Thin-layer Deposition: CVD, Ion Implantation, & Epitaxy

Published by: BCC Research

Published: Apr. 1, 2008 - 203 Pages

Table of Contents

INTRODUCTION

STUDY GOALS AND OBJECTIVES

REASONS FOR DOING THE STUDY

INTENDED AUDIENCE

SCOPE OF REPORT

METHODOLOGY

INFORMATION SOURCES

ANALYST’S CREDENTIALS

RELATED BCC REPORTS

BCC ONLINE SERVICES

DISCLAIMER

SUMMARY

SUMMARY TABLE VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)

SUMMARY FIGURE GLOBAL VALUE OF THE CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)

OVERVIEW

THIN FILM DEPOSITION PROCESS STATUS

TABLE 1 STATUS OF MAJOR DEPOSITION STUDIES BY BCC RESEARCH

DEPOSITION TECHNOLOGIES COVERED IN THIS REPORT

TABLE 2 KEY THIN FILM TECHNOLOGIES INCLUDED

MAJOR APPLICATIONS

TABLE 3 KEY APPLICATIONS OF THIN FILM TECHNOLOGIES BY MARKET

CLASSIFICATION OF MATERIALS

TABLE 4 TYPICAL MATERIALS AND THEIR APPLICATIONS

INDUSTRY STRUCTURE

INDUSTRY STRUCTURE

TABLE 5 KEY COMPANIES IN THE CVD, ION IMPLANTATION, AND EPITAXY BUSINESS

TABLE 5 (CONTINUED)

THIN FILM INDUSTRY CHANGES

TECHNOLOGY CONTINUES TO EXPAND IN CHINA

MERGER AND ACQUISITION TREND CONTINUES

GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING

TABLE 6 ESTMATED GLOBAL MANUFACTURING OFCVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT (%)

FIGURE 1 ESTIMATED GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING, 2007-2013 (%)

GLOBAL CONSUMPTION OF CVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT

TABLE 7 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)

FIGURE 2 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)

MARKET SHARES

TABLE 8 MARKET SHARES OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURERS, 2007

COMPANY PROFILES

AIXTRON, AACHEN, GERMANY

AMEC INC., SHANGHAI, CHINA

APPLIED MATERIALS, INC., SANTA CLARA, CA

ASM INTERNATIONAL, THE NETHERLANDS

CVD EQUIPMENT CORPORATION, RONKOKOMA, NY

IBIS TECHNOLOGY CORPORATION, DANVERS, MA

IMPLANT SCIENCES CORPORATION, WAKEFIELD, MA.

NOVELLUS SYSTEMS, INC., SAN JOSE, CA

OERLIKON BALZERS, KOLN, GERMANY

OXFORD INSTRUMENTS, OXON, UNITED KINGDOM

RIBER COPORATION, BEZONS CEDEX, FRANCE

RICHTER PRECISION, INC., EAST PETERSBURG, PA

TOKYO ELECTRON LIMITED, TOKYO, JAPAN

ULVAC TECHNOLOGIES, INC., METHUEN, MASSACHUSETTS

VARIAN SEMICONDUCTOREQUIPMENT ASSOCIATES, GLOUCESTER, MA

VEECO INSTRUMENTS, INC., WOODBURY, NY

THIN FILM TECHNOLOGY

CVD TECHNOLOGY

BASIC THERMAL CVD

TABLE 9 KEY TECHNICAL ADVANTAGES OF THE CVD PROCESS

Coating Technology

METALLO-ORGANIC CVD

TABLE 10 KEY TECHNICAL ADVANTAGES OF MOCVD

ATMOSPHERIC PRESSURE CVD

TABLE 11 MAJOR ADVANTAGES OF THE APCVD PROCESS

LOW-PRESSURE CVD

PLASMA-ENHANCED CVD

TABLE 12 KEY ADVANTAGES OF PLASMA-ENHANCED CVD

HIGH-DENSITY PLASMA CVD

TABLE 13 MAJOR TECHNICAL ADVANTAGES OF HDP-CVD

TEOS Ozone Chemistry

TABLE 14 KEY TECHNICAL ADVANTAGES OF TEOS/OZONE CHEMISTRY

DEVELOPMENTS THAT ARE EXPANDING CVD

CARBON NANOTUBES AND CVD

CLUSTER TOOLS

Definition

Advantages

TABLE 15 TECHNICAL ADVANTAGES OF CLUSTER TOOLS

ION IMPLANTATION TECHNOLOGY

TABLE 16 KEY TECHNICAL ADVANTAGES OF ION IMPLANTATION

BEAMLINE ION IMPLANTATION

TABLE 17 KEY ADVANTAGES OF BEAMLINE IMPLANTATION

PLASMA IMMERSION ION IMPLANTATION (PIII)

TABLE 18 KEY ADVANTAGES OF PIII

ION-ASSISTED DEPOSITION

Ion Beam-Assisted Deposition (IBAD)

