Global Semiconductor Dry Vacuum Pump Market Research Report, Competitive, Technology and Forecast Analysis 2025-2032

Market Overview

According to DIResearch＇s in-depth investigation and research, the global Semiconductor Dry Vacuum Pump market size will reach 1,579.73 Million USD in 2025 and is projected to reach 2,832.63 Million USD by 2032, with a CAGR of 8.70% (2025-2032). Notably, the China Semiconductor Dry Vacuum Pump market has changed rapidly in the past few years. By 2025, China＇s market size is expected to be  Million USD, representing approximately  % of the global market share.

Research Summary

A semiconductor dry vacuum pump is a specialized pump used in semiconductor manufacturing processes to remove gases and vapors from vacuum chambers and systems without the use of oil or other lubricants. Unlike traditional oil-sealed vacuum pumps, semiconductor dry vacuum pumps utilize advanced technologies such as multi-stage compression, non-contacting bearings, and high-efficiency pumping mechanisms to achieve ultra-high vacuum levels while eliminating the risk of oil contamination. These pumps are designed to handle the demanding requirements of semiconductor fabrication environments, including high pumping speeds, low particle generation, and minimal maintenance requirements. Semiconductor dry vacuum pumps play a critical role in processes such as wafer processing, thin film deposition, and plasma etching, where maintaining a clean and contamination-free vacuum environment is essential for ensuring the quality and reliability of semiconductor devices.

The major global  manufacturers of Semiconductor Dry Vacuum Pump include Atlas Copco (Edwards Vacuum), Ebara Corporation, Pfeiffer Vacuum GmbH, LOTVACUUM, Kashiyama Industries, Hanbell Precise Machinery, Busch Vacuum, ULVAC, Inc, SKY Technology Development, Osaka Vacuum, Taiko Kikai Industries, EVP Vacuum Technology, Scroll Laboratories, Inc, Highvac Corporation, etc. The global players competition landscape in this report is divided into three tiers. The first tier comprises global leading enterprises that command a substantial market share, hold a dominant industry position, possess strong competitiveness and influence, and generate significant revenue. The second tier includes companies with a notable market presence and reputation; these firms actively follow industry leaders in product, service, or technological innovation and maintain a moderate revenue scale. The third tier consists of smaller companies with limited market share and lower brand recognition, primarily focused on local markets and generating comparatively lower revenue.

This report studies the market size, price trends and future development prospects of Semiconductor Dry Vacuum Pump. Focus on analysing the market share, product portfolio, prices, sales, revenue and gross profit margin of global major manufacturers, as well as the market status and trends of different product types and applications in the global Semiconductor Dry Vacuum Pump market. The report data covers historical data from 2020 to 2024, based year in 2025 and forecast data from 2026 to 2032.

The regions and countries in the report include US, Germany, Japan, China, France, UK, South Korea, Canada, Italy, Russia, Mexico, Brazil, India, Vietnam, Thailand, South Africa and other regions, covering the Semiconductor Dry Vacuum Pump market conditions and future development trends of key regions and countries, combined with industry-related policies and the latest technological developments, analyze the development characteristics of Semiconductor Dry Vacuum Pump industries in various regions and countries, help companies understand the development characteristics of each region, help companies formulate business strategies, and achieve the ultimate goal of the company's global development strategy.    

The data sources of this report mainly include the National Bureau of Statistics, customs databases, industry associations, corporate financial reports, third-party databases, etc. Among them, macroeconomic data mainly comes from the National Bureau of Statistics, International Economic Research Organization; industry statistical data mainly come from industry associations; company data mainly comes from interviews, public information collection, third-party reliable databases, and price data mainly comes from various markets monitoring database.

Global Key Manufacturers of Semiconductor Dry Vacuum Pump Include:

Atlas Copco (Edwards Vacuum)

Ebara Corporation

Pfeiffer Vacuum GmbH

LOTVACUUM

Kashiyama Industries

Hanbell Precise Machinery

Busch Vacuum

ULVAC, Inc

SKY Technology Development

Osaka Vacuum

Taiko Kikai Industries

EVP Vacuum Technology

Scroll Laboratories, Inc

Highvac Corporation

Semiconductor Dry Vacuum Pump Product Segment Include:

Screw Vacuum Pump

Scroll Vacuum Pump

Claw Vacuum Pump

Others

Semiconductor Dry Vacuum Pump Product Application Include:

CVD & PVD

Lithography & Etching

Others

Chapter Scope

Chapter 1: Product Research Range, Product Types and Applications, Market Overview, Market Situation and Trend

Chapter 2: Global Semiconductor Dry Vacuum Pump Industry PESTEL Analysis

Chapter 3: Global Semiconductor Dry Vacuum Pump Industry Porter's Five Forces Analysis

Chapter 4: Global Semiconductor Dry Vacuum Pump Major Regional Market Size (Sales, Revenue, Price) and Forecast Analysis

Chapter 5: Global Semiconductor Dry Vacuum Pump Competitive Analysis of Key Manufacturers (Sales, Revenue, Market Share, Price, Regional Distribution and Industry Concentration)

Chapter 6: Global Semiconductor Dry Vacuum Pump Sales, Revenue, Price and Forecast by Product Type

Chapter 7: Key Company Profiles (Product Portfolio, Sales, Revenue, Price and Gross Margin)

Chapter 8: Industrial Chain Analysis, Semiconductor Dry Vacuum Pump Different Application Market Analysis (Sales and Revenue), Sales Channel Analysis

Chapter 9: Research Findings and Conclusion

Chapter 10: Methodology and Data Sources Show more