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MEMS MICROPHONES: A Global TECHNOLOGY, Industry and Market Analysis

Published by: Innovative Research and Products (iRAP), Inc.

Published: Jul. 1, 2007 - 100 Pages


Table of Contents


INTRODUCTION

STUDY GOALS AND OBJECTIVES

REASONS FOR DOING THE STUDY

CONTRIBUTIONS OF THE STUDY

SCOPE AND FORMAT

METHODOLOGY

INFORMATION SOURCES

AUDIENCES FOR THE STUDY

AUTHOR’S CREDENTIALS

EXECUTIVE SUMMARY

SUMMARY TABLE A GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR MEMS MICROPHONES, 2006 AND 2011

SUMMARY FIGURE A GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATIONS IN 2006 AND 2011

SUMMARY TABLE B NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES, 2006 AND 2011

SUMMARY FIGURE B NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES IN 2006 and 2011

INDUSTRY OVERVIEW

BACKGROUND OF MEMS MICROPHONES

MEMS MICROPHONE CHIP

MEMS ADVANTAGE

MEMES MICROPHONE APPLICATIONS AND MARKETS

Mobile Phones, PDAs, Digicams, Camcorders

TABLE 1 FORECAST FOR MEMS MICROPHONES IN MOBILE PHONES, PDAs, DIGICAMs, CAMCORDERS, 2006-2011

Laptops

TABLE 2 MARKET FOR MEMS MICROPHONES IN LAPTOPS, 2005, 2006 AND 2011

Automotive Hands-Free Communication Systems

TABLE 3 FORECAST FOR MEMS MICROPHONES IN AUTOMOTIVE HANDS-FREE COMMUNIVCATION SYSTEMS

Hearing Aids

TABLE 4 FORECAST FOR MEMS MICROPHONES IN HEARING AIDS 2006-2011

INDUSTRY STRUCTURE

TABLE 5 SPECIFIC FOUNDRIES ASSOCIATED WITH MEMS MICROPHONE MANUFACTURING CAPABILITIES IN 2006

INDUSTRY DYNAMICS AND GLOBAL MARKET

One-Chip CMOS-MEMS Technology for Microphones

FIGURE 1 SINGLE-CHIP DESIGN OF MEMS MICROPHONES

Two-Chip Technology for Microphones

FIGURE 2 TWO-CHIP DESIGN OF MEMS-MICROPHONES

MARKET ACCORDING TO TECHNOLOGIES

TABLE 6 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY THROUGH 2011

FIGURE 3 PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY, 2006 AND 2011

Market According to Applications

TABLE 7 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES NY APPLICATION THROUGH 2011

FIGURE 4 PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION, 2006 AND 2011

