Global CMP Slurry Filters Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032
Description
According to our (Global Info Research) latest study, the global CMP Slurry Filters market size was valued at US$ 83.56 million in 2025 and is forecast to a readjusted size of US$ 132 million by 2032 with a CAGR of 6.4% during review period.
Chemical mechanical planarization (CMP) is a polishing process used to manufacture wafers for the semiconductor industry. It requires the use of a polishing tool and polishing slurry. The slurry in the tool is delivered to the wafer surface and may contain large particles/agglomerates (> 1 μ) as a result of shipping/handling issues, drying, and interactions within the slurry distribution systems. These large particles can, in turn, increase the level of defectives (scratches) on the semiconductor wafer surface found after the CMP process has been completed. One of the solutions for decreasing the level of defects caused by large slurry particles is through the use of slurry filtration. For these applications, 0.5 to 5 micron filters are typically used. In 2025, global production of CMP slurry filters reached 1.83 million units, with an average selling price of USD 44.3 per unit.
The primary drivers of the CMP slurry filter market stem from the increasing precision of semiconductor manufacturing processes and the rapid advancement of cutting-edge technologies. As processes such as 5nm, 3nm, and beyond become mainstream, wafer surfaces demand stricter defect control, where even minor slurry particles (>0.1μm) can cause critical polishing defects—fueling demand for high-precision filtration (e.g., sub-0.2μm filters). Additionally, the global expansion of semiconductor production capacity (particularly in logic chips and 3D NAND memory) has led to more CMP process steps, such as multi-layer copper interconnects and TSV (Through-Silicon Via) technology, directly increasing filter consumable usage. Meanwhile, supply chain localization trends (e.g., the rise of fabs in China and South Korea) are accelerating the qualification of regional filter suppliers as alternatives to traditional global leaders.
On the technological front, filters are evolving toward low extractables and high chemical compatibility to address challenges posed by advanced slurries (e.g., cobalt polishing fluids). Multi-layer composite membrane structures (e.g., PTFE + nylon) are becoming mainstream, balancing particle retention efficiency with flow stability. From a market perspective, domestic substitution is a key trend, with Chinese manufacturers (e.g., Cobetter) gradually entering local fab supply chains by improving membrane materials and packaging processes. Furthermore, sustainability demands are driving R&D into recyclable filtration systems (e.g., inline monitoring + automated replacement) to reduce waste and lower total cost of ownership. Looking ahead, with the adoption of GAA transistors and advanced packaging technologies, innovation in CMP filter precision and reliability is expected to accelerate further.
This report is a detailed and comprehensive analysis for global CMP Slurry Filters market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global CMP Slurry Filters market size and forecasts, in consumption value ($ Million), sales quantity (K Units), and average selling prices (USD/Unit), 2021-2032
Global CMP Slurry Filters market size and forecasts by region and country, in consumption value ($ Million), sales quantity (K Units), and average selling prices (USD/Unit), 2021-2032
Global CMP Slurry Filters market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (K Units), and average selling prices (USD/Unit), 2021-2032
Global CMP Slurry Filters market shares of main players, shipments in revenue ($ Million), sales quantity (K Units), and ASP (USD/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for CMP Slurry Filters
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global CMP Slurry Filters market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Entegris, Pall, Cobetter, 3M, TAK Microfilter Inc., ROKI TECHNO, Kan I International, Taiwan Grace International, JENG KANG International, Membrane Solutions, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
CMP Slurry Filters market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Type
Removal Rating < 0.5 µm
0.5 µm≤Removal Rating<1 µm
1 µm≤Removal Rating≤5 µm
Removal Rating > 5 µm
Market segment by Filter Form Factor
Capsule Filter
Cartridge Filter
Market segment by End Users
Foundry
IDM
Market segment by Application
300 mm Wafer
200 mm Wafer
Others
Major players covered
Entegris
Pall
Cobetter
3M
TAK Microfilter Inc.
ROKI TECHNO
Kan I International
Taiwan Grace International
JENG KANG International
Membrane Solutions
Hangzhou Deefine
Hangzhou Darlly Filtration Equipment Co.,Ltd
Ever Pure Applied Materials Co., Ltd
Feature-Tec
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe CMP Slurry Filters product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of CMP Slurry Filters, with price, sales quantity, revenue, and global market share of CMP Slurry Filters from 2021 to 2026.
Chapter 3, the CMP Slurry Filters competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the CMP Slurry Filters breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and CMP Slurry Filters market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of CMP Slurry Filters.
Chapter 14 and 15, to describe CMP Slurry Filters sales channel, distributors, customers, research findings and conclusion.