TABLE 19 KEY TECHNICAL ADVANTAGES OF IBAD/PIIID

EPITAXY

MOLECULAR BEAM EPITAXY (MBE)

TABLE 20 MAJOR TECHNICAL ADVANTAGES OF MBE

Metal Organic Chemical Vapor Deposition (MOCVD)

DEVELOPMENTS THAT COULD EXPAND ION IMPLANTATION AND EPITAXY

TABLE 21 DEVELOPMENTS THAT COULD EXPAND THE USE OF ION IMPLANTATION AND EPITAXY

ANALYSIS OF PATENTS FOR CVD, ION IMPLANTATION, AND EPITAXY

PATENTS BY TECHNICAL TOPIC

TABLE 22 THIN FILM PRODUCT PATENTS BY TECHICAL TOPIC, 2005-2007

PATENTS BY GLOBAL REGION

TABLE 23 CVD, ION IMPLANTATION, AND EPITAXY-RELATED PATENTS BY REGION, 2005-2007

PATENTS BY ASSIGNEES

TABLE 24 ASSIGNEES WITH THREE OR MORE PATENTS

TABLE 24 (CONTINUED)

SAMPLE PATENT ABSTRACTS

CVD Method for Depositing a High-k Dielectric Film

Fabricating Semiconductor Structures with Epitaxially Grown Source and Drain Structures

Ion Implantation System with an Interlock Function

Ion Implantation used in Silicon-in-insulator Wafer Transfer Process

Fabricating Nitride-based Transistors with a Protective Layer and a Low Damage Recess

Multicomponent Barrier Layers in Quantum Well Active Regions Enhance Confinement and Speed

Multicomponent Barrier …(Continued)

CVD, ION IMPLANTATION, AND EPITAXY MARKETS

INDUSTRY APPROACH

INDUSTRY COMPETITIVENESS

MEASUREMENT OBJECTIVES

CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS MARKET

CVD, ION IMPLANTATION, AND EPITAXY

MICROELECTRONICS PRODUCT DEFINITON

TABLE 25 BASIC PRODUCTS USING CVD, ION IMPLANTATION, AND EPITAXY PRODUCTS

CHANGING PRODUCT CHARACTERISTICS

TABLE 26 INTEGRATED CIRCUIT CHARACTERISTICS

INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN MICROELECTRONICS

ECONOMIC CONDITIONS IN MICROELETRONICS

TABLE 27 GLOBAL DEMAND FOR KEY MICROELECTRONIC PRODUCTS BY TYPE, THROUGH 2007 ($ BILLIONS)

THIN FILM PRODUCT DEVELOPMENT AND STANDARDS

SEMI

Impact of Globalization

Standards

TABLE 28 KEY ADVANTAGES OF STANDARDS

SEMATECH

Importance to Thin Film Equipment

International Technology Roadmap for Semiconductors (ITRS)

The Semiconductor Industry Association

TABLE 29 CHALLENGES FOR THE SIA

GLOBAL ECONOMIC ENVIRONMENT

Continued Chip Industry Growth Seen by Many

TABLE 30 ECONOMIC IMPACT ON CHIP INDUSTRY, 2008

TECHNOLOGY ADVANCES

CVD Metal Fill Technology

Using Epitaxy to Extend CMOS

MICROELECTRONICS COMPETITIVENSS FACTORS

Driving Force for CVD, Ion Implantation, and Epitaxy

Impact of Market Growth Factors

TABLE 31 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS INDUSTRY (%)

SEMICONDUCTOR APPLICATIONS FOR CVD

MICROELECTRONIC MARKET SEGMENTS

CVD APPLICATIONS

TABLE 32 BASIC/EMERGING CVD SEMICONDUCTOR APPLICATIONS

Changes in Applications with Copper

Dielectric Processing Options

TABLE 33 CHANGING APPLICATIONS OF CVD FOR SEMICONDUCTORS

Impact of Larger Wafer Sizes

New Applications—MEMS Devices and Nanotechnology

TABLE 34 ADVANTAGES OF CVD IN MAKING CARBON NANOTUBES

IMPLANTATION APPLICATIONS FOR SEMICONDUCTORS

TABLE 35 SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION

Doping of Integrated Circuits

TABLE 36 DOPANT SPECIES USED IN CMOS IMPLANTS

Plasma Doping

Silicon-on-Insulator Technology

Hydrogen Implantation and Wafer Bonding

Oxygen Implantation (SIMOX)

Other Semiconductor Applications

EPITAXY APPLICATIONS FOR SEMICONDUCTORS

MOCVD for Silicon Wafers

MBE Applications

TABLE 37 COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED BY MBE

Quantum Well Lasers

KEY MATERIALS USED IN SEMICONDUCTOR APPLICATIONS

CVD MATERIALS

TABLE 38 MAJOR MATERIALS DEPOSITED BY CVD IN THE FABRICATION OF SEMICONDUCTORS

Dielectrics

Conductors

ION IMPLANTATION MATERIALS

TABLE 39 KEY MATERIALS USED FOR ION IMPLANTATION IN SEMICONDUCTOR FABRICATION

MBE MATERIALS

TABLE 40 TYPICAL MATERIALS USED IN MBE OPERATIONS

SEMICONDUCTOR MARKET DRIVERS AND TRENDS

THIN FILM EQUIPMENT DEMAND

CMOS Business Model

Fluctuating Growth Trends

TABLE 41 GLOBAL GROWTH TREND FOR SEMICONDUCTORS AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)

