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Global Lithography Equipment Market Research Report - Market Share Analysis, Industry Trends & Statistics, Growth Forecasts (2025 - 2033)

Published Aug 13, 2025
Length 202 Pages
SKU # LOOK20514537

Description

Definition and Scope:

The global Lithography Equipment market is projected to reach USD 27.27 Billion in 2024. It is expected to grow to USD 51.41 Billion by 2033, registering a compound annual growth rate (CAGR) of 7.65% during the forecast period (2025–2033).

A lithography machine is a projection exposure system primarily used in semiconductor chip manufacturing to transfer circuit patterns from a photomask onto a silicon wafer coated with photoresist. It is one of the core pieces of equipment in integrated circuit fabrication. The machine uses an optical system to precisely project the mask's circuit design onto the wafer. Through the processes of photoresist exposure and development, the initial circuit pattern is formed.

Often referred to as ""the most precise machine ever built,"" the semiconductor lithography machine is among the most critical tools in chip production. Its technological sophistication directly determines the level of refinement achievable in chip manufacturing.

Lithography equipment accounts for the largest market share among semiconductor manufacturing tools. Among the key equipment categories—lithography machines, etching tools, and thin-film deposition systems—lithography alone makes up 24% of the market. This share continues to grow with each new generation of chip processing nodes.

The development of semiconductor lithography wavelengths has undergone several stages: from early 365nm mercury lamps, to 248nm krypton-fluoride lasers in the late 1990s, and then to 193nm argon-fluoride lasers in the early 2000s. As the 193nm wavelength approached its physical limits, immersion lithography emerged around 2006, using water between the lens and wafer to increase the numerical aperture from 0.93 to 1.35, establishing 193nm immersion lithography as the mainstream technology.

However, as chip integration and performance requirements continue to rise, traditional lithography has once again neared its physical boundary. Extreme Ultraviolet (EUV) lithography, using a 13.5nm wavelength, has become the key to breaking through this limit. Developed by ASML, EUV lithography now supports 7nm and even more advanced nodes. It is regarded as a core technological breakthrough to extend Moore’s Law and is propelling the semiconductor industry into the next era of innovation.

ASML, Nikon, and Canon have long dominated the global lithography equipment market. Among them, ASML holds a technological edge in the high-end lithography segment and captured 61.2% of the global market share in 2024. Notably, ASML remains the world’s sole supplier of EUV (Extreme Ultraviolet) lithography systems. Nikon and Canon, on the other hand, mainly focus on mid-to-low-end lithography equipment.

In 2024, the combined shipment of integrated circuit lithography machines by ASML, Nikon, and Canon reached 683 units, a slight increase from 681 units in 2023, indicating a relatively stable shipment level. Total sales reached approximately USD 26.4 billion, similar to the USD 26.9 billion recorded in 2023. For high-end models including EUV, ArFi, and ArF systems, a total of 212 units were shipped in 2024, down slightly from 229 in 2023. Of these, ASML shipped 201 units (down 9 units YoY), accounting for 91.4% of the high-end segment, while Nikon shipped 19 units, representing 8.6% market share.

Mainland China is currently the world’s largest semiconductor equipment market and also one of ASML’s biggest customers. In 2023, China accounted for 29% of ASML’s total revenue, and this surged to 41% in 2024 due to aggressive fab expansion and stockpiling. However, in Q1 2025, the figure fell to 27% amid export restrictions. Looking ahead, Chinese fabs are expected to continue expanding, driving sustained demand for lithography equipment.

This report offers a comprehensive analysis of the global Lithography Equipment market, examining all key dimensions. It provides both a macro-level overview and micro-level market details, including market size, trends, competitive landscape, niche segments, growth drivers, and key challenges.

Report Framework and Key Highlights:

Market Dynamics: Identification of major market drivers, restraints, opportunities, and challenges.

Trend Analysis: Examination of ongoing and emerging trends impacting the market.

Competitive Landscape: Detailed profiles and market positioning of major players, including market share, operational status, product offerings, and strategic developments.

Strategic Analysis Tools: SWOT Analysis, Porter’s Five Forces Analysis, PEST Analysis, Value Chain Analysis

Market Segmentation: By type, application, region, and end-user industry.

Forecasting and Growth Projections: In-depth revenue forecasts and CAGR analysis through 2033.

This report equips readers with critical insights to navigate competitive dynamics and develop effective strategies. Whether assessing a new market entry or refining existing strategies, the report serves as a valuable tool for:

Industry players

Investors

Researchers

Consultants

Business strategists

And all stakeholders with an interest or investment in the Lithography Equipment market.

