market, By System Type, In Terms Of Value And Volume, 2022–2025
Table 27 Extreme Ultraviolet (Euv) Lithography Market, By System Type, In Terms Of Value And Volume, 2026–2032
Table 28 Extreme Ultraviolet (Euv) Lithography Market, By System Type,
2022–2025 (Usd Million)
Table 29 Extreme Ultraviolet (Euv) Lithography Market, By System Type,
2026–2032 (Usd Million)
Table 30 Extreme Ultraviolet (Euv) Lithography Market, By End User,
2022–2025 (Usd Million)
Table 31 Extreme Ultraviolet (Euv) Lithography Market, By End User,
2026–2032 (Usd Million)
Table 32 Integrated Device Manufacturers (Idms): Extreme Ultraviolet (Euv) Lithography Market, By Region, 2022–2025 (Usd Million)
Table 33 Integrated Device Manufacturers (Idms): Extreme Ultraviolet (Euv) Lithography Market, By Region, 2026–2032 (Usd Million)
Table 34 Integrated Device Manufacturers (Idms): Extreme Ultraviolet (Euv) Lithography Market In Asia Pacific, By Country, 2022–2025 (Usd Million)
Table 35 Integrated Device Manufacturers (Idms): Extreme Ultraviolet (Euv) Lithography Market In Asia Pacific, By Country, 2026–2032 (Usd Million)
Table 36 Foundries: Extreme Ultraviolet (Euv) Lithography Market, By Region, 2022–2025 (Usd Million)
Table 37 Foundries: Extreme Ultraviolet (Euv) Lithography Market, By Region, 2026–2032 (Usd Million)
Table 38 Foundries: Extreme Ultraviolet (Euv) Lithography Market In
Asia Pacific, By Country, 2022–2025 (Usd Million)
Table 39 Foundries: Extreme Ultraviolet (Euv) Lithography Market In
Asia Pacific, By Country, 2026–2032 (Usd Million)
Table 40 Extreme Ultraviolet (Euv) Lithography Market, By Application,
2022–2025 (Usd Million)
Table 41 Extreme Ultraviolet (Euv) Lithography Market, By Application,
2026–2032 (Usd Million)
Table 42 Extreme Ultraviolet (Euv) Lithography Market, By Region,
2022–2025 (Usd Million)
Table 43 Extreme Ultraviolet (Euv) Lithography Market, By Region,
2026–2032 (Usd Million)
Table 44 Americas: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2022–2025 (Usd Million)
Table 45 Americas: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2026–2032 (Usd Million)
Table 46 Emea: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2022–2025 (Usd Million)
Table 47 Emea: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2026–2032 (Usd Million)
Table 48 Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market, By Country, 2022–2025 (Usd Million)
Table 49 Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market, By Country, 2026–2032 (Usd Million)
Table 50 Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2022–2025 (Usd Million)
Table 51 Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2026–2032 (Usd Million)
Table 52 China: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2022–2025 (Usd Million)
Table 53 China: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2026–2032 (Usd Million)
Table 54 Japan: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2022–2025 (Usd Million)
Table 55 Japan: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2026–2032 (Usd Million)
Table 56 South Korea: Extreme Ultraviolet (Euv) Lithography Market,
By End User, 2022–2025 (Usd Million)
Table 57 South Korea: Extreme Ultraviolet (Euv) Lithography Market,
By End User, 2026–2032 (Usd Million)
Table 58 Taiwan: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2022–2025 (Usd Million)
Table 59 Taiwan: Extreme Ultraviolet (Euv) Lithography Market, By End User, 2026–2032 (Usd Million)
Table 60 Rest Of Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market,
By End User, 2022–2025 (Usd Million)
Table 61 Rest Of Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market,
By End User, 2026–2032 (Usd Million)
