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Atomic Layer Deposition and other Ultrathin-Film Fabrication Processes

Atomic Layer Deposition and other Ultrathin-Film Fabrication Processes

The global market for atomic layer deposition and other ultrathin film fabrication processes was valued at $1.1 billion and $1.3 billion in 2014 and 2015, respectively. This market is expected to increase from $1.5 billion in 2016 to nearly $3.7 billion in 2021 at a compound annual growth rate (CAGR) of 19.1% for 2016-2021.

This report provides:
An overview of the global markets for atomic layer deposition and other ultrathin-film fabrication processes.
Analyses of global market trends, with data from 2014 and 2015, estimates for 2016 and projections of compound annual growth rates (CAGRs) through 2021.
Focused coverage of materials, equipment, and fabrication technologies.
A look at existing fields of application for atomic layer deposition as well as emerging applications.
Coverage of these processes in relation to industry segments such as electronics, mechanical, chemical, energy, optics, medical, biological, dental, medical, and nanotechnology.
Analysis of the market's dynamics, specifically growth drivers, restraints, and opportunities.
Profiles of major players in the industry.


SCOPE OF REPORT

This report provides an updated review of atomic layer deposition and other ultrathin film deposition technologies, and identifies current and emerging applications for these technologies.

BCC Research delineates the current market status for ultrathin film deposition equipment, defines trends and presents growth forecasts for the next five years. The UTFE market is analyzed based on the following segments: process, application and region. In addition, technological issues, including key events and the latest process developments, are discussed.

More specifically, the market analysis conducted by BCC Research for this report is divided into five sections.

In the first section, an introduction to the topic and a historical review of atomic layer deposition are provided, including an outline of recent events. In this section, current and emerging applications for ALD and other ultrathin film fabrication processes are also identified and grouped in segments (electronics, optoelectronics, mechanical/chemical, sensors and instrumentation, energy, optical coatings, life sciences, and others).

The second section provides a review of deposition technologies for ultrathin films. This section offers a revised and detailed description of various thin film coating processes; existing deposition methods for ultrathin films; and new and emerging fabrication processes. This section concludes with an analysis of the most important technological developments since 2013, including examples of significant patents recently issued or applied for, as well as highlighting the most active research organizations operating in this field.

The third section entails a global market analysis for UTFE. Global revenues (sales data in millions of dollars) are presented for each segment (process, application and region), with actual data referring to the years 2014 and 2015, and estimates for 2016.

The analysis of current UTFE revenues is followed by a detailed presentation of market growth trends, based on industry growth, technological trends and regional trends. The third section concludes by providing projected UTFE revenues within each segment, together with forecast compound annual growth rates (CAGRs) for the period 2016 through 2021.

In the fourth section of the study, which covers global industry structure, the report offers a list of the leading suppliers of UTFE, together with a description of their products. The analysis includes a description of the geographical distribution of these firms and an evaluation of other key industry players. Detailed company profiles of the top players are also provided.

The fifth and final section includes an analysis of recently issued U.S. patents, with a summary of patents related to ultrathin film fabrication methods, equipment and applications. Patent analysis is performed by region, country, assignee, patent category, application and process type.