CVD

ION IMPLANTATION

MBE

OTHER MICROELECTRONIC APPLICATIONS

COMPONENTS

FLAT-PANEL DISPLAYS

LIGHT-EMITTING DIODES

TABLE 42 OVERVIEW OF OTHER MICROELECTRONIC APPLICATIONS FOR THIN FILM EQUIPMENT

Market Drivers for Other Microelectronic Products

FORECAST ASSUMPTIONS—CVD, ION IMPLANTATION, AND EPITAXY IN MICROELECTRONICS

TABLE 43 FORECAST ASSUMPTIONS: THIN FILM GROWTH IN THE MICROELECTRONICS INDUSTRY

TABLE 43 (CONTINUED)

TABLE 44 PROJECTED GLOBAL GROWTH TREND FOR CVD, ION IMPLANTATION, AND EPITAXY THIN FILM TECHNOLOGIES, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)

FORECAST—VALUE OF CVD SHIPMENTS

TABLE 45 VALUE OF GLOBAL CVD EQEUIPMENT SHIPMENTS FOR THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)

FIGURE 3 GLOBAL CVD SHIPMENTS FOR MICROELECTRONICS ($ MILLIONS)

FORECAST—VALUE OF IMPLANTATION EQUIPMENT SHIPMENTS

TABLE 46 FORECAST—VALUE OF GLOBAL IMPLANTATION EQUIPMENT FOR THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)

FIGURE 4 GLOBAL SHIPMENT VALUE OF ION IMPLANTATION EQUIPMENT FOR MICROELECTRONICS ($ MILLIONS)

FORECAST—VALUE OF MBE EQUIPMENT SHIPMENTS

TABLE 47 FORECAST—GLOBAL VALUE OF MBE SHIPMENTS FOR MICROELECTRONIC APPLICATIONS, THROUGH 2013 ($ MILLIONS)

FIGURE 5 GLOBAL VALUE OF MBE EQUIPMENT FOR MICROELECTRONICS, 2007-2013 ($ MILLIONS)

FORECAST-VALUE OF DEPOSITED CVD MATERIALS

Measurement Considerations

TABLE 48 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)

FIGURE 6 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF ION IMPLANTATION MATERIALS

TABLE 49 GLOBAL VALUE OF MATERIALS USED FOR IMPLANTATION IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ THOUSANDS)

FIGURE 7 GLOBAL VALUE OF MATERIALS IMPLANTED IN THE MICROELECTRONICS MARKET, 2007-2013 ($ THOUSANDS)

FORECAST—VALUE OF MBE MATERIALS

TABLE 50 GLOBAL VALUE OF MATERIALS USED FOR MBE IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)

FIGURE 8 GLOBAL VALUE OF MATERIALS CONSUMED BY MBE BY THE MICROELECTRONICS INDUSTRY, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF THIN FILM EQUIPMENT SERVICES

TABLE 51 VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SERVICES IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)

SUMMARY

TABLE 52 SUMMARY OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SHIPMENTS, MATERIALS AND SERVICES FOR MICROELECTRONICS, THROUGH 2013 ($ MILLIONS)

Summary (Continued)

CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET

CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET

MEDICAL PRODUCT DEFINITION

TABLE 53 BASIC TYPES OF MEDICAL DEVICES

INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN THE MEDICAL PRODUCT MARKET

GLOBAL ECONOMICS

TABLE 54 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND SUPPLIES BY REGION, 2007-2013 (%)

TABLE 55 POSITIVE ECONOMIC FACTORS FOR THE MEDICAL DEVICE INDUSTRY

COST ISSUES

TECHNOLOGY

MEDICAL MARKET COMPETITIVENESS FACTORS

Driving Force for CVD and Ion Implantation

Impact of Market Growth Factors

TABLE 56 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY (%)

MEDICAL INDUSTRY APPLICATIONS

CVD PROCESS

TABLE 57 OVERVIEW OF CVD APPLICATIONS IN THE MEDICAL INDUSTRY

ION IMPLANTATION APPLICATIONS

TABLE 58 MAJOR MEDICAL APPLICATIONS OF ION IMPLANTATION IN THE MEDICAL INDUSTRY

TYPES OF CVD AND ION IMPLANTATION EQUIPMENT USED IN MEDICAL APPLICATIONS

MAJOR MATERIALS USED FOR MEDICAL APPPLICATIONS

CVD MATERIALS

TABLE 59 KEY MATERIALS DEPOSITED BY CVD FOR MEDICAL APPLICATIONS

ION IMPLANTATION MATERIALS

TABLE 60 KEY MATERIALS USE FOR ION IMPLANTATION AND IBAD IN THE MEDICAL MARKET

MEDICAL MARKET DRIVERS AND TRENDS

THIN FILM EQUIPMENT DEMAND

Fluctuating Growth Trends

TABLE 61 GLOBAL GROWTH TREND FOR MEDICAL EQUIPMENT AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)

