Global Semiconductor Precursor Delivery System Market Growth 2025-2031
Description
The global Semiconductor Precursor Delivery System market size is predicted to grow from US$ 506 million in 2025 to US$ 763 million in 2031; it is expected to grow at a CAGR of 7.1% from 2025 to 2031.
The impact of the latest U.S. tariff measures and the corresponding policy responses from countries worldwide on market competitiveness, regional economic performance, and supply chain configurations will be comprehensively evaluated in this report.
The semiconductor precursor delivery system is a core subsystem in semiconductor manufacturing, used to safely and accurately deliver gaseous, liquid or solid precursors (such as silane, TEOS, tungsten hexafluoride, etc.) to the chemical vapor deposition (CVD) or atomic layer deposition (ALD) reaction chamber. Its core components include precursor storage sources (high-pressure gas cylinders, heated sublimation chambers), precision flow and pressure controllers (such as mass flow meters MFC), corrosion-resistant gas pipeline networks (stainless steel/inert coatings), safety isolation devices (gas cabinets, leak detection and exhaust gas treatment systems) and automated integration interfaces. The system ensures precursor purity (>6N) and delivery stability through temperature control, real-time monitoring and high-speed valve switching (such as ALD pulse sequences), while preventing the risk of leakage of toxic substances (such as arsenic). Its performance directly determines the uniformity of thin films, doping accuracy and device reliability, and is a key support for the mass production of advanced processes (3nm nodes, gate-all-around transistors) and new materials (high dielectric layers, two-dimensional semiconductors).
As semiconductor technology moves towards smaller nodes and complex structures, delivery systems continue to upgrade to meet challenges. For example, multi-precursor manifolds support multi-element nano-stacks (such as HfO₂-Al₂O₃), in-situ optical/mass spectrometry monitoring enables closed-loop process control, and cluster tools integrate multi-step processes to reduce contamination. The system must also be compatible with extreme process requirements, such as nickel-based alloy pipelines that are resistant to hydrogen fluoride corrosion, thermal oxidation exhaust gas treatment devices, etc. These innovations not only improve deposition efficiency and material properties, but also promote the industrialization of advanced logic chips, memory, and third-generation semiconductors (such as GaN and SiC). Any slight fluctuation may lead to film defects, so high-precision delivery systems have become an indispensable "vascular network" in semiconductor equipment, supporting the continued evolution of Moore's Law.
The semiconductor precursor delivery system is a device used to deliver precursors. Depending on the type of precursor, the delivery system can be divided into a gas delivery system, a liquid delivery system (LDS), and a solid delivery system. With the growth of downstream application demand for precursors, the growth of the precursor delivery system market has been further promoted. It is expected that by 2031, the market size will exceed 700 million US dollars.
From the production side, the core production areas of semiconductor precursor delivery systems are mainly Europe, the United States, South Korea and Europe, among which Europe is the most important production area, accounting for 37.9% of the market share in 2024. There are still differences in the application, technology and product performance of Chinese semiconductor precursor delivery system companies and international leading companies (such as Merck and Air Liquide) in the field of advanced processes. However, as the localization process of Chinese local manufacturers accelerates, some Chinese local companies have also gained a certain market share in the precursor delivery system market, such as Jiangsu Yoke Technology and PNC Process Systems Co., Ltd. In addition, in recent years, there have been many new entrants from Chinese local enterprises, such as Shanghai Wisdom Technology, Hefei Adchem, etc., but at present, the scale is relatively small. With the development of China's semiconductor market in the future, it is expected that the global competition share of Chinese local manufacturers will gradually increase in the next few years, and China will maintain the fastest growth rate. With the advancement of domestic precursor delivery system technology, the emergence of cost advantages and the strengthening of policy support, it is expected that the share will reach 23.7% in 2031.
From the perspective of manufacturers, the core manufacturers of semiconductor precursor delivery systems worldwide mainly include Merck Group, Air Liquide, Entegris, CSK, Foures Co., Ltd (Jiangsu Yoke Technology), PNC Process Systems Co., Ltd, etc. In 2024, the world's first-tier manufacturers are mainly Merck Group and Air Liquide, with a market share of approximately 43.81%; the second-tier manufacturers include Entegris, CSK, Foures Co., Ltd (Jiangsu Yoke Technology), PNC Process Systems Co., Ltd, etc., with a total share of 42.9%.