CHAPTER 1 INTRODUCTION
STUDY GOALS AND OBJECTIVES
REASONS FOR DOING THIS STUDY
INTENDED AUDIENCE
SCOPE OF REPORT
METHODOLOGY AND INFORMATION SOURCES
RELATED BCC RESEARCH REPORTS
ANALYST'S CREDENTIALS
BCC RESEARCH WEBSITE
DISCLAIMER
CHAPTER 2 EXECUTIVE SUMMARY
SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS)
SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES MARKET, BY SEGMENT, 2014-2021 ($ MILLIONS)
CHAPTER 3 OVERVIEW
THICK, THIN AND ULTRATHIN FILMS
DEFINITIONS
COST FACTOR AND MANUFACTURING PROCESSES
Technological and Market Trends in the Thin Film Industry
FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2016 (%)
REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT
EVENTS
TABLE 1 ATOMIC LAYER DEPOSITION: TECHNOLOGICAL MILESTONES
FIGURE 2 ATOMIC LAYER DEPOSITION: GLOBAL PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2015 (NO. OF PATENTS/APPLICATIONS)
CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION AND OTHER ULTRATHIN FILM FABRICATION PROCESSES
TABLE 2 APPLICATIONS FOR ULTRATHIN FILM PROCESSES, 2016
ELECTRONICS
Integrated Circuits
Passive Components
Embedded Components
Recording Heads
MEMS and NEMS
Rigid and Flexible Printed Circuits
TABLE 3 ULTRATHIN FILM APPLICATIONS IN ELECTRONICS, 2016
OPTOELECTRONICS
Advanced Displays
Solid-state Lighting
Other Optoelectronic Devices
TABLE 4 ULTRATHIN FILM APPLICATIONS IN OPTOELECTRONICS, 2016
MECHANICAL/CHEMICAL
Protective Coatings
Solid Lubricants
Membranes and Catalysts
Particle Coatings
TABLE 5 ULTRATHIN FILM APPLICATIONS IN THE MECHANICAL/
CHEMICAL SECTOR, 2016
SENSORS AND INSTRUMENTATION
Chemical, Physical and Optical Sensors
Biosensors
TABLE 6 ULTRATHIN FILM APPLICATIONS IN THE SENSORS AND INSTRUMENTATION SECTOR, 2016
ENERGY
Photovoltaic Cells and Photothermal Devices
Thermoelectric Devices
High-Temperature Superconductors
Fuel Cells
Batteries
Supercapacitors
TABLE 7 ULTRATHIN FILM APPLICATIONS IN THE ENERGY SECTOR, 2016
OPTICAL COATINGS
Glass Coatings
Technical Coatings
TABLE 8 ULTRATHIN FILM APPLICATIONS IN THE OPTICAL COATINGS SECTOR, 2016
LIFE SCIENCES
Biocompatible Coatings
Other Coatings
TABLE 9 ULTRATHIN FILM APPLICATIONS IN LIFE SCIENCES, 2016
OTHERS
TABLE 10 OTHER ULTRATHIN FILM APPLICATIONS, 2016
CHAPTER 4 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS
INTRODUCTION
THIN FILM DEPOSITION PROCESSES
ADDITIVE METHODS
TABLE 11 THIN FILM PRINTING TECHNOLOGIES, 2016
SUBTRACTIVE METHODS
Coating Methods Used in Subtractive Processes
TABLE 12 THIN-FILM COATING TECHNOLOGIES, 2016
Physical Processes
Chemical Processes
Hybrid Processes
DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS
TABLE 13 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016
TABLE 14 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 2016
ULTRA-HIGH VACUUM ELECTRON BEAM DEPOSITION
TABLE 15 THERMAL EVAPORATION: BASIC PROCESS STEPS
TABLE 16 ELECTRON BEAM EVAPORATION: BASIC PROCESS STEPS
MOLECULAR BEAM EPITAXY
TABLE 17 MOLECULAR BEAM EPITAXY: BASIC PROCESS STEPS
LASER ABLATION/PULSED LASER DEPOSITION
TABLE 18 LASER ABLATION/PLD: BASIC PROCESS STEPS
MAGNETRON SPUTTERING
TABLE 19 SPUTTERING: BASIC PROCESS STEPS
CHEMICAL VAPOR DEPOSITION
TABLE 20 CHEMICAL VAPOR DEPOSITION: BASIC PROCESS STEPS
Ultra-high Vacuum CVD
Plasma Enhanced CVD
Metal-Organic Chemical Vapor Deposition
TABLE 21 METAL-ORGANIC CVD: BASIC PROCESS STEPS
Nanolayer Deposition
Atomic Vapor Deposition
Atomic Layer Deposition
TABLE 22 ALD TECHNOLOGIES, 2016
CHEMICAL SOLUTION DEPOSITION
Basic Chemical Solution Deposition Technology
TABLE 23 CHEMICAL SOLUTION DEPOSITION: TYPICAL ROUTES