Table 62 Extreme Ultraviolet (Euv) Lithography Market: Key Player Strategies/ Right To Win, 2024–2025
Table 63 Extreme Ultraviolet (Euv) Lithography Market: Degree Of Competition
Table 64 Extreme Ultraviolet (Euv) Lithography Market: Region Footprint, 2025
Table 65 Extreme Ultraviolet (Euv) Lithography Market:
End User Footprint, 2025
Table 66 Extreme Ultraviolet (Euv) Lithography Market:
Component Footprint, 2025
Table 67 Extreme Ultraviolet (Euv) Lithography Market:
List Of Key Startups/Smes, 2025
Table 68 Extreme Ultraviolet (Euv) Lithography Market: Competitive Benchmarking Of Key Startups/Smes, 2025
Table 69 Extreme Ultraviolet (Euv) Lithography Market: Product Launches, October 2024 To December 2025
Table 70 Extreme Ultraviolet (Euv) Lithography Market: Deals,
October 2024 To December 2025
Table 71 Asml: Company Overview
Table 72 Asml: Products/Solutions/Services Offered
Table 73 Asml: Deals
Table 74 Trumpf: Company Overview
Table 75 Trumpf: Products/Solutions/Services Offered
Table 76 Ushio Inc.: Company Overview
Table 77 Ushio Inc.: Products/Solutions/Services Offered
Table 78 Energetiq: Company Overview
Table 79 Energetiq: Products/Solutions/Services Offered
Table 80 Energetiq: Product Launches
Table 81 Zeiss Group: Company Overview
Table 82 Zeiss Group: Products/Solutions/Services Offered
Table 83 Zeiss Group: Product Launches
Table 84 Zeiss Group: Deals
Table 85 Ntt Advanced Technology Corporation: Company Overview
Table 86 Ntt Advanced Technology Corporation:
Products/Solutions/Services Offered
Table 87 Rigaku Holdings Corporation: Company Overview
Table 88 Rigaku Holdings Corporation: Products/Solutions/Services Offered
Table 89 Edmund Optics Inc.: Company Overview
Table 90 Edmund Optics Inc.: Products/Solutions/Services Offered
Table 91 Agc Inc.: Company Overview
Table 92 Agc Inc.: Products/Solutions/Services Offered
Table 93 Tekscend Photomask: Company Overview
Table 94 Tekscend Photomask: Products/Solutions/Services Offered
Table 95 Lasertec Corporation: Company Overview
Table 96 Lasertec Corporation: Products/Solutions/Services Offered
Table 97 Lasertec Corporation: Product Launches
Table 98 Hoya Corporation: Company Overview
Table 99 Hoya Corporation: Products/Solutions/Services Offered
Table 100 Nuflare Technology Inc.: Company Overview
Table 101 Nuflare Technology Inc.: Products/Solutions/Services Offered
Table 102 Kla Corporation: Company Overview
Table 103 Advantest Corporation: Company Overview
Table 104 Suss Microtec Se: Company Overview
Table 105 Applied Materials, Inc.: Company Overview
Table 106 Park Systems: Company Overview
Table 107 Imagine Optic: Company Overview
Table 108 Mks Inc.: Company Overview
Table 109 Taiwan Semiconductor Manufacturing Company Limited:
Company Overview
Table 110 Intel Corporation: Company Overview
Table 111 Samsung: Company Overview
Table 112 Sk Hynix Inc.: Company Overview
Table 113 Micron Technology, Inc.: Company Overview
Table 114 Major Secondary Sources
Table 115 Primary Interview Participants
Table 116 Extreme Ultraviolet (Euv) Lithography Market: Risk Analysis
Figures List
Figure 1 Extreme Ultraviolet (Euv) Lithography Market Segmentation And Regional Scope
Figure 2 Extreme Ultraviolet (Euv) Lithography Market: Duration Covered
Figure 3 Market Scenario
Figure 4 Global Extreme Ultraviolet (Euv) Lithography Market Size, 2022–2032
Figure 5 Major Strategies Adopted By Key Players In Extreme Ultraviolet (Euv) Lithography Market, 2024–2025
Figure 6 Disruptive Trends Impacting Growth Of Extreme Ultraviolet (Euv) Lithography Market
Figure 7 High-growth Segments In Extreme Ultraviolet (Euv) Lithography Market, 2026–2032
Figure 8 Asia Pacific To Dominate Extreme Ultraviolet (Euv) Lithography Market In 2026