CVD

ION IMPLANTATION

FORECAST ASSUMPTIONS—CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY

TABLE 62 FORECAST ASUMPTIONS—THIN FILM GROWTH IN THE MEDICAL PRODUCTS INDUSTRY

TABLE 63 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION TECHNOLOGIES IN MEDICAL, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)

FORECAST—VALUE OF MEDICAL CVD SHIPMENTS

TABLE 64 VALUE OF GLOBAL CVD SHIPMENTS FOR THE MEDICAL EQUIPMENT MARKET, THROUGH 2013 ($ MILLIONS)

FIGURE 9 GLOBAL SHIPMENTS OF CVD EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF MEDICAL IMPLANT EQUIPMENT SHIPMENTS

TABLE 65 FORECAST—VALUE OF GLOBAL ION IMPLANTATION EQUIPMENT SHIPMENTS FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLONS)

FIGURE 10 GLOBAL VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR MEDICAL PRODUCTS, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF CVD DEPOSITED MATERIALS

Measurement Considerations

TABLE 66 GLOBAL VALUE OF CVD-DEPOSITED MATERIALS IN THE MEDICAL SUPPLY INDUSTRY, THROUGH 2013 ($ MILLIONS)

FIGURE 11 GLOBAL VALUE OF THIN FILM EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLIONS)

FORECAST—VALUE OF IMPLANTATION MATERIALS

TABLE 67 GLOBAL VALUE OF MATERIALS USED FOR ION IMPLANTATION IN THE MEDICAL SUPPLY INDUSTRY ($ THOUSANDS)

FIGURE 12 VALUE OF MATERIALS USED FOR ION IMPLANTATION APPLICATIONS, 2007-2013 ($ THOUSANDS)

FORECAST—VALUE OF THIN FILM EQUIPMENT SERVICES

CVD Services

Ion Implantation Services

TABLE 68 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE MEDICAL MARKET, THROUGH 2013 ($ MILLIONS)

CVD IN THE CUTTING TOOL MARKET

CVD IN THE CUTTING TOOL MARKET

PRODUCT DEFINITION

TABLE 69 BASIC TYPES OF CUTTING TOOLS

CUTTING TOOL INDUSTRY COMPETITIVENESS

ECONOMIC CONDITIONS

Economic Warnings

INTERNATIONAL CONDITIONS

Changing Market Shares

TABLE 70 GLOBAL CUTTING TOOL MARKET BY REGION, 2007-2013 (%)

TECHNOLOGY

CUTTING TOOL GROWTH FACTORS

Driving Force for CVD

Impact of Market Growth Factors

TABLE 71 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD IN THE CUTTING TOOL INDUSTRY (%)

CUTTING TOOL APPPLICATIONS

TABLE 72 MAJOR CVD CUTTING TOOL APPLICATIONS

TYPES OF CVD REACTORS

CVD versus PVD Process

ADVANTAGES OF CVD IN CUTTING TOOL COATING

MAJOR MATERIALS USED IN CUTTING TOOLS

TABLE 73 KEY MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY

CUTTING TOOL MARKET DRIVERS AND TRENDS

CVD EQUIPMENT DEMAND

Fluctuating Growth Trends

TABLE 74 GLOBAL GROWTH TREND FOR THE CUTTING TOOL INDUSTRY AND CVD EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)

FORECAST ASSUMPTIONS—CVD IN CUTTING TOOLS

TABLE 75 FORECAST ASSUMPTIONS FOR CVD GROWTH IN CUTTING TOOLS

TABLE 76 PROJECTED GLOBAL GROWTH TREND OF CVD FOR THE CUTTING TOOL INDUSTRY, THROUGH 2013

FORECAST—VALUE OF CVD CUTTING TOOL INDUSTRY SHIPMENTS

TABLE 77 FORECAST—VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL MARKET, THROUGH 2013 ($ MILLIONS)

FIGURE 13 GLOBAL VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL INDUSTRY, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF DEPOSITED CVD MATERIALS

Measurement Considerations

TABLE 78 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)

FIGURE 14 GLOBAL VALUE OF MATERIALS FOR CVD IN THE CUTTING TOOL INDUSTRY ($ MILLIONS)

FORECAST—VALUE OF CVD SERVICES

TABLE 79 GLOBAL VALUE OF CVD COATING SERVICES IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)

CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET

CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET

PRODUCT DEFINITION

TABLE 80 BASIC TYPES OF INDUSTRIAL PRODUCTS

INDUSTRIAL MARKET COMPETITIVENESS

AUTOMOTIVE MARKET

Domestic and International Economic Conditions

TABLE 81 CLOSING GAP BETWEEN U.S AND ASIAN AUTOMAKERS (% OF MARKET)

External Factors

TABLE 82 EXTERNAL FACTORS IMPACTING THE AUTO INDUSTRY

Technology

AEROSPACE MARKET

Economic Considerations

TABLE 83 U.S. AEROSPACE SALES BY PRODUCT, 2001-2006 ($ BILLIONS)

International Market

Technology

MARKET GROWTH FACTORS FOR INDUSTRIAL CVD AND ION IMPLANTATION

Driving Force for CVD

Impact of Market Growth Factors

TABLE 84 IMPACT OF MAJOR FACTORS ON CVD AND ION IMPLANTATION GROWTH IN THE INDUSTRIAL MARKET (%)

INDUSTRIAL THIN FILM APPLICATIONS

CVD PROCESS

ION IMPLANTATION APPLICATIONS

TABLE 85 MAJOR APPLICATIONS FOR CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET

TYPES OF CVD AND ION IMPLANTATI0N EQUIPMENT USED IN INDUSTRIAL APPLICATIONS

MAJOR MATERIALS USED FOR INDUSTRIAL APPLICATIONS

CVD MATERIALS

TABLE 86 KEY MATERIALS DEPOSITED BY CVD FOR INDUSTRIAL APPLICATIONS

ION IMPLANTATION MATERIALS

TABLE 87 KEY MATERIALS USED FOR ION IMPLANTATION IN THE INDUSTRIAL MARKET

INDUSTRIAL MARKET DRIVERS AND TRENDS

THIN FILM EQUIPMENT DEMAND

Fluctuating Growth Trends

TABLE 88 GLOBAL GROWTH TREND FOR INDUSTRIAL PRODUCTS AND THIN FIILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)

CVD

ION IMPLANTATION

FORECAST ASSUMPTIONS—CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET

TABLE 89 FORECAST ASSUMPTIONS—THIN FILM GROWTH IN THE INDUSTRIAL MARKET

TABLE 90 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION THIN FILM TECHNOLOGIES IN THE INDUSTRIAL SECTORS, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)

FORECAST—VALUE OF INDUSTRIAL CVD EQUIPMENT SHIPMENTS

TABLE 91 VALUE OF GLOBAL CVD SHIPMENTS FOR THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)

FIGURE 15 GLOBAL VALUE OF AUTOMOTIVE CVD SYSTEMS IN THE AUTOMOTIVE MARKET, 2007-2013 ($ MILLIONS)

FIGURE 16 GLOBAL VALUE OF CVD SYSTEMS IN THE AEROSPACE MARKET, THROUGH 2013 ($ MILLIONS)

FORECAST—VALUE OF INDUSTRIAL ION IMPLANTANTION EQUIPMENT SHIPMENTS

TABLE 92 FORECAST—VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR THE INDUSTRIAL SEGMENT, THROUGH 2013 ($ MILLIONS)

FIGURE 17 GLOBAL VALUE OF ION-RELATED EQUIPMENT IN THE AUTOMOTIVE AND AEROSPACE INDUSTRIES, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF CVD DEPOSITED MATERIALS

Measurement Considerations

TABLE 93 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE INDUSTRIAL MARKETS, THROUGH 2013 ($ MILLIONS)

FIGURE 18 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD FOR THE INDUSTRIAL MARKET, 2007-2013 ($ MILLIONS)

FORECAST—VALUE OF ION IMPLANTATION MATERIALS

TABLE 94 GLOBAL VALUE OF MATERIALS USED FOR IONRELATED INDUSTRIAL APPLICATIONS, THROUGH 2013 ($ THOUSANDS)

FIGURE 19 GLOBAL VALUE OF MATERIALS USED FOR IONRELATED INDUSTRIAL APPLICATIONS, 2007-2013 ($ THOUSANDS)

FORECAST—VALUE OF THIN FILM EQUIPMENT SERVICES

CVD Services

Ion Services

TABLE 95 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)

Ion Services (Continued)

LIST OF TABLES

SUMMARY TABLE VALUE OF GLOBAL CVD, ION IMPLANTATION,

AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)

TABLE 1 STATUS OF MAJOR DEPOSITION STUDIES BY BCC

RESEARCH

TABLE 2 KEY THIN FILM TECHNOLOGIES INCLUDED

TABLE 3 KEY APPLICATIONS OF THIN FILM TECHNOLOGIES BY

MARKET

TABLE 4 TYPICAL MATERIALS AND THEIR APPLICATIONS

TABLE 5 KEY COMPANIES IN THE CVD, ION IMPLANTATION, AND

EPITAXY BUSINESS

TABLE 6 ESTMATED GLOBAL MANUFACTURING OFCVD, ION

IMPLANTATION, AND EPITAXY EQUIPMENT (%)