LP Information, Inc. (LPI) ' newest research report, the “Semiconductor Precursor Delivery System Industry Forecast” looks at past sales and reviews total world Semiconductor Precursor Delivery System sales in 2024, providing a comprehensive analysis by region and market sector of projected Semiconductor Precursor Delivery System sales for 2025 through 2031. With Semiconductor Precursor Delivery System sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Semiconductor Precursor Delivery System industry.
This Insight Report provides a comprehensive analysis of the global Semiconductor Precursor Delivery System landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Semiconductor Precursor Delivery System portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Semiconductor Precursor Delivery System market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Semiconductor Precursor Delivery System and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Semiconductor Precursor Delivery System.
This report presents a comprehensive overview, market shares, and growth opportunities of Semiconductor Precursor Delivery System market by product type, application, key manufacturers and key regions and countries.
Segmentation by Type:
Liquid Delivery System (LDS)
Solid Precursor Delivery Systems
Gas Delivery Systems
Segmentation by Application:
PVD/CVD/ALD Process
Epitaxial and Etching Process
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
Merck Group
Air Liquide
Entegris
CSK
Foures Co., Ltd
PNC Process Systems Co.,Ltd
Sempa Systems GmbH
Fujifilm
SMI Co., Ltd
Brooks Instrument
Ceres Technologies
HORIBA
CollabraTech (Exyte)
Stainless Design Concepts (SDC)
Bronkhorst
SVCS Process Innovation
Shanghai Wisdom Technology
Key Questions Addressed in this Report
What is the 10-year outlook for the global Semiconductor Precursor Delivery System market?
What factors are driving Semiconductor Precursor Delivery System market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do Semiconductor Precursor Delivery System market opportunities vary by end market size?
How does Semiconductor Precursor Delivery System break out by Type, by Application?
Please note: The report will take approximately 2 business days to prepare and deliver.
The impact of the latest U.S. tariff measures and the corresponding policy responses from countries worldwide on market competitiveness, regional economic performance, and supply chain configurations will be comprehensively evaluated in this report.
The semiconductor precursor delivery system is a core subsystem in semiconductor manufacturing, used to safely and accurately deliver gaseous, liquid or solid precursors (such as silane, TEOS, tungsten hexafluoride, etc.) to the chemical vapor deposition (CVD) or atomic layer deposition (ALD) reaction chamber. Its core components include precursor storage sources (high-pressure gas cylinders, heated sublimation chambers), precision flow and pressure controllers (such as mass flow meters MFC), corrosion-resistant gas pipeline networks (stainless steel/inert coatings), safety isolation devices (gas cabinets, leak detection and exhaust gas treatment systems) and automated integration interfaces. The system ensures precursor purity (>6N) and delivery stability through temperature control, real-time monitoring and high-speed valve switching (such as ALD pulse sequences), while preventing the risk of leakage of toxic substances (such as arsenic). Its performance directly determines the uniformity of thin films, doping accuracy and device reliability, and is a key support for the mass production of advanced processes (3nm nodes, gate-all-around transistors) and new materials (high dielectric layers, two-dimensional semiconductors).
As semiconductor technology moves towards smaller nodes and complex structures, delivery systems continue to upgrade to meet challenges. For example, multi-precursor manifolds support multi-element nano-stacks (such as HfO₂-Al₂O₃), in-situ optical/mass spectrometry monitoring enables closed-loop process control, and cluster tools integrate multi-step processes to reduce contamination. The system must also be compatible with extreme process requirements, such as nickel-based alloy pipelines that are resistant to hydrogen fluoride corrosion, thermal oxidation exhaust gas treatment devices, etc. These innovations not only improve deposition efficiency and material properties, but also promote the industrialization of advanced logic chips, memory, and third-generation semiconductors (such as GaN and SiC). Any slight fluctuation may lead to film defects, so high-precision delivery systems have become an indispensable "vascular network" in semiconductor equipment, supporting the continued evolution of Moore's Law.
The semiconductor precursor delivery system is a device used to deliver precursors. Depending on the type of precursor, the delivery system can be divided into a gas delivery system, a liquid delivery system (LDS), and a solid delivery system. With the growth of downstream application demand for precursors, the growth of the precursor delivery system market has been further promoted. It is expected that by 2031, the market size will exceed 700 million US dollars.