TECHNOLOGY OVERVIEW

AUDIO MICROPHONES

CONDENSER MICROPHONES

UNIDIRECTIONAL AND OMNI-DIRECTIONAL microphones

MEMS MICROPHONEs

TABLE 8 FORMULAS USED TO DEFINE AUDIO QUALITY CHARACTERISTICS OF MICROPHONES

FABRICATION OF A MEMBRANE CHIP

TYPES OF MICROPHONES

Capacitive microphones

Piezo-resistive microphones

PIEZOELECTRIC MICROPHONES

OPTICAL MICROPHONES

FET MICROPHONES

TYPICAL FABRICATION PROCESS

FIGURE 5 PROCESSING STEPS FOR CMOS-MEMS MICROHONES

FIGURE 6 LAYOUT OF SERPENTINE MESH DESIGN SHOWING TWO UNIT CELLS IN A MEMS MICROPHONE

TABLE 9 SEQUENCE FOLLOWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES

Dry Etching in MEMS Microphones

Wet Etching in MEMS Microphones

TABLE 10 EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES

MEMS AND INTEGRATED CIRCUIT FABRICATION PROCESSES COMPARED

Packaging

TABLE 11 EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES

Low cost MEMS microphone manufacturing on the principle of IC chip Manufacturing

TABLE 12 TECHNOLOGY LISTING OF MANUFACTURERS OF SURFACE MOUNTABLE, CHIP-SIZE PACKAGE MEMS MICROPHONES

TABLE 13 TYPICAL SIZES OF COMMERCIALLY AVAILABLE MEMS MICROPHONES IN 2006

Description of Electronic Chip integrated in MEMS Microphones

TABLE 14 KEY TERMINOLOGIES USED TO DEFINE TYPES OF ELECTRONIC CIRCUITS INTEGRATED IN MEMS MICROPHONES

MEMS MICROPHONE CONSTRUCTION

Diaphragm

Air Gap

Characteristics of MEMS Microphones

Current Materials used in MEMS Microphones

Fabrication Techniques

Surface Activity

INDUSTRY STRUCTURE AND MARKETS

COMPETITIVE INNOVATION TRENDS

TABLE 15 COMPANY PRODUCT REFERENCE FOR MEMS MICROPHONES

TABLE 16 PERCENTAGE SHARE OF WORLD MARKET OF TOP FIVE COMPANIES MANURFACTURING MEMS MICROPHONES IN 2006

PARTNERSHIP AND CONSOLIDATION

TABLE 17 ACQUISITION AND COLLABORATIONS AMONG MANUFACTURERS OF MEMS MICROPHONES FROM 2000 - ‘06

REGIONAL MARKET

TABLE 18 SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY REGION THROUGH 2011

FIGURE 7 REGIONAL PERCENTAGES OF MARKET SHARE FOR MEMS MICROPHONES IN 2006 AND 2011

PATENTS AND PATENT ANALYSIS

LIST OF PATENTS

SILICON-BASED TRANSDUCER FOR USE IN HEARING INSTRUMENTS AND LISTENING DEVICES

MEMS BASED ACOUSTIC ARRAY

SILICON MICROPHONE

HIGH-ORDER DIRECTIONAL MICROPHONE DIAPHRAGM

ULTRATHIN FORM FACTOR MEMS MICROPHONES AND MICROSPEAKERS

Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone

SMT-TYPE STRUCTURE OF THE SILICON-BASED ELECTRET CONDENSER MICROPHONE

METHOD OF PROVIDING A HYDROPHOBIC LAYER AND A CONDENSER MICROPHONE HAVING SUCH A LAYER

PROCESS OF MAKING AN ALL-SILICON MICROPHONE

METHOD FOR PRODUCING A FILLED RECESS IN A MATERIAL LAYER, AND AN INTEGRATED CIRCUIT CONFIGURATION PRODUCED BY THE METHOD

HIGH PERFORMANCE SILICON CONDENSER MICROPHONE WITH PERFORATED SINGLE-CRYSTAL SILICON BACKPLATE

IMPLANTABLE MICROPHONE HAVING IMPROVED SENSITIVITY AND FREQUENCY RESPONSE

METHOD OF MANUFACTURING A SEMICONDUCTOR COMPONENT HAVING A FIXED ELECTRODE BETWEEN TWO FLEXIBLE DIAPHRAGMS

IMPLANTABLE MICROPHONE HAVING IMPROVED SENSITIVITY AND FREQUENCY RESPONSE

PATENT ANALYSIS ACCORDING TO COMPANIES

TABLE 19 NUMBER OF US PATENTS GRANTED TO COMPANIES MANUFACTURING MEMS MICROPHONES FROM 2002 THROUGH 2006 (UP TO DEC 31)

FIGURE 8 ILLUSTRATIONS OF US PATENTS ISSUED TO COMPANIES IN MEMS MICROPHONES FROM JANUARY 2002 AND DECEMBER 2006

PATENT ANALYSIS ACCORDING TO REGIONS

TABLE 20 NUMBER OF US PATENTS GRANTED BY ASSIGNED COUNTRY/REGION FOR MEMS MICROPHONES FROM JAN. 2002 to DEC. 2006

FIGURE 9 US PATENTS GRANTED FOR MEMS MICROPHONES BY REGION FROM 2002 Through 2006

COMPANY PROFILES

AKUSTICA, INC.

CARNEGIE MELLON UNIVERSITY

DELEPHI TECHNOLOGIES, INC.

INFINEON TECHNOLOGIES AG

INSTITUTE OF MICROELECTRONICS

INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (ITRI)

JL WOLRD

KNOWLES ACOUSTICS

MEMES TECHNOLOGY BHD

MOTOROLA, INC.

NATIONAL SEMICONDUCTOR

SAMSUNG ELECTRONICS CO. LTD.