Chemical mechanical planarization (CMP) is a polishing process used to manufacture wafers for the semiconductor industry. It requires the use of a polishing tool and polishing slurry. The slurry in the tool is delivered to the wafer surface and may contain large particles/agglomerates (> 1 μ) as a result of shipping/handling issues, drying, and interactions within the slurry distribution systems. These large particles can, in turn, increase the level of defectives (scratches) on the semiconductor wafer surface found after the CMP process has been completed. One of the solutions for decreasing the level of defects caused by large slurry particles is through the use of slurry filtration. For these applications, 0.5 to 5 micron filters are typically used. In 2025, global production of CMP slurry filters reached 1.83 million units, with an average selling price of USD 44.3 per unit.
The primary drivers of the CMP slurry filter market stem from the increasing precision of semiconductor manufacturing processes and the rapid advancement of cutting-edge technologies. As processes such as 5nm, 3nm, and beyond become mainstream, wafer surfaces demand stricter defect control, where even minor slurry particles (>0.1μm) can cause critical polishing defects—fueling demand for high-precision filtration (e.g., sub-0.2μm filters). Additionally, the global expansion of semiconductor production capacity (particularly in logic chips and 3D NAND memory) has led to more CMP process steps, such as multi-layer copper interconnects and TSV (Through-Silicon Via) technology, directly increasing filter consumable usage. Meanwhile, supply chain localization trends (e.g., the rise of fabs in China and South Korea) are accelerating the qualification of regional filter suppliers as alternatives to traditional global leaders.
On the technological front, filters are evolving toward low extractables and high chemical compatibility to address challenges posed by advanced slurries (e.g., cobalt polishing fluids). Multi-layer composite membrane structures (e.g., PTFE + nylon) are becoming mainstream, balancing particle retention efficiency with flow stability. From a market perspective, domestic substitution is a key trend, with Chinese manufacturers (e.g., Cobetter) gradually entering local fab supply chains by improving membrane materials and packaging processes. Furthermore, sustainability demands are driving R&D into recyclable filtration systems (e.g., inline monitoring + automated replacement) to reduce waste and lower total cost of ownership. Looking ahead, with the adoption of GAA transistors and advanced packaging technologies, innovation in CMP filter precision and reliability is expected to accelerate further.
This report is a detailed and comprehensive analysis for global CMP Slurry Filters market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global CMP Slurry Filters market size and forecasts, in consumption value ($ Million), sales quantity (K Units), and average selling prices (USD/Unit), 2021-2032
Global CMP Slurry Filters market size and forecasts by region and country, in consumption value ($ Million), sales quantity (K Units), and average selling prices (USD/Unit), 2021-2032
Global CMP Slurry Filters market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (K Units), and average selling prices (USD/Unit), 2021-2032
Global CMP Slurry Filters market shares of main players, shipments in revenue ($ Million), sales quantity (K Units), and ASP (USD/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for CMP Slurry Filters
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global CMP Slurry Filters market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Entegris, Pall, Cobetter, 3M, TAK Microfilter Inc., ROKI TECHNO, Kan I International, Taiwan Grace International, JENG KANG International, Membrane Solutions, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
CMP Slurry Filters market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Type
Removal Rating < 0.5 µm
0.5 µm≤Removal Rating<1 µm
1 µm≤Removal Rating≤5 µm
Removal Rating > 5 µm
Market segment by Filter Form Factor
Capsule Filter
Cartridge Filter
Market segment by End Users
Foundry
IDM
Market segment by Application
300 mm Wafer
200 mm Wafer
Others
Major players covered
Entegris
Pall
Cobetter
3M
TAK Microfilter Inc.
ROKI TECHNO
Kan I International
Taiwan Grace International
JENG KANG International
Membrane Solutions
Hangzhou Deefine
Hangzhou Darlly Filtration Equipment Co.,Ltd
Ever Pure Applied Materials Co., Ltd
Feature-Tec
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe CMP Slurry Filters product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of CMP Slurry Filters, with price, sales quantity, revenue, and global market share of CMP Slurry Filters from 2021 to 2026.
Chapter 3, the CMP Slurry Filters competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the CMP Slurry Filters breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and CMP Slurry Filters market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of CMP Slurry Filters.
Chapter 14 and 15, to describe CMP Slurry Filters sales channel, distributors, customers, research findings and conclusion.
Table of Contents
118 Pages
- 1 Market Overview
- 2 Manufacturers Profiles
- 3 Competitive Environment: CMP Slurry Filters by Manufacturer
- 4 Consumption Analysis by Region
- 5 Market Segment by Type
- 6 Market Segment by Application
- 7 North America
- 8 Europe
- 9 Asia-Pacific
- 10 South America
- 11 Middle East & Africa
- 12 Market Dynamics
- 13 Raw Material and Industry Chain
- 14 Shipments by Distribution Channel
- 15 Research Findings and Conclusion
- 16 Appendix
Pricing
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