Global Rapid Thermal Processing Equipment Supply, Demand and Key Producers, 2026-2032

The global Rapid Thermal Processing Equipment market size is expected to reach $ 1192 million by 2032, rising at a market growth of 6.1% CAGR during the forecast period (2026-2032).

Rapid Thermal Processing (RTP) Equipment refers to specialized semiconductor manufacturing systems designed to rapidly heat and cool semiconductor wafers in a controlled environment for short durations, typically ranging from a few seconds to a few minutes. These systems are used to perform thermal processes such as annealing, oxidation, silicidation, and dopant activation without exposing wafers to prolonged high temperatures, thereby minimizing diffusion and preserving sharp junction profiles.

Global main manufacturers of rapid thermal processing equipment include Applied Materials, Mattson Technology and Kokusai Electric, etc. The top three players hold a share about 77%.

The Rapid Thermal Processing (RTP) equipment market holds strong growth potential driven by the semiconductor industry's push toward advanced nodes (5nm and below), increased use of wide bandgap materials like SiC and GaN in power electronics and electric vehicles, the proliferation of AI and high-performance computing applications requiring precise and localized thermal treatments, and the expansion of advanced packaging techniques such as wafer-level and 3D integration, all of which demand high-speed, high-uniformity annealing and oxidation processes; additionally, downstream development is accelerated by the growth of mobile devices, automotive electronics, IoT sensors, and optoelectronics, where RTP enables critical steps like dopant activation, contact annealing, and thin oxide formation with minimal diffusion and superior uniformity, while industry trends such as EUV lithography adoption, chiplet design, and heterogeneous integration further necessitate RTP's capability for precise, short-duration, high-temperature processing in both front-end and back-end manufacturing, supported by strong investment from leading players across Asia-Pacific, North America, and Europe, ensuring ongoing innovation and capacity expansion to meet the complex thermal budget and integration needs of next-generation semiconductor devices in a highly competitive, performance-driven market landscape.

This report studies the global Rapid Thermal Processing Equipment production, demand, key manufacturers, and key regions.

This report is a detailed and comprehensive analysis of the world market for Rapid Thermal Processing Equipment and provides market size (US$ million) and Year-over-Year (YoY) Growth, considering 2025 as the base year. This report explores demand trends and competition, as well as details the characteristics of Rapid Thermal Processing Equipment that contribute to its increasing demand across many markets.

Highlights and key features of the study

Global Rapid Thermal Processing Equipment total production and demand, 2021-2032, (Units)

Global Rapid Thermal Processing Equipment total production value, 2021-2032, (USD Million)

Global Rapid Thermal Processing Equipment production by region & country, production, value, CAGR, 2021-2032, (USD Million) & (Units), (based on production site)

Global Rapid Thermal Processing Equipment consumption by region & country, CAGR, 2021-2032 & (Units)

U.S. VS China: Rapid Thermal Processing Equipment domestic production, consumption, key domestic manufacturers and share

Global Rapid Thermal Processing Equipment production by manufacturer, production, price, value and market share 2021-2026, (USD Million) & (Units)

Global Rapid Thermal Processing Equipment production by Type, production, value, CAGR, 2021-2032, (USD Million) & (Units)

Global Rapid Thermal Processing Equipment production by Application, production, value, CAGR, 2021-2032, (USD Million) & (Units)

This report profiles key players in the global Rapid Thermal Processing Equipment market based on the following parameters - company overview, production, value, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Applied Materials, Mattson Technology, Kokusai Electric, Ultratech(Veeco）, Centrotherm, AnnealSys, JTEKT Thermo System, ECM, CVD Equipment Corporation, SemiTEq, etc.

This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.

Stakeholders would have ease in decision-making through various strategy matrices used in analyzing the World Rapid Thermal Processing Equipment market

Detailed Segmentation:

Each section contains quantitative market data including market by value (US$ Millions), volume (production, consumption) & (Units) and average price (K USD/Unit) by manufacturer, by Type, and by Application. Data is given for the years 2021-2032 by year with 2025 as the base year, 2026 as the estimate year, and 2027-2032 as the forecast year.

Global Rapid Thermal Processing Equipment Market, By Region:
United States
China
Europe
Japan
South Korea
ASEAN
India
Rest of World

Global Rapid Thermal Processing Equipment Market, Segmentation by Type:
Lamp-based
Laser-based

Global Rapid Thermal Processing Equipment Market, Segmentation by Application:
R&D
Industrial Production

Companies Profiled:
Applied Materials
Mattson Technology
Kokusai Electric
Ultratech(Veeco）
Centrotherm
AnnealSys
JTEKT Thermo System
ECM
CVD Equipment Corporation
SemiTEq
Shanghai Wanye Enterprises Co., Ltd.
UniTemp GmbH
Plasma-Therm

Key Questions Answered:

1. How big is the global Rapid Thermal Processing Equipment market?

2. What is the demand of the global Rapid Thermal Processing Equipment market?

3. What is the year over year growth of the global Rapid Thermal Processing Equipment market?

4. What is the production and production value of the global Rapid Thermal Processing Equipment market?

5. Who are the key producers in the global Rapid Thermal Processing Equipment market?

6. What are the growth factors driving the market demand? Show more