Global Lithography Equipment Market: Segmentation Analysis and Strategic Insights

This section of the report provides an in-depth segmentation analysis of the global Lithography Equipment market. The market is segmented based on region (country), manufacturer, product type, and application. Segmentation enables a more precise understanding of market dynamics and facilitates targeted strategies across product development, marketing, and sales.

By breaking the market into meaningful subsets, stakeholders can better tailor their offerings to the specific needs of each segment—enhancing competitiveness and improving return on investment.

Global Lithography Equipment Market: Market Segmentation Analysis

The research report includes specific segments by region (country), manufacturers, Type, and Application. Market segmentation creates subsets of a market based on product type, end-user or application, Geographic, and other factors. By understanding the market segments, the decision-maker can leverage this targeting in the product, sales, and marketing strategies. Market segments can power your product development cycles by informing how you create product offerings for different segments.

Key Companies Profiled

ASML Holding NV

Nikon Corporation

Canon Inc.

Shanghai Micro Electronics Equipment (SMEE)

EV Group

Veeco Instruments Inc.

JEOL Ltd.

Onto Innovation Inc.

SÜSS MicroTec

NuFlare Technology

Market Segmentation by Type

EUV

ArFi

ArF

KrF

i- line

Others

Market Segmentation by Application

Advanced Packaging

LED

MEMs

Power Devices

Others

Geographic Segmentation

North America: United States, Canada, Mexico

Europe: Germany, France, Italy, U.K., Spain, Sweden, Denmark, Netherlands, Switzerland, Belgium, Russia.

Asia-Pacific: China, Japan, South Korea, India, Australia, Indonesia, Malaysia, Philippines, Singapore, Thailand

South America: Brazil, Argentina, Colombia.

Middle East and Africa (MEA): Saudi Arabia, United Arab Emirates, Egypt, Nigeria, South Africa, Rest of MEA

Report Framework and Chapter Summary

Chapter 1: Report Scope and Market Definition

This chapter outlines the statistical boundaries and scope of the report. It defines the segmentation standards used throughout the study, including criteria for dividing the market by region, product type, application, and other relevant dimensions. It establishes the foundational definitions and classifications that guide the rest of the analysis.

Chapter 2: Executive Summary

This chapter presents a concise summary of the market’s current status and future outlook across different segments—by geography, product type, and application. It includes key metrics such as market size, growth trends, and development potential for each segment. The chapter offers a high-level overview of the Lithography Equipment Market, highlighting its evolution over the short, medium, and long term.

Chapter 3: Market Dynamics and Policy Environment

This chapter explores the latest developments in the market, identifying key growth drivers, restraints, challenges, and risks faced by industry participants. It also includes an analysis of the policy and regulatory landscape affecting the market, providing insight into how external factors may shape future performance.

Chapter 4: Competitive Landscape

This chapter provides a detailed assessment of the market's competitive environment. It covers market share, production capacity, output, pricing trends, and strategic developments such as mergers, acquisitions, and expansion plans of leading players. This analysis offers a comprehensive view of the positioning and performance of top competitors.

Chapters 5–10: Regional Market Analysis

These chapters offer in-depth, quantitative evaluations of market size and growth potential across major regions and countries. Each chapter assesses regional consumption patterns, market dynamics, development prospects, and available capacity. The analysis helps readers understand geographical differences and opportunities in global markets.

Chapter 11: Market Segmentation by Product Type

This chapter examines the market based on product type, analyzing the size, growth trends, and potential of each segment. It helps stakeholders identify underexplored or high-potential product categories—often referred to as “blue ocean” opportunities.

Chapter 12: Market Segmentation by Application

This chapter analyzes the market based on application fields, providing insights into the scale and future development of each application segment. It supports readers in identifying high-growth areas across downstream markets.

Chapter 13: Company Profiles

This chapter presents comprehensive profiles of leading companies operating in the market. For each company, it details sales revenue, volume, pricing, gross profit margin, market share, product offerings, and recent strategic developments. This section offers valuable insight into corporate performance and strategy.

Chapter 14: Industry Chain and Value Chain Analysis

This chapter explores the full industry chain, from upstream raw material suppliers to downstream application sectors. It includes a value chain analysis that highlights the interconnections and dependencies across various parts of the ecosystem.

Chapter 15: Key Findings and Conclusions

The final chapter summarizes the main takeaways from the report, presenting the core conclusions, strategic recommendations, and implications for stakeholders. It encapsulates the insights drawn from all previous chapters.