TABLE 24 CHEMICAL SOLUTION DEPOSITION: BASIC PROCESS STEPS
Spin Coating
Dip Coating
Spray Pyrolysis
Sol-gel
Polymeric Route
Colloidal Route
Other Sol-gel Routes
Organic-inorganic Hybrids
Metalorganic Deposition
Chelate Method
Nitrate Method
Citrate Method
Pechini Method
INTERFACIAL POLYMERIZATION
LANGMUIR-BLODGETT DEPOSITION
SELF-ASSEMBLED MONOLAYER DEPOSITION
LAYER-BY-LAYER ASSEMBLY
HIGH-SPEED ELECTROMAGNETIC VALVE DEPOSITION
ELECTROLESS DEPOSITION
SPRAY PYROLYSIS
ELECTROCHEMICAL GRAFTING
HYBRID PROCESSES
LATEST TECHNOLOGICAL DEVELOPMENTS, 2013 TO PRESENT
ATOMIC LAYER DEPOSITION
Roll-to-roll Atomic Layer Deposition
Ultraviolet-light-assisted ALD
Spatial Atomic Layer Deposition
Electron-enhanced Atomic Layer Deposition
High-throughput Atomic Layer Deposition
Combined Atomic Layer Etching/Atomic Layer Deposition Equipment
OTHER ULTRATHIN FILM DEPOSITION METHODS
Matrix Assisted Pulsed Laser Evaporation
Multiple Beam Pulsed Laser Deposition
Pulsed Electron Beam Deposition
OTHER RELEVANT R&D ACTIVITIES
TABLE 25 OTHER RELEVANT R &D ACTIVITIES
CHAPTER 5 GLOBAL MARKETS
ANALYSIS OUTLINE
GLOBAL MARKET SUMMARY
TABLE 26 GLOBAL ULTRATHIN FILM DEPOSITION MARKET, BY SEGMENT, THROUGH 2021 ($ MILLIONS)
FIGURE 3 GLOBAL ULTRATHIN FILM DEPOSITION TECHNOLOGIES MARKET, 2014-2021 ($ MILLIONS)
CURRENT MARKET STATUS
CURRENT MARKET SUMMARY
TABLE 27 GLOBAL THIN FILM PROCESSES MARKET, THROUGH 2016 ($ MILLIONS)
FIGURE 4 GLOBAL THIN FILM PROCESSES MARKET SHARE, BY MATERIAL, EQUIPMENT AND SERVICES, 2016 (%)
TABLE 28 GLOBAL THIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS)
FIGURE 5 GLOBAL THIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%)
UTFE Market by Process
TABLE 29 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY PROCESS, THROUGH 2016 ($ MILLIONS)
FIGURE 6 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY PROCESS, 2016 (%)
ALD Market by Equipment Type
TABLE 30 GLOBAL ALD EQUIPMENT MARKET, BY TYPE, THROUGH 2016 ($ MILLIONS)
FIGURE 7 GLOBAL ALD EQUIPMENT MARKET SHARE, BY TYPE, 2016 (%)
UTFE Market by Application
TABLE 31 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION AND EQUIPMENT TYPE, 2016 ($ MILLIONS)
FIGURE 8 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2016 (%)
Revenues by Region
TABLE 32 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY REGION, THROUGH 2016 ($ MILLIONS)
FIGURE 9 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY REGION, 2016 (%)
MARKET GROWTH TRENDS
ELECTRONICS
Semiconductor Devices
TABLE 33 GLOBAL SEMICONDUCTORS MARKET, BY REGION, THROUGH 2021 ($ BILLIONS)
MEMS and NEMS
TABLE 34 GLOBAL MEMS AND NEMS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS)
Magnetic Storage Media and Recording Heads
Hard Disk Drives
TABLE 35 GLOBAL HARD DISK DRIVES PRODUCTION, BY TYPE, THROUGH 2021 (MILLION UNITS)
OPTOELECTRONICS
Advanced Displays
TABLE 36 GLOBAL ADVANCED DISPLAYS MARKET, BY TYPE, THROUGH 2021 ($ BILLIONS)
Lasers
Optical Waveguides
TABLE 37 GLOBAL OPTICAL FIBERS MARKET, THROUGH 2021 ($ MILLIONS/MILLIONS OF KILOMETERS)
Solid-state Lighting
SENSORS AND INSTRUMENTATION
Sensors
TABLE 38 GLOBAL SENSORS MARKET, BY TYPE, THROUGH 2021 ($ MILLIONS)
Biosensors and Gas Sensors
TABLE 39 FORECAST - BIOSENSORS AND OTHER COMMON SENSORS: GLOBAL REVENUES THROUGH 2021 ($ BILLIONS)
ENERGY
Photovoltaic Cells
TABLE 40 FORECAST - PHOTOVOLTAIC MODULES: GLOBAL
PRODUCTION BY TYPE, THROUGH 2021 (MW)
Flexible Solar Cells
Photothermal Devices
Batteries
Fuel Cells
TABLE 41 FORECAST-FUEL CELLS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS)
Thermoelectric Devices
LIFE SCIENCES