TABLE 7 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND

EPITAXY CONSUMPTION, 2007-2013 (%)

TABLE 8 MARKET SHARES OF GLOBAL CVD, ION IMPLANTATION,

AND EPITAXY MANUFACTURERS, 2007

TABLE 9 KEY TECHNICAL ADVANTAGES OF THE CVD PROCESS

TABLE 10 KEY TECHNICAL ADVANTAGES OF MOCVD

TABLE 11 MAJOR ADVANTAGES OF THE APCVD PROCESS

TABLE 12 KEY ADVANTAGES OF PLASMA-ENHANCED CVD

TABLE 13 MAJOR TECHNICAL ADVANTAGES OF HDP-CVD

TABLE 14 KEY TECHNICAL ADVANTAGES OF TEOS/OZONE

CHEMISTRY

TABLE 15 TECHNICAL ADVANTAGES OF CLUSTER TOOLS

TABLE 16 KEY TECHNICAL ADVANTAGES OF ION IMPLANTATION

TABLE 17 KEY ADVANTAGES OF BEAMLINE IMPLANTATION

TABLE 18 KEY ADVANTAGES OF PIII

TABLE 19 KEY TECHNICAL ADVANTAGES OF IBAD/PIIID

TABLE 20 MAJOR TECHNICAL ADVANTAGES OF MBE

TABLE 21 DEVELOPMENTS THAT COULD EXPAND THE USE OF ION

IMPLANTATION AND EPITAXY

TABLE 22 THIN FILM PRODUCT PATENTS BY TECHICAL TOPIC,

2005-2007

TABLE 23 CVD, ION IMPLANTATION, AND EPITAXY-RELATED

PATENTS BY REGION, 2005-2007

TABLE 24 ASSIGNEES WITH THREE OR MORE PATENTS

TABLE 25 BASIC PRODUCTS USING CVD, ION IMPLANTATION, AND

EPITAXY PRODUCTS

TABLE 26 INTEGRATED CIRCUIT CHARACTERISTICS

TABLE 27 GLOBAL DEMAND FOR KEY MICROELECTRONIC

PRODUCTS BY TYPE, THROUGH 2007 ($ BILLIONS)

TABLE 28 KEY ADVANTAGES OF STANDARDS

TABLE 29 CHALLENGES FOR THE SIA

TABLE 30 ECONOMIC IMPACT ON CHIP INDUSTRY, 2008

TABLE 31 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD,

ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS

INDUSTRY (%)

TABLE 32 BASIC/EMERGING CVD SEMICONDUCTOR APPLICATIONS

TABLE 33 CHANGING APPLICATIONS OF CVD FOR

SEMICONDUCTORS

TABLE 34 ADVANTAGES OF CVD IN MAKING CARBON NANOTUBES

TABLE 35 SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION

TABLE 36 DOPANT SPECIES USED IN CMOS IMPLANTS

TABLE 37 COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED

BY MBE

TABLE 38 MAJOR MATERIALS DEPOSITED BY CVD IN THE

FABRICATION OF SEMICONDUCTORS

TABLE 39 KEY MATERIALS USED FOR ION IMPLANTATION IN

SEMICONDUCTOR FABRICATION

TABLE 40 TYPICAL MATERIALS USED IN MBE OPERATIONS

TABLE 41 GLOBAL GROWTH TREND FOR SEMICONDUCTORS AND

THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND

PERCENTAGE RATIO)

TABLE 42 OVERVIEW OF OTHER MICROELECTRONIC APPLICATIONS

FOR THIN FILM EQUIPMENT

TABLE 43 FORECAST ASSUMPTIONS: THIN FILM GROWTH IN THE

MICROELECTRONICS INDUSTRY

TABLE 44 PROJECTED GLOBAL GROWTH TREND FOR CVD, ION

IMPLANTATION, AND EPITAXY THIN FILM TECHNOLOGIES,

THROUGH 2013 (VALUE AND PERCENTAGE RATIO)

TABLE 45 VALUE OF GLOBAL CVD EQEUIPMENT SHIPMENTS FOR

THE MICROELECTRONICS INDUSTRY, THROUGH 2013

($ MILLIONS)

TABLE 46 FORECAST—VALUE OF GLOBAL IMPLANTATION

EQUIPMENT FOR THE MICROELECTRONICS MARKET, THROUGH

2013 ($ MILLIONS)

TABLE 47 FORECAST—GLOBAL VALUE OF MBE SHIPMENTS FOR

MICROELECTRONIC APPLICATIONS, THROUGH 2013 ($ MILLIONS)

TABLE 48 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN

THE MICROELECTRONICS INDUSTRY, THROUGH 2013

($ MILLIONS)

TABLE 49 GLOBAL VALUE OF MATERIALS USED FOR

IMPLANTATION IN THE MICROELECTRONICS MARKET,

THROUGH 2013 ($ THOUSANDS)

TABLE 50 GLOBAL VALUE OF MATERIALS USED FOR MBE IN THE

MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)