Table of Contents

202 Pages
1 Introduction to Research & Analysis Reports
1.1 Lithography Equipment Market Definition
1.2 Lithography Equipment Market Segments
1.2.1 Segment by Type
1.2.2 Segment by Application
2 Executive Summary
2.1 Global Lithography Equipment Market Size
2.2 Market Segmentation – by Type
2.3 Market Segmentation – by Application
2.4 Market Segmentation – by Geography
3 Key Market Trends, Opportunity, Drivers and Restraints
3.1 Key Takeway
3.2 Market Opportunities & Trends
3.3 Market Drivers
3.4 Market Restraints
3.5 Market Major Factor Assessment
4 Global Lithography Equipment Market Competitive Landscape
4.1 Global Lithography Equipment Sales by Manufacturers (2020-2025)
4.2 Global Lithography Equipment Revenue Market Share by Manufacturers (2020-2025)
4.3 Lithography Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3)
4.4 New Entrant and Capacity Expansion Plans
4.5 Mergers & Acquisitions
5 Global Lithography Equipment Market by Region
5.1 Global Lithography Equipment Market Size by Region
5.1.1 Global Lithography Equipment Market Size by Region
5.1.2 Global Lithography Equipment Market Size Market Share by Region
5.2 Global Lithography Equipment Sales by Region
5.2.1 Global Lithography Equipment Sales by Region
5.2.2 Global Lithography Equipment Sales Market Share by Region
6 North America Market Overview
6.1 North America Lithography Equipment Market Size by Country
6.1.1 USA Market Overview
6.1.2 Canada Market Overview
6.1.3 Mexico Market Overview
6.2 North America Lithography Equipment Market Size by Type
6.3 North America Lithography Equipment Market Size by Application
6.4 Top Players in North America Lithography Equipment Market
7 Europe Market Overview
7.1 Europe Lithography Equipment Market Size by Country
7.1.1 Germany Market Overview
7.1.2 France Market Overview
7.1.3 U.K. Market Overview
7.1.4 Italy Market Overview
7.1.5 Spain Market Overview
7.1.6 Sweden Market Overview
7.1.7 Denmark Market Overview
7.1.8 Netherlands Market Overview
7.1.9 Switzerland Market Overview
7.1.10 Belgium Market Overview
7.1.11 Russia Market Overview
7.2 Europe Lithography Equipment Market Size by Type
7.3 Europe Lithography Equipment Market Size by Application
7.4 Top Players in Europe Lithography Equipment Market
8 Asia-Pacific Market Overview
8.1 Asia-Pacific Lithography Equipment Market Size by Country
8.1.1 China Market Overview
8.1.2 Japan Market Overview
8.1.3 South Korea Market Overview
8.1.4 India Market Overview
8.1.5 Australia Market Overview
8.1.6 Indonesia Market Overview
8.1.7 Malaysia Market Overview
8.1.8 Philippines Market Overview
8.1.9 Singapore Market Overview
8.1.10 Thailand Market Overview
8.1.11 Rest of APAC Market Overview
8.2 Asia-Pacific Lithography Equipment Market Size by Type
8.3 Asia-Pacific Lithography Equipment Market Size by Application
8.4 Top Players in Asia-Pacific Lithography Equipment Market
9 South America Market Overview
9.1 South America Lithography Equipment Market Size by Country
9.1.1 Brazil Market Overview
9.1.2 Argentina Market Overview
9.1.3 Columbia Market Overview
9.2 South America Lithography Equipment Market Size by Type
9.3 South America Lithography Equipment Market Size by Application
9.4 Top Players in South America Lithography Equipment Market
10 Middle East and Africa Market Overview
10.1 Middle East and Africa Lithography Equipment Market Size by Country
10.1.1 Saudi Arabia Market Overview
10.1.2 UAE Market Overview
10.1.3 Egypt Market Overview
10.1.4 Nigeria Market Overview
10.1.5 South Africa Market Overview
10.2 Middle East and Africa Lithography Equipment Market Size by Type
10.3 Middle East and Africa Lithography Equipment Market Size by Application
10.4 Top Players in Middle East and Africa Lithography Equipment Market
11 Lithography Equipment Market Segmentation by Type
11.1 Evaluation Matrix of Segment Market Development Potential (Type)
11.2 Global Lithography Equipment Sales Market Share by Type (2020-2033)
11.3 Global Lithography Equipment Market Size Market Share by Type (2020-2033)
11.4 Global Lithography Equipment Price by Type (2020-2033)
