Global MEMS/Microsystems Markets and Opportunities

Published by: Yole Developpement

Published: Jul. 1, 2007 - 62 Pages

Table of Contents

EXECUTIVE SUMMARY

Market

Applications

Materials and Manufacturing Technology

1 INTRODUCTION

1.1 Methodology

1.2 Definition of Terms

2 MEMS MARKET OVERVIEW

2.1 MEMS Device Market and Forecast

2.2 MEMS Equipment Market and Forecast

2.3 MEMS Material Market and Forecast

3 MEMS APPLICATIONS— TRENDS AND OPPORTUNITIES

3.1 Inkjet Heads

3.1.1 Overview

3.1.2 Market Outlook

3.1.3 Key Players

3.1.4 Application and Technology Trends

3.1.5 Manufacturing Trends

3.2 Pressure Sensors

3.2.1 Overview

3.2.2 Market Outlook

3.2.3 Key Players

3.2.4 Application and Technology Trends

3.2.5 Manufacturing Trends

3.3 Silicon Microphones

3.3.1 Overview

3.3.2 Market Outlook

3.3.3 Key Players

3.3.4 Application and Technology Trends

3.3.5 Manufacturing Trends

3.4 Accelerometers

3.4.1 Overview

3.4.2 Market Outlook

3.4.3 Key Players

3.4.4 Application and Technology Trends

3.4.5 Manufacturing Trends

3.5 Gyroscopes

3.5.1 Overview

3.5.2 Market Outlook

3.5.3 Key Players

3.5.4 Application and Technology Trends

3.5.5 Manufacturing Trends

3.6 Digital Micromirror Display and Other MOEMS

3.6.1 Overview

3.6.2 Market Outlook

3.6.3 Key Players

3.6.5 Manufacturing Trends

3.7 Microfluidics

3.7.1 Overview

3.7.2 Market Outlook

3.7.3 Key Players

3.7.4 Application and Technology Trends

3.7.5 Manufacturing Trends

3.8 RF MEMS

3.8.1 Overview

3.8.2 Market Outlook

3.8.3 Key Players

3.8.4 Application and Technology Trends

3.8.5 Manufacturing Trends

3.9 Emerging MEMS

3.9.1 Overview

3.9.2 Energy Harvesting Devices

3.9.3 Multi-Frequency Oscillator

3.9.4 Silicon-Based Micro Motor

3.9.5 Auto Focus and Micro Zoom

4 MATERIALS AND PROCESS TECHNOLOGIES—TRENDS AND OPPORTUNITIES

4.1 CMOS-MEMS Integration

4.2 Substrates

4.3 Lithography, Photoresists and Ancillaries

4.4 Wafer Bonding

4.5 Deposition and Etch

4.6 Anti-Stiction

4.7 Chemical Mechanical Planarization (CMP)

4.8 Packaging

5 APPENDICES

5.1 MEMS Equipment Suppliers by Segment

5.2 MEMS Materials Suppliers by Segmen

5.3 Companies Interviewed

5.4 List of Acronyms and Abbreviations

5.5 List of Figures and Tables

List of Figures

Figure 2.1 The MEMS Supply Chain

Figure 2.2 Top 30 MEMS Sales/Worldwide MEMS Sales 2003-2006

Figure 3.1 Global Inkjet Head Market Forecast

Figure 3.2 2006 Global Inkjet Head Market Share

Figure 3.3 Global Pressure Sensor Market Forecast

Figure 3.4 2006 Global Pressure Sensors Market Share

Figure 3.5 Global MEMS Silicon Microphone Market Forecast

Figure 3.6 Global Accelerometer Market Forecast

Figure 3.7 Global Gyroscope Market Forecast

Figure 3.8 Automotive Electronic Stability Functions and Components

Figure 3.9 Global MOEMS Market Forecast

Figure 3.10 Products Which Require A Compact Light Engine

Figure 3.11 Light Engine Market Value

Figure 3.12 Global Microfluidics Market Forecast

Figure 3.13 Global RF MEMS Market Forecast

Figure 3.14 Perpetuum Energy Harvester

Figure 3.15 Typical Micro Fuel Cell Design

Figure 3.16 SEM of MEMS First™WaferSiTime Products

Figure 3.17 Liquid Lens in Operation

Figure 4.1 Five Levels of Monolithic Integration

Figure 4.2 MEMS in the Middle

Figure 4.3 Beside IC or Pre-CMOS Process

Figure 4.4 Above-IC Approach

Figure 4.5 Integrated MEMS Market Forecast

Figure 4.6 MEMS Substrate Market by Type

Figure 4.7 Thick SOI Wafers for MEMS Devices

Figure 4.8 Silicon Substrate Market by Diameter

Figure 4.9 Photoresist and Ancillary Market Forecast

Figure 4.10 Gases and Chemicals Market Forecast

Figure 4.11 How Stiction Occurs

Figure 4.12 Examples of Stiction on MEMS Devices

Figure 4.13 Use of Supercritical CO2 and Self-Assembling Monolayer in the Device Process Flow

Figure 4.14 SAM Materials for Anti-Stiction

Figure 4.15 Packaging Coating Market Forecast

Figure 4.16 SU-8 Applications

List of Tables

Table 2.1 Top 30 MEMS Device Manufacturers

Table 2.2 Top 12 MEMS Foundries

Table 2.3 MEMS Device Markets and Forecasts by Application

Table 2.4 MEMS Equipment Markets and Forecasts

Table 2.5 MEMS Material Markets and Forecasts

Table 3.1 Comparison of Nozzle Manufacturing Technologies

Table 3.2 Accelerometer Forecast by Application

Table 3.3 Gyroscope Forecast by Application

Table 3.4 MOEMS Device Function and Applications

Table 3.5 Microfluidics Food Chain

Table 3.6 Current Microfluidics Markets

Table 3.7 Microfluidic Application Drivers 33-

Table 3.8 Microfluidic Manufacturing Technologies

Table 3.9 Emerging MEMS Products by Company

Table 3.10 Global Emerging MEMS Market Forecast

Table 3.11 Comparison of Competing AF/MZ Technologies

Table 4.1 MEMS Substrate Market Forecast

Table 4.2 Substrates by MEMS Device Type

Table 4.3 Silicon Wafer Consumption by Diameter (in Thousands of Units)

Table 4.4 Etching and Release of Sacrificial Layers in MEMS Devices

Table 4.5 MEMS CMP Versus IC CMP

Table 4.6 MEMS Packaging Requirements and Trends

Abstract

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