SONION A/S

SYMPHONIX DEVICES, INC./MED-EL

THE RESEARCH FOUNDATION OF THE STATE UNIVERSITY OF NEW YORK

UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.




LIST OF TABLES




SUMMARY TABLE A: GLOBAL MARKET SIZE/PERCENTAGE SHARE FOR MEMS MICROPHONES, 2006 AND 2011

SUMMARY TABLE B: NORTH AMERICAN AND GLOBAL MARKETS FOR MEMS MICROPHONES, 2006 AND 2011

TABLE 1: FORECAST FOR MEMS MICROPHONES IN MOBILE PHONES, PDAS, DIGICAMS, CAMCORDERS, 2006-2011

TABLE 2: MARKET FOR MEMS MICROPHONES IN LAPTOPS, 2005, 2006 AND 2011

TABLE 3: FORECAST FOR MEMS MICROPHONES IN AUTOMOTIVE HANDS-FREE COMMUNICATION SYSTEMS

TABLE 4: FORECAST OF MEMS MICROPHONES IN HEARING AIDS 2006-2011

TABLE 5: SPECIFIC FOUNDRIES ASSOCIATED WITH MEMS MICROPHONE MANUFACTURING CAPABILITIES IN 2006

TABLE 6: SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY THROUGH 2011

TABLE 7: SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION THROUGH 2011

TABLE 8: FORMULAS USED TO DEFINE AUDIO QUALITY /CHARACTERSTICS OF MICROPHONES

TABLE 9: SEQUENCES FOLLWED IN TYPICAL EIGHT FABRICATION PROCESSES OF MEMS MICROPHONES

TABLE 10: EXPLANATION OF KEY TERMINOLOGIES USED IN MANUFACTURING OF MEMS MICROPHONES

TABLE 11: EXPLANATION OF KEY TERMINOLOGIES USED IN PACKAGING OF MEMS MICROPHONES

TABLE 12: TECHNOLOGY LISTING OF MANUFACTURERS OF SURFACE MOUNTABLE, CHIP-SIZE PACKAGE MEMS MICROPHONES

TABLE 13: TYPICAL SIZES OF COMMERCIALLY AVAILABLE MEMS MICROPHONES IN 2006

TABLE 14: KEY TERMINOLOGIES USED TO DEFINE TYPES OF ELECTRONIC CIRCUITS INTEGRATED IN MEMS MICROPHONES

TABLE 15: COMPANY PRODUCT REFERENCE FOR MEMS MICROPHONES

TABLE 16: PERCENTAGE SHARE OF WORLD MARKET OF TOP FIVE COMPANIES MANUFACTURING MEMS MICROPHONES IN 2006

TABLE 17: ACQUISITIONS AND COLLABORATIONS AMONG MANUFACTURERS OF MEMS MICROPHONES FROM 2000 TO 2006

TABLE 18: SUMMARY OF GLOBAL MARKET FOR MEMS MICROPHONES BY REGION THROUGH 2011

TABLE 19: NUMBER OF U.S. PATENTS GRANTED TO COMPANIES MANUFACTURING MEMS MICROPHONES FROM 2002 THROUGH 2006 (UPTO DEC 31)

TABLE 20: NUMBER OF U.S. PATENTS GRANTED BY ASSIGNED COUNTRY/REGION FOR MEMS MICROPHONES FROM JAN. 2002 TO 2006




LIST OF FIGURES




SUMMARY FIGURE A: GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION IN 2006 AND 2011

SUMMARY FIGURE B: NORTH AMERICAN AND GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION IN 2006 AND 2011

FIGURE 1: SINGLE-CHIP DESIGN OF MEMS MICROPHONES

FIGURE 2: TWO-CHIP DESIGN OF MEMS-MICROPHONES

FIGURE 3: PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY TECHNOLOGY, 2006 AND 2011

FIGURE 4: PERCENTAGE SHARE OF GLOBAL MARKET FOR MEMS MICROPHONES BY APPLICATION, 2006 AND 2011

FIGURE 5: PROCESSING STEPS FOR CMOS-MEMS MICROPHONES

FIGURE 6: LAYOUT OF SERPENTINE MESH DESIGN SHOWING TWO UNIT CELLS IN