Implantable Devices
TABLE 42 FORECAST-IMPLANTABLE DEVICES: REVENUES BY REGION, THROUGH 2021 ($ BILLIONS)
Medical Instruments
MECHANICAL/CHEMICAL
TABLE 43 FORECAST-WEAR AND CORROSION RESISTANT PARTS: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($BILLIONS)
OTHER APPLICATIONS
TECHNOLOGICAL TRENDS
On-going Miniaturization in the Semiconductor Industry
Advent of Nanoelectronics and 2D Devices
FIGURE 10 FROM MICROELECTRONICS TO NANOELECTRONICS
Fast Growing Market for Transparent Electronics
Nanotechnology
TABLE 44 THE NANOTECHNOLOGY INDUSTRY, 2016
TABLE 45 GLOBAL NANOTECHNOLOGY MARKET, BY SEGMENT, THROUGH 2021 ($ BILLIONS)
FIGURE 11 GLOBAL NANOTECHNOLOGY MARKET SHARE, BY SEGMENT, 2021 (%)
Different Methods for a Variety of Applications
Atomic Layer Deposition
Liquid Phase Methods
Pulsed Laser Deposition
Molecular Beam Epitaxy
REGIONAL TRENDS
MARKET FORECAST
UTFE MARKET BY APPLICATION
TABLE 46 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET, BY APPLICATION, THROUGH 2021 ($ MILLIONS)
FIGURE 12 GLOBAL ULTRATHIN FILM EQUIPMENT MARKET SHARE, BY APPLICATION, 2021 (%)
TABLE 47 FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY APPLICATION AND EQUIPMENT TYPE, 2021 ($ MILLIONS)
UTFE MARKET BY PROCESS
TABLE 48 FORECAST-ULTRATHIN FILM EQUIPMENT: GLOBAL REVENUES BY PROCESS, THROUGH 2021 ($ MILLIONS)
FIGURE 13 FORECAST - ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY PROCESS, 2021 (%)
ALD Market by Equipment Type
TABLE 49 FORECAST-ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2021 ($ MILLIONS)
FIGURE 14 FORECAST-ALD EQUIPMENT MARKET SHARE, BY TYPE, 2021 (%)
UTFE MARKET BY REGION
TABLE 50 FORECAST-ULTRATHIN FILM EQUIPMENT: REVENUES, BY REGION, THROUGH 2021 ($ MILLIONS)
FIGURE 15 FORECAST-ULTRATHIN FILM EQUIPMENT: MARKET SHARE BY REGION, 2021 (%)
CHAPTER 6 GLOBAL INDUSTRY STRUCTURE
LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT
TABLE 51 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, 2016
TABLE 52 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE, 2016
TABLE 53 LEADING SUPPLIERS OF ULTRATHIN FILM DEPOSITION EQUIPMENT, BY TYPE AND REGION, 2016
OTHER PLAYERS IN THE ULTRATHIN FILM INDUSTRY
TABLE 54 OTHER RELEVANT INDUSTRY PLAYERS, 2016
COMPANY PROFILES
AIXTRON
APEX INSTRUMENTS
APPLIED MATERIALS
ASM INTERNATIONAL
BENEQ
JUSUNG ENGINEERING
KURT J. LESKER
LAM RESEARCH
LJ UHV TECHNOLOGY
MEYER BURGER
NANO-MASTER
OXFORD INSTRUMENTS
PICOSUN
PVD PRODUCTS
SENTECH
TORR
TSST
ULTRATECH
VEECO INSTRUMENTS
WONIK IPS
CHAPTER 7 PATENT ANALYSIS
INTRODUCTION
SUMMARY OF RECENTLY AWARDED PATENTS
TABLE 55 ULTRATHIN FILM DEPOSITION PROCESSES: U.S. PATENTS, 2016
GENERAL TRENDS
TABLE 56 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, THROUGH 2016
FIGURE 16 ULTRATHIN FILM FABRICATION PROCESSES: U.S. PATENT TRENDS, 2014-2016 (NUMBER OF PATENTS)
TRENDS BY COUNTRY AND REGION
FIGURE 17 ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY REGION, 2016 (%)
FIGURE 18 ULTRATHIN FILM FABRICATION PROCESSES: PATENT SHARE, BY COUNTRY, 2016 (%)
TRENDS BY ASSIGNEE
TABLE 57 ASSIGNEES OF U.S. PATENTS RELATED TO ULTRATHIN FILM FABRICATION PROCESSES, 2015-2016
FIGURE 19 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2016 (%)
TRENDS BY PATENT CATEGORY
FIGURE 20 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS BY CATEGORY, 2016 (%)
TRENDS BY APPLICATION
FIGURE 21 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY APPLICATION, 2016 (%)
TRENDS BY PROCESS TYPE
FIGURE 22 ULTRATHIN FILM FABRICATION PROCESSES: SHARES OF U.S. PATENTS, BY PROCESS TYPE, 2016 (%)

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