Figure 9 Rising Demand For Advanced Semiconductor Notes To Create Opportunities For Market Players
Figure 10 Foundries To Command Extreme Ultraviolet (Euv) Lithography Market In 2032
Figure 11 Logic Chips Segment To Dominate Extreme Ultraviolet (Euv) Lithography Market In 2032
Figure 12 Asia Pacific To Capture Largest Share Of Extreme Ultraviolet (Euv) Lithography Market In 2032
Figure 13 Drivers, Restraints, Opportunities, And Challenges
Figure 14 Impact Analysis: Drivers
Figure 15 Impact Analysis: Restraints
Figure 16 Impact Analysis: Opportunities
Figure 17 Impact Analysis: Challenges
Figure 18 Extreme Ultraviolet (Euv) Lithography Market: Porter's
Five Forces Analysis
Figure 19 Euv Lithography Value Chain Analysis
Figure 20 Euv Lithography Ecosystem Analysis
Figure 21 Average Selling Price Trend Of Euv Lithography System Types Offered By Key Players, 2021–2025
Figure 22 Average Selling Price Trend Of Euv Lithography System, By Region, 2021–2025
Figure 23 Import Scenario For Hs Code 8442-compliant Products In
Top 5 Countries, 2020–2024
Figure 24 Export Scenario For Hs Code 8442-compliant Products In
Top 5 Countries, 2020–2024
Figure 25 Trends/Disruptions Impacting Customer Business
Figure 26 Investment And Funding Scenario, 2020–2025
Figure 27 Patents Applied And Granted, 2015–2024
Figure 28 Decision-making Factors In Extreme Ultraviolet (Euv) Lithography Market
Figure 29 Influence Of Stakeholders On Buying Process For End Users
Figure 30 Key Buying Criteria For End Users
Figure 31 Adoption Barriers And Internal Challenges
Figure 32 Light Sources To Register Highest Cagr During Forecast Period
Figure 33 0.55 Na Euv Systems (Exe) To Exhibit Higher Cagr During Forecast Period
Figure 34 Foundries To Account For Larger Market Share In 2026
Figure 35 Memory Chips To Register Higher Cagr During Forecast Period
Figure 36 Asia Pacific To Dominate Extreme Ultraviolet (Euv) Lithography Market Throughout Forecast Period
Figure 37 Americas: Extreme Ultraviolet (Euv) Lithography Market Snapshot
Figure 38 Emea: Extreme Ultraviolet (Euv) Lithography Market Snapshot
Figure 39 Asia Pacific: Extreme Ultraviolet (Euv) Lithography Market Snapshot
Figure 40 Revenue Analysis Of Key Players, 2021–2025
Figure 41 Market Share Analysis Of Companies Offering Euv Lithography Solutions, 2025
Figure 42 Company Valuation, 2025
Figure 43 Financial Metrics, 2025
Figure 44 Product Comparison
Figure 45 Extreme Ultraviolet (Euv) Lithography Market: Company Evaluation Matrix (Key Players), 2025
Figure 46 Extreme Ultraviolet (Euv) Lithography Market:
Company Footprint, 2025
Figure 47 Extreme Ultraviolet (Euv) Lithography Market:
Company Evaluation Matrix (Startups/Smes), 2025
Figure 48 Asml: Company Snapshot
Figure 49 Trumpf: Company Snapshot
Figure 50 Ushio Inc.: Company Snapshot
Figure 51 Zeiss Group: Company Snapshot
Figure 52 Rigaku Holdings Corporation: Company Snapshot
Figure 53 Agc Inc.: Company Snapshot
Figure 54 Tekscend Photomask: Company Snapshot
Figure 55 Lasertec Corporation: Company Snapshot
Figure 56 Hoya Corporation: Company Snapshot
Figure 57 Extreme Ultraviolet (Euv) Lithography Market: Research Design
Figure 58 Extreme Ultraviolet (Euv) Lithography Market: Research Approach
Figure 59 Data Captured From Secondary Sources
Figure 60 Breakdown Of Primary Interviews, By Company Type,
Designation, And Region
Figure 61 Data Captured From Primary Sources
Figure 62 Core Findings From Industry Experts
Figure 63 Extreme Ultraviolet (Euv) Lithography Market: Research Flow
Figure 64 Extreme Ultraviolet (Euv) Lithography Market: Bottom-up Approach
Figure 65 Extreme Ultraviolet (Euv) Lithography Market: Top-down Approach