TABLE 51 VALUE OF GLOBAL CVD, ION IMPLANTATION, AND

EPITAXY SERVICES IN THE MICROELECTRONICS INDUSTRY,

THROUGH 2013 ($ MILLIONS)

TABLE 52 SUMMARY OF GLOBAL CVD, ION IMPLANTATION, AND

EPITAXY SHIPMENTS, MATERIALS AND SERVICES FOR

MICROELECTRONICS, THROUGH 2013 ($ MILLIONS)

TABLE 53 BASIC TYPES OF MEDICAL DEVICES

TABLE 54 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND

SUPPLIES BY REGION, 2007-2013 (%)

TABLE 55 POSITIVE ECONOMIC FACTORS FOR THE MEDICAL

DEVICE INDUSTRY

TABLE 56 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD

AND ION IMPLANTATION IN THE MEDICAL INDUSTRY (%)

TABLE 57 OVERVIEW OF CVD APPLICATIONS IN THE MEDICAL

INDUSTRY

TABLE 58 MAJOR MEDICAL APPLICATIONS OF ION IMPLANTATION

IN THE MEDICAL INDUSTRY

TABLE 59 KEY MATERIALS DEPOSITED BY CVD FOR MEDICAL

APPLICATIONS

TABLE 60 KEY MATERIALS USE FOR ION IMPLANTATION AND IBAD

IN THE MEDICAL MARKET

TABLE 61 GLOBAL GROWTH TREND FOR MEDICAL EQUIPMENT AND

THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND

PERCENTAGE RATIOS)

TABLE 62 FORECAST ASUMPTIONS—THIN FILM GROWTH IN THE

MEDICAL PRODUCTS INDUSTRY

TABLE 63 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION

TECHNOLOGIES IN MEDICAL, THROUGH 2013 (VALUE AND

PERCENTAGE RATIO)

TABLE 64 VALUE OF GLOBAL CVD SHIPMENTS FOR THE MEDICAL

EQUIPMENT MARKET, THROUGH 2013 ($ MILLIONS)

TABLE 65 FORECAST—VALUE OF GLOBAL ION IMPLANTATION

EQUIPMENT SHIPMENTS FOR THE MEDICAL SUPPLY BUSINESS,

THROUGH 2013 ($ MILLONS)

TABLE 66 GLOBAL VALUE OF CVD-DEPOSITED MATERIALS IN THE

MEDICAL SUPPLY INDUSTRY, THROUGH 2013 ($ MILLIONS)

TABLE 67 GLOBAL VALUE OF MATERIALS USED FOR ION

IMPLANTATION IN THE MEDICAL SUPPLY INDUSTRY

($ THOUSANDS)

TABLE 68 VALUE OF GLOBAL CVD AND ION IMPLANTATION

SERVICES IN THE MEDICAL MARKET, THROUGH 2013

($ MILLIONS)

TABLE 69 BASIC TYPES OF CUTTING TOOLS

TABLE 70 GLOBAL CUTTING TOOL MARKET BY REGION, 2007-2013

(%)

TABLE 71 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD IN

THE CUTTING TOOL INDUSTRY (%)

TABLE 72 MAJOR CVD CUTTING TOOL APPLICATIONS

TABLE 73 KEY MATERIALS DEPOSITED BY CVD IN THE CUTTING

TOOL INDUSTRY

TABLE 74 GLOBAL GROWTH TREND FOR THE CUTTING TOOL

INDUSTRY AND CVD EQUIPMENT, THROUGH 2007 (VALUE AND

PERCENTAGE RATIO)

TABLE 75 FORECAST ASSUMPTIONS FOR CVD GROWTH IN CUTTING

TOOLS

TABLE 76 PROJECTED GLOBAL GROWTH TREND OF CVD FOR THE

CUTTING TOOL INDUSTRY, THROUGH 2013

TABLE 77 FORECAST—VALUE OF CVD EQUIPMENT FOR THE

CUTTING TOOL MARKET, THROUGH 2013 ($ MILLIONS)

TABLE 78 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN

THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)

TABLE 79 GLOBAL VALUE OF CVD COATING SERVICES IN THE

CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)

TABLE 80 BASIC TYPES OF INDUSTRIAL PRODUCTS

TABLE 81 CLOSING GAP BETWEEN U.S AND ASIAN AUTOMAKERS

(% OF MARKET)

TABLE 82 EXTERNAL FACTORS IMPACTING THE AUTO INDUSTRY

TABLE 83 U.S. AEROSPACE SALES BY PRODUCT, 2001-2006

($ BILLIONS)

TABLE 84 IMPACT OF MAJOR FACTORS ON CVD AND ION

IMPLANTATION GROWTH IN THE INDUSTRIAL

MARKET (%)