12 Lithography Equipment Market Segmentation by Application
12.1 Evaluation Matrix of Segment Market Development Potential (Application)
12.2 Global Lithography Equipment Market Sales by Application (2020-2033)
12.3 Global Lithography Equipment Market Size (M USD) by Application (2020-2033)
12.4 Global Lithography Equipment Sales Growth Rate by Application (2020-2033)
13 Company Profiles
13.1 ASML Holding NV
13.1.1 ASML Holding NV Company Overview
13.1.2 ASML Holding NV Business Overview
13.1.3 ASML Holding NV Lithography Equipment Major Product Offerings
13.1.4 ASML Holding NV Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.1.5 Key News
13.2 Nikon Corporation
13.2.1 Nikon Corporation Company Overview
13.2.2 Nikon Corporation Business Overview
13.2.3 Nikon Corporation Lithography Equipment Major Product Offerings
13.2.4 Nikon Corporation Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.2.5 Key News
13.3 Canon Inc.
13.3.1 Canon Inc. Company Overview
13.3.2 Canon Inc. Business Overview
13.3.3 Canon Inc. Lithography Equipment Major Product Offerings
13.3.4 Canon Inc. Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.3.5 Key News
13.4 Shanghai Micro Electronics Equipment (SMEE)
13.4.1 Shanghai Micro Electronics Equipment (SMEE) Company Overview
13.4.2 Shanghai Micro Electronics Equipment (SMEE) Business Overview
13.4.3 Shanghai Micro Electronics Equipment (SMEE) Lithography Equipment Major Product Offerings
13.4.4 Shanghai Micro Electronics Equipment (SMEE) Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.4.5 Key News
13.5 EV Group
13.5.1 EV Group Company Overview
13.5.2 EV Group Business Overview
13.5.3 EV Group Lithography Equipment Major Product Offerings
13.5.4 EV Group Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.5.5 Key News
13.6 Veeco Instruments Inc.
13.6.1 Veeco Instruments Inc. Company Overview
13.6.2 Veeco Instruments Inc. Business Overview
13.6.3 Veeco Instruments Inc. Lithography Equipment Major Product Offerings
13.6.4 Veeco Instruments Inc. Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.6.5 Key News
13.7 JEOL Ltd.
13.7.1 JEOL Ltd. Company Overview
13.7.2 JEOL Ltd. Business Overview
13.7.3 JEOL Ltd. Lithography Equipment Major Product Offerings
13.7.4 JEOL Ltd. Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.7.5 Key News
13.8 Onto Innovation Inc.
13.8.1 Onto Innovation Inc. Company Overview
13.8.2 Onto Innovation Inc. Business Overview
13.8.3 Onto Innovation Inc. Lithography Equipment Major Product Offerings
13.8.4 Onto Innovation Inc. Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.8.5 Key News
13.9 SÜSS MicroTec
13.9.1 SÜSS MicroTec Company Overview
13.9.2 SÜSS MicroTec Business Overview
13.9.3 SÜSS MicroTec Lithography Equipment Major Product Offerings
13.9.4 SÜSS MicroTec Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.9.5 Key News
13.10 NuFlare Technology
13.10.1 NuFlare Technology Company Overview
13.10.2 NuFlare Technology Business Overview
13.10.3 NuFlare Technology Lithography Equipment Major Product Offerings
13.10.4 NuFlare Technology Lithography Equipment Sales and Revenue fromLithography Equipment (2020-2025)
13.10.5 Key News
14 Key Market Trends, Opportunity, Drivers and Restraints
14.1 Key Takeway
14.2 Market Opportunities & Trends
14.3 Market Drivers
14.4 Market Restraints
14.5 Market Major Factor Assessment
14.6 Porter's Five Forces Analysis of Lithography Equipment Market
14.7 PEST Analysis of Lithography Equipment Market
15 Analysis of the Lithography Equipment Industry Chain
15.1 Overview of the Industry Chain
15.2 Upstream Segment Analysis
15.3 Midstream Segment Analysis
15.3.1 Manufacturing, Processing or Conversion Process Analysis
15.3.2 Key Technology Analysis
15.4 Downstream Segment Analysis
15.4.1 Downstream Customer List and Contact Details
15.4.2 Customer Concerns or Preference Analysis
16 Conclusion
17 Appendix
17.1 Methodology
17.2 Research Process and Data Source
17.3 Disclaimer
17.4 Note
17.5 Examples of Clients
17.6 Disclaimer
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