Figure 66 Extreme Ultraviolet (Euv) Lithography Market Size Estimation Methodology (Supply Side)
Figure 67 Extreme Ultraviolet (Euv) Lithography Market: Data Triangulation
Figure 68 Extreme Ultraviolet (Euv) Lithography Market: Research Assumptions

Table of Contents

206 Pages
1 Introduction
1.1 Study Objectives
1.2 Market Definition
1.3 Study Scope
1.3.1 Markets Covered And Regional Scope
1.3.2 Inclusions And Exclusions
1.3.3 Years Considered
1.4 Currency Considered
1.5 Unit Considered
1.6 Limitations
1.7 Stakeholders
1.8 Summary Of Changes
2 Executive Summary
2.1 Market Highlights And Key Insights
2.2 Key Market Participants: Mapping Of Strategic Developments
2.3 Disruptive Trends In Extreme Ultraviolet (Euv) Lithography Market
2.4 High-growth Segments
2.5 Regional Snapshot: Market Size, Growth Rate, And Forecast
3 Premium Insights
3.1 Attractive Opportunities For Players In
Extreme Ultraviolet (Euv) Lithography Market
3.2 Extreme Ultraviolet (Euv) Lithography Market, By End User
3.3 Extreme Ultraviolet (Euv) Lithography Market, By Application
3.4 Extreme Ultraviolet (Euv) Lithography Market, By Region
4 Market Overview
4.1 Introduction
4.2 Market Dynamics
4.2.1 Drivers
4.2.1.1 Surging Deployment Of Euv Lithography Across Leading-edge Foundry Nodes
4.2.1.2 Elevating Use Of Ai Accelerators And Deep Learning Processors In Hpc Systems
4.2.1.3 Increasing Complexity Of Integrated Circuits
4.2.1.4 Rapid Advancements In Consumer Electronics
4.2.2 Restraints
4.2.2.1 High Upfront Capital Investment
4.2.2.2 Requirement For Advanced Infrastructure And Skilled Workforce
4.2.3 Opportunities
4.2.3.1 Increasing Investments In Advanced Euv Lithography And Semiconductor Devices
4.2.3.2 Emerging Applications Of Euv Lithography
4.2.3.3 Advancements In Memory Modules And Chips
4.2.3.4 Integration Of Euv Lithography Into Advanced Display Manufacturing
4.2.3.5 Application Of Advanced Patterning Technologies In Photonics And Optics Production
4.2.3.6 Commercialization Of High-na Euv Lithography
4.2.4 Challenges
4.2.4.1 Competition From Alternative Lithography Techniques
4.2.4.2 Difficulty In Sustaining High Source Power And Productivity
4.2.4.3 Detecting And Addressing Mask Defects And Yield-related Challenges
5 Industry Trends
5.1 Introduction
5.2 Porter's Five Forces Analysis
5.2.1 Intensity Of Competitive Rivalry
5.2.2 Threat Of New Entrants
5.2.3 Threat Of Substitutes
5.2.4 Bargaining Power Of Buyers
5.2.5 Bargaining Power Of Suppliers
5.3 Macroeconomic Outlook
5.3.1 Introduction
5.3.2 Gdp Trends And Forecast
5.3.3 Trends In Foundries
5.3.4 Trends In Integrated Device Manufacturers (Idms)
5.4 Value Chain Analysis
5.4.1 R&D Engineers
5.4.2 Raw Material Providers And Component Manufacturers
5.4.3 System Integrators And Manufacturers
5.4.4 Marketing & Sales Services Providers
5.4.5 End Users
5.5 Ecosystem Analysis
5.6 Pricing Analysis
5.6.1 Average Selling Price Trend Of Euv Lithography System Types,
By Key Player, 2021–2025
5.6.2 Average Selling Price Trend Of Euv Lithography System, By Region, 2021–2025
5.7 Trade Analysis
5.7.1 Import Scenario (Hs Code 8442)
5.7.2 Export Scenario (Hs Code 8442)
5.8 Key Conferences And Events, 2026–2027
5.9 Trends/Disruptions Impacting Customer Business
5.10 Investment And Funding Scenario
5.11 Case Study Analysis
5.11.1 Intel Secures Exclusive High-na Euv Lithography Machines To Reshape Supply Chain
5.11.2 Tsmc Deploys Euv Lithography Systems To Boost Production Capacity
5.11.3 Samsung Electronics Advances 3 Nm Gaa Production Using Euv Lithography
5.12 Impact Of 2025 Us Tariff On Extreme Ultraviolet (Euv) Lithography Market
5.12.1 Introduction
5.12.2 Key Tariff Rates
5.12.3 Price Impact Analysis
5.12.4 Impact On Country/Region
