Global MEMS Micropump Market Growth 2026-2032
Description
The global MEMS Micropump market size is predicted to grow from US$ 246 million in 2025 to US$ 436 million in 2032; it is expected to grow at a CAGR of 8.6% from 2026 to 2032.
Global sales of MEMS micropumps reached 19 million units in 2025, with an average price of $13 per unit.
MEMS micropump, also known as microelectromechanical system micropump, is a small pump manufactured using micromachining technology. It can transport and control fluids on a microscopic scale. Its main working principle is to use the movement of the pump membrane to cause changes in the volume of the pump chamber. , causing a pressure difference between the inside of the chamber and the outside world, and relying on the pressure difference to open and close the valve to achieve fluid pumping. MEMS micropumps are technically highly precise and controllable, able to achieve nanoscale liquid distribution, provide ultra-smooth and ultra-quiet droplet delivery, and have the ability to respond quickly and precisely. Its pumping accuracy reaches ±5%.
The raw materials for MEMS micropumps primarily consist of 4/6-inch single-crystal silicon wafers as the substrate, accounting for 25–30% of the material cost. Front-side PZT (lead zirconate titanate) or AlN piezoelectric thin films are deposited as the driving oscillator, with the target material and sputtering process accounting for 20–25%. Back-side deep silicon etching forms the cavity and valve port, requiring photoresist, SOI mask, and DRIE gas, totaling 10–15%. Packaging-grade adhesives, gold/aluminum wires, and glass/PDMS cover plates account for 5–10%. The remainder consists of ultrapure water and cleaning chemicals. Overall, silicon-based + piezoelectric materials account for 55–65% of the direct material cost. A 10% increase in silicon wafer price increases the cost per chip by approximately $0.03–0.05, having a limited impact on high-volume medical-grade devices.
LP Information, Inc. (LPI) ' newest research report, the “MEMS Micropump Industry Forecast” looks at past sales and reviews total world MEMS Micropump sales in 2025, providing a comprehensive analysis by region and market sector of projected MEMS Micropump sales for 2026 through 2032. With MEMS Micropump sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world MEMS Micropump industry.
This Insight Report provides a comprehensive analysis of the global MEMS Micropump landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on MEMS Micropump portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global MEMS Micropump market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for MEMS Micropump and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global MEMS Micropump.
This report presents a comprehensive overview, market shares, and growth opportunities of MEMS Micropump market by product type, application, key manufacturers and key regions and countries.
Segmentation by Type:
Electrostatic Micropump
Thermopneumatic Micropump
Diaphragm Micropump
Jet Pump
Segmentation by Valve Structure:
With Valve
Without Valve
Segmentation by Flow Rate:
0.1–10 µL/min
10–200 µL/min
0.5–5 mL/min
Segmentation by Application:
Medicine
Chemical Industry
Manufacturing
Others
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
Bartels Mikrotechnik
Takasago Electric
The Lee Company
Roche
Debiotech
Insulet
Eoflow
Microchip Technology
YW MEMS
Hengmic
Key Questions Addressed in this Report
What is the 10-year outlook for the global MEMS Micropump market?
What factors are driving MEMS Micropump market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do MEMS Micropump market opportunities vary by end market size?
How does MEMS Micropump break out by Type, by Application?
Please note: The report will take approximately 2 business days to prepare and deliver.
Global sales of MEMS micropumps reached 19 million units in 2025, with an average price of $13 per unit.
MEMS micropump, also known as microelectromechanical system micropump, is a small pump manufactured using micromachining technology. It can transport and control fluids on a microscopic scale. Its main working principle is to use the movement of the pump membrane to cause changes in the volume of the pump chamber. , causing a pressure difference between the inside of the chamber and the outside world, and relying on the pressure difference to open and close the valve to achieve fluid pumping. MEMS micropumps are technically highly precise and controllable, able to achieve nanoscale liquid distribution, provide ultra-smooth and ultra-quiet droplet delivery, and have the ability to respond quickly and precisely. Its pumping accuracy reaches ±5%.
The raw materials for MEMS micropumps primarily consist of 4/6-inch single-crystal silicon wafers as the substrate, accounting for 25–30% of the material cost. Front-side PZT (lead zirconate titanate) or AlN piezoelectric thin films are deposited as the driving oscillator, with the target material and sputtering process accounting for 20–25%. Back-side deep silicon etching forms the cavity and valve port, requiring photoresist, SOI mask, and DRIE gas, totaling 10–15%. Packaging-grade adhesives, gold/aluminum wires, and glass/PDMS cover plates account for 5–10%. The remainder consists of ultrapure water and cleaning chemicals. Overall, silicon-based + piezoelectric materials account for 55–65% of the direct material cost. A 10% increase in silicon wafer price increases the cost per chip by approximately $0.03–0.05, having a limited impact on high-volume medical-grade devices.
LP Information, Inc. (LPI) ' newest research report, the “MEMS Micropump Industry Forecast” looks at past sales and reviews total world MEMS Micropump sales in 2025, providing a comprehensive analysis by region and market sector of projected MEMS Micropump sales for 2026 through 2032. With MEMS Micropump sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world MEMS Micropump industry.
This Insight Report provides a comprehensive analysis of the global MEMS Micropump landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on MEMS Micropump portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global MEMS Micropump market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for MEMS Micropump and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global MEMS Micropump.
This report presents a comprehensive overview, market shares, and growth opportunities of MEMS Micropump market by product type, application, key manufacturers and key regions and countries.
Segmentation by Type:
Electrostatic Micropump
Thermopneumatic Micropump
Diaphragm Micropump
Jet Pump
Segmentation by Valve Structure:
With Valve
Without Valve
Segmentation by Flow Rate:
0.1–10 µL/min
10–200 µL/min
0.5–5 mL/min
Segmentation by Application:
Medicine
Chemical Industry
Manufacturing
Others
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
Bartels Mikrotechnik
Takasago Electric
The Lee Company
Roche
Debiotech
Insulet
Eoflow
Microchip Technology
YW MEMS
Hengmic
Key Questions Addressed in this Report
What is the 10-year outlook for the global MEMS Micropump market?
What factors are driving MEMS Micropump market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do MEMS Micropump market opportunities vary by end market size?
How does MEMS Micropump break out by Type, by Application?
Please note: The report will take approximately 2 business days to prepare and deliver.
Table of Contents
101 Pages
- *This is a tentative TOC and the final deliverable is subject to change.*
- 1 Scope of the Report
- 2 Executive Summary
- 3 Global by Company
- 4 World Historic Review for MEMS Micropump by Geographic Region
- 5 Americas
- 6 APAC
- 7 Europe
- 8 Middle East & Africa
- 9 Market Drivers, Challenges and Trends
- 10 Manufacturing Cost Structure Analysis
- 11 Marketing, Distributors and Customer
- 12 World Forecast Review for MEMS Micropump by Geographic Region
- 13 Key Players Analysis
- 14 Research Findings and Conclusion
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