TABLE 85 MAJOR APPLICATIONS FOR CVD AND ION

IMPLANTATION IN THE INDUSTRIAL MARKET

TABLE 86 KEY MATERIALS DEPOSITED BY CVD FOR INDUSTRIAL

APPLICATIONS

TABLE 87 KEY MATERIALS USED FOR ION IMPLANTATION IN THE

INDUSTRIAL MARKET

TABLE 88 GLOBAL GROWTH TREND FOR INDUSTRIAL PRODUCTS

AND THIN FIILM EQUIPMENT, THROUGH 2007 (VALUE AND

PERCENTAGE RATIOS)

TABLE 89 FORECAST ASSUMPTIONS—THIN FILM GROWTH IN THE

INDUSTRIAL MARKET

TABLE 90 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION

THIN FILM TECHNOLOGIES IN THE INDUSTRIAL SECTORS,

THROUGH 2013 (VALUE AND PERCENTAGE RATIO)

TABLE 91 VALUE OF GLOBAL CVD SHIPMENTS FOR THE

INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)

TABLE 92 FORECAST—VALUE OF ION IMPLANTATION EQUIPMENT

SHIPPED FOR THE INDUSTRIAL SEGMENT, THROUGH 2013

($ MILLIONS)

TABLE 93 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN

THE INDUSTRIAL MARKETS, THROUGH 2013 ($ MILLIONS)

TABLE 94 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED

INDUSTRIAL APPLICATIONS, THROUGH 2013 ($ THOUSANDS)

TABLE 95 VALUE OF GLOBAL CVD AND ION IMPLANTATION

SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2013

($ MILLIONS)

LIST OF FIGURES

SUMMARY FIGURE GLOBAL VALUE OF THE CVD, ION

IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013

($ MILLIONS)

FIGURE 1 ESTIMATED GLOBAL CVD, ION IMPLANTATION, AND

EPITAXY MANUFACTURING, 2007-2013 (%)

FIGURE 2 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND

EPITAXY CONSUMPTION, 2007-2013 (%)

FIGURE 3 GLOBAL CVD SHIPMENTS FOR MICROELECTRONICS

($ MILLIONS)

FIGURE 4 GLOBAL SHIPMENT VALUE OF ION IMPLANTATION

EQUIPMENT FOR MICROELECTRONICS ($ MILLIONS)

FIGURE 5 GLOBAL VALUE OF MBE EQUIPMENT FOR

MICROELECTRONICS, 2007-2013 ($ MILLIONS)

FIGURE 6 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD, 2007-

2013 ($ MILLIONS)

FIGURE 7 GLOBAL VALUE OF MATERIALS IMPLANTED IN THE

MICROELECTRONICS MARKET, 2007-2013 ($ THOUSANDS)

FIGURE 8 GLOBAL VALUE OF MATERIALS CONSUMED BY MBE BY

THE MICROELECTRONICS INDUSTRY, 2007-2013 ($ MILLIONS)

FIGURE 9 GLOBAL SHIPMENTS OF CVD EQUIPMENT FOR THE

MEDICAL SUPPLY BUSINESS, 2007-2013 ($ MILLIONS)

FIGURE 10 GLOBAL VALUE OF ION IMPLANTATION EQUIPMENT

SHIPPED FOR MEDICAL PRODUCTS, 2007-2013 ($ MILLIONS)

FIGURE 11 GLOBAL VALUE OF THIN FILM EQUIPMENT FOR THE

MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLIONS)

FIGURE 12 VALUE OF MATERIALS USED FOR ION IMPLANTATION

APPLICATIONS, 2007-2013 ($ THOUSANDS)

FIGURE 13 GLOBAL VALUE OF CVD EQUIPMENT FOR THE CUTTING

TOOL INDUSTRY, 2007-2013 ($ MILLIONS)

FIGURE 14 GLOBAL VALUE OF MATERIALS FOR CVD IN THE

CUTTING TOOL INDUSTRY ($ MILLIONS)

FIGURE 15 GLOBAL VALUE OF AUTOMOTIVE CVD SYSTEMS IN THE

AUTOMOTIVE MARKET, 2007-2013 ($ MILLIONS)

FIGURE 16 GLOBAL VALUE OF CVD SYSTEMS IN THE AEROSPACE

MARKET, THROUGH 2013 ($ MILLIONS)

FIGURE 17 GLOBAL VALUE OF ION-RELATED EQUIPMENT IN THE

AUTOMOTIVE AND AEROSPACE INDUSTRIES, 2007-2013

($ MILLIONS)

FIGURE 18 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD FOR

THE INDUSTRIAL MARKET, 2007-2013 ($ MILLIONS)

FIGURE 19 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED

INDUSTRIAL APPLICATIONS, 2007-2013 ($ THOUSANDS)

Abstract

• The global market for chemical vapor deposition (CVD) will increase from $7.0 billion in 2007 to an estimated $7.3 billion by the end of 2008. It should reach $11.8 billion by 2013, a compound annual growth rate (CAGR) of 10.2%.
• The ion implantation segment will grow at a CAGR of 10.1% between 2008 and 2013 and be worth $4.4 billion by the end of the study period.

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