5.12.4.1 Us
5.12.4.2 Europe
5.12.4.3 Asia Pacific
5.12.5 Impact On End Users
6 Technological Advancements, Ai-driven Impact, Patents,
And Innovations
6.1 Technology Analysis
6.1.1 Key Emerging Technologies
6.1.1.1 High-na Euv Lithography Technology
6.1.1.2 Advanced Euv Resist And Patterning Materials
6.1.2 Complementary Technologies
6.1.2.1 Mask Pellicles
6.1.2.2 Plasma Generation
6.1.3 Adjacent Technologies
6.1.3.1 Extreme Ultraviolet Reflectometry (Euvr)
6.1.3.2 Atomic Layer Deposition (Ald)
6.2 Technology/Product Roadmap
6.2.1 Short-term (2025–2027): Productivity Optimization & Advanced Node Scaling
6.2.2 Mid-term (2027–2030): High-na Euv Commercialization & Process Maturity
6.2.3 Long-term (2030–2035+): Full High-na Deployment & Next-gen Lithography Integration
6.3 Patent Analysis
6.4 Impact Of Ai On Euv Lithography
6.4.1 Top Use Cases And Market Potential
6.4.2 Best Practices In Extreme Ultraviolet (Euv) Lithography Market
6.4.3 Case Studies Of Ai Implementation In Extreme Ultraviolet (Euv) Lithography Market
6.4.4 Interconnected/Adjacent Ecosystem And Impact On Market Players
6.4.5 Clients’ Readiness To Adopt Ai In Extreme Ultraviolet (Euv) Lithography Market
7 Regulatory Landscape
7.1 Introduction
7.2 Regulatory Bodies, Government Agencies, And Other Organizations
7.3 Regulations
7.4 Standards
7.4.1 Semi Standards
7.4.2 Iso & Iec Electrical, Mechanical, And Safety Standards
7.4.3 Iso 9001:2015 Quality Management System Standards
7.4.4 Iso 14001 Environmental Management Standards
7.4.5 Rohs & Reach Compliance Standards
7.4.6 Cybersecurity & Data Integrity Standards
7.5 Government Regulations
7.5.1 Us
7.5.2 Europe
7.5.3 China
7.5.4 Japan
7.5.5 India
7.6 Sustainability Impact And Regulatory Policy Initiatives
7.7 Certifications, Labeling, And Eco-standards
8 Customer Landscape And Buyer Behavior
8.1 Decision-making Process
8.2 Key Stakeholders And Buying Criteria
8.2.1 Key Stakeholders In Buying Process
8.2.2 Buying Criteria
8.3 Adoption Barriers And Internal Challenges
8.4 Unmet Needs Of Various End Users
8.5 Market Profitability
9 Application Nodes Of Extreme Ultraviolet (Euv)
Lithography Technology
9.1 Introduction
9.2 7 Nm
9.3 5 Nm
9.4 3 Nm
9.5 2 Nm
9.6 Sub-2 Nm
10 Extreme Ultraviolet (Euv) Lithography Market, By Component
10.1 Introduction
10.2 Light Sources
10.2.1 Rising Focus On Enhancing Precision And Throughput In Semiconductors To Boost Demand
10.3 Optics
10.3.1 Elevating Demand For Higher Numerical Aperture (High-na) Euv Systems To Support Segmental Growth
10.4 Masks
10.4.1 Greater Emphasis On Process Efficiency And Sustainability In Euv Mask Production To Contribute To Segmental Growth
10.5 Other Components
11 Extreme Ultraviolet (Euv) Lithography Market, By System Type
11.1 Introduction
11.2 0.33 Na Euv Systems (Nxe)
11.2.1 Cost Efficiency And Reliability To Stimulate Demand
11.3 0.55 Na Euv Systems (Exe)
11.3.1 Ability To Improve Yield For Advanced Logic, Memory, And Ai Chips To Drive Market
12 Extreme Ultraviolet (Euv) Lithography Market, By End User
12.1 Introduction
12.2 Integrated Device Manufacturers (Idms)
12.2.1 Innovation In Advanced And Energy-efficient Microchips To Foster Market Growth
12.3 Foundries
12.3.1 Strong Focus On High-volume Semiconductor Manufacturing To Support Segmental Growth
13 Extreme Ultraviolet (Euv) Lithography Market, By Application
13.1 Introduction
13.2 Logic Chips
13.2.1 Increasing Complexity And Costs Of Logic Devices To Boost Demand For Euv Lithography
13.2.2 Cpu
13.2.3 Gpu
13.2.4 Ai Accelerator
13.2.5 Soc
13.2.6 Asic
13.3 Memory Chips
13.3.1 Growing Demand For Artificial Intelligence, Cloud Computing, And High-performance Applications To Create Opportunities