From the production side, the core production areas of semiconductor precursor delivery systems are mainly Europe, the United States, South Korea and Europe, among which Europe is the most important production area, accounting for 37.9% of the market share in 2024. There are still differences in the application, technology and product performance of Chinese semiconductor precursor delivery system companies and international leading companies (such as Merck and Air Liquide) in the field of advanced processes. However, as the localization process of Chinese local manufacturers accelerates, some Chinese local companies have also gained a certain market share in the precursor delivery system market, such as Jiangsu Yoke Technology and PNC Process Systems Co., Ltd. In addition, in recent years, there have been many new entrants from Chinese local enterprises, such as Shanghai Wisdom Technology, Hefei Adchem, etc., but at present, the scale is relatively small. With the development of China's semiconductor market in the future, it is expected that the global competition share of Chinese local manufacturers will gradually increase in the next few years, and China will maintain the fastest growth rate. With the advancement of domestic precursor delivery system technology, the emergence of cost advantages and the strengthening of policy support, it is expected that the share will reach 23.7% in 2031.
From the perspective of manufacturers, the core manufacturers of semiconductor precursor delivery systems worldwide mainly include Merck Group, Air Liquide, Entegris, CSK, Foures Co., Ltd (Jiangsu Yoke Technology), PNC Process Systems Co., Ltd, etc. In 2024, the world's first-tier manufacturers are mainly Merck Group and Air Liquide, with a market share of approximately 43.81%; the second-tier manufacturers include Entegris, CSK, Foures Co., Ltd (Jiangsu Yoke Technology), PNC Process Systems Co., Ltd, etc., with a total share of 42.9%.
LP Information, Inc. (LPI) ' newest research report, the “Semiconductor Precursor Delivery System Industry Forecast” looks at past sales and reviews total world Semiconductor Precursor Delivery System sales in 2024, providing a comprehensive analysis by region and market sector of projected Semiconductor Precursor Delivery System sales for 2025 through 2031. With Semiconductor Precursor Delivery System sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Semiconductor Precursor Delivery System industry.
This Insight Report provides a comprehensive analysis of the global Semiconductor Precursor Delivery System landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Semiconductor Precursor Delivery System portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Semiconductor Precursor Delivery System market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Semiconductor Precursor Delivery System and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Semiconductor Precursor Delivery System.
This report presents a comprehensive overview, market shares, and growth opportunities of Semiconductor Precursor Delivery System market by product type, application, key manufacturers and key regions and countries.
Segmentation by Type:
Liquid Delivery System (LDS)
Solid Precursor Delivery Systems
Gas Delivery Systems
Segmentation by Application:
PVD/CVD/ALD Process
Epitaxial and Etching Process
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
Merck Group
Air Liquide
Entegris
CSK
Foures Co., Ltd
PNC Process Systems Co.,Ltd
Sempa Systems GmbH
Fujifilm
SMI Co., Ltd
Brooks Instrument
Ceres Technologies
HORIBA
CollabraTech (Exyte)
Stainless Design Concepts (SDC)
Bronkhorst
SVCS Process Innovation
Shanghai Wisdom Technology
Key Questions Addressed in this Report
What is the 10-year outlook for the global Semiconductor Precursor Delivery System market?
What factors are driving Semiconductor Precursor Delivery System market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do Semiconductor Precursor Delivery System market opportunities vary by end market size?
How does Semiconductor Precursor Delivery System break out by Type, by Application?
Please note: The report will take approximately 2 business days to prepare and deliver.
Table of Contents
130 Pages
- *This is a tentative TOC and the final deliverable is subject to change.*
- 1 Scope of the Report
- 2 Executive Summary
- 3 Global by Company
- 4 World Historic Review for Semiconductor Precursor Delivery System by Geographic Region
- 5 Americas
- 6 APAC
- 7 Europe
- 8 Middle East & Africa
- 9 Market Drivers, Challenges and Trends
- 10 Manufacturing Cost Structure Analysis
- 11 Marketing, Distributors and Customer
- 12 World Forecast Review for Semiconductor Precursor Delivery System by Geographic Region
- 13 Key Players Analysis
- 14 Research Findings and Conclusion
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