13.3.2 Dram
13.3.3 Hbm
14 Extreme Ultraviolet (Euv) Lithography Market, By Region
14.1 Introduction
14.2 Americas
14.2.1 Growing Demand For High-performance, Energy-efficient Semiconductor Solutions To Boost Market
14.3 Emea
14.3.1 Early-stage Commercialization Of Extreme Ultraviolet (Euv) Lithography To Create Growth Opportunities
14.4 Asia Pacific
14.4.1 China
14.4.1.1 Domestic Semiconductor Capacity Building And Technology Localization To Drive Market
14.4.2 Japan
14.4.2.1 Presence Of Leading Technology Providers To Contribute To Market Growth
14.4.3 South Korea
14.4.3.1 Strong Global Position In Memory And Logic Semiconductor Manufacturing To Foster Market Growth
14.4.4 Taiwan
14.4.4.1 Significant Investments In Eco-friendly Euv System Components To Propel Market
14.4.5 Rest Of Asia Pacific
15 Competitive Landscape
15.1 Overview
15.2 Key Player Competitive Strategies/Right To Win, 2024–2025
15.3 Revenue Analysis, 2021–2025
15.4 Market Share Analysis, 2025
15.5 Company Valuation And Financial Metrics
15.5.1 Company Valuation
15.5.2 Financial Metrics
15.6 Product Comparison
15.7 Company Evaluation Matrix: Key Players, 2025
15.7.1 Stars
15.7.2 Emerging Leaders
15.7.3 Pervasive Players
15.7.4 Participants
15.7.5 Company Footprint: Key Players, 2025
15.7.5.1 Company Footprint
15.7.5.2 Region Footprint
15.7.5.3 End User Footprint
15.7.5.4 Component Footprint
15.8 Company Evaluation Matrix: Startups/Smes, 2025
15.8.1 Progressive Companies
15.8.2 Responsive Companies
15.8.3 Dynamic Companies
15.8.4 Starting Blocks
15.8.5 Competitive Benchmarking: Startups/Smes, 2025
15.8.5.1 Detailed List Of Key Startups/Smes
15.8.5.2 Competitive Benchmarking Of Key Startups/Smes
15.9 Competitive Scenario
15.9.1 Product Launches
15.9.2 Deals
16 Company Profiles
16.1 Introduction
16.2 Key System Manufacturers
16.2.1 Asml
16.2.1.1 Business Overview
16.2.1.2 Products/Solutions/Services Offered
16.2.1.3 Recent Developments
16.2.1.3.1 Deals
16.2.1.4 Mnm View
16.2.1.4.1 Key Strengths/Right To Win
16.2.1.4.2 Strategic Choices
16.2.1.4.3 Weaknesses/Competitive Threats
16.3 Key Component Manufacturers
16.3.1 Light Source Manufacturers
16.3.1.1 Trumpf
16.3.1.1.1 Business Overview
16.3.1.1.2 Products/Solutions/Services Offered
16.3.1.1.3 Mnm View
16.3.1.1.3.1 Key Strengths/Right To Win
16.3.1.1.3.2 Strategic Choices
16.3.1.1.3.3 Weaknesses/Competitive Threats
16.3.1.2 Ushio Inc.
16.3.1.2.1 Business Overview
16.3.1.2.2 Products/Solutions/Services Offered
16.3.1.2.3 Mnm View
16.3.1.2.3.1 Key Strengths/Right To Win
16.3.1.2.3.2 Strategic Choices
16.3.1.2.3.3 Weaknesses/Competitive Threats
16.3.1.3 Energetiq
16.3.1.3.1 Business Overview
16.3.1.3.2 Products/Solutions/Services Offered
16.3.1.3.3 Recent Developments
16.3.1.3.3.1 Product Launches
16.3.1.3.4 Mnm View
16.3.1.3.4.1 Key Strengths/Right To Win
16.3.1.3.4.2 Strategic Choices
16.3.1.3.4.3 Weaknesses/Competitive Threats
16.3.2 Optics Manufacturers
16.3.2.1 Zeiss Group
16.3.2.1.1 Business Overview
16.3.2.1.2 Products/Solutions/Services Offered
16.3.2.1.3 Recent Developments
16.3.2.1.3.1 Product Launches
16.3.2.1.3.2 Deals
16.3.2.2 Ntt Advanced Technology Corporation
16.3.2.2.1 Business Overview
16.3.2.2.2 Products/Solutions/Services Offered
16.3.2.3 Rigaku Holdings Corporation
16.3.2.3.1 Business Overview
16.3.2.3.2 Products/Solutions/Services Offered
16.3.2.4 Edmund Optics Inc.
16.3.2.4.1 Business Overview
16.3.2.4.2 Products/Solutions/Services Offered
16.3.3 Mask Manufacturers
16.3.3.1 Agc Inc.
16.3.3.1.1 Business Overview
16.3.3.1.2 Products/Solutions/Services Offered
16.3.3.2 Tekscend Photomask
16.3.3.2.1 Business Overview
16.3.3.2.2 Products/Solutions/Services Offered
16.3.3.3 Lasertec Corporation
16.3.3.3.1 Business Overview
16.3.3.3.2 Products/Solutions/Services Offered
16.3.3.3.3 Recent Developments
16.3.3.3.3.1 Product Launches
16.3.3.4 Hoya Corporation
16.3.3.4.1 Business Overview
16.3.3.4.2 Products/Solutions/Services Offered
16.3.3.5 Nuflare Technology Inc.
16.3.3.5.1 Business Overview
16.3.3.5.2 Products/Solutions/Services Offered
16.3.4 Other Component Manufacturers
16.3.4.1 Kla Corporation
16.3.4.2 Advantest Corporation
16.3.4.3 Suss Microtec Se
16.3.4.4 Applied Materials, Inc.
16.3.4.5 Park Systems
16.3.4.6 Imagine Optic
16.3.4.7 Mks Inc.
16.4 End Users
16.4.1 Taiwan Semiconductor Manufacturing Company Limited
16.4.2 Intel Corporation
16.4.3 Samsung
16.4.4 Sk Hynix Inc.
16.4.5 Micron Technology, Inc.
17 Research Methodology
17.1 Research Data
17.2 Secondary And Primary Research
17.2.1 Secondary Data
17.2.1.1 List Of Key Secondary Sources
17.2.1.2 Key Data From Secondary Sources
17.2.2 Primary Data
17.2.2.1 List Of Primary Interview Participants
17.2.2.2 Breakdown Of Primaries
17.2.2.3 Key Data From Primary Sources
17.2.2.4 Key Industry Insights
17.3 Market Size Estimation
17.3.1 Bottom-up Approach
17.3.1.1 Approach To Arrive At Market Size Using Bottom-up Analysis
(Demand Side)
17.3.2 Top-down Approach
17.3.2.1 Approach To Arrive At Market Size Using Top-down Analysis
(Supply Side)
17.4 Market Size Estimation For Base Year
17.5 Market Forecast Approach
17.5.1 Supply Side
17.5.2 Demand Side
17.6 Data Triangulation
17.7 Research Assumptions
17.8 Research Limitations
17.9 Risk Analysis
18 Appendix
18.1 Insights From Industry Experts
18.2 Discussion Guide
18.3 Knowledgestore: Marketsandmarkets’ Subscription Portal
18.4 Customization Options
18.5 Related Reports
18.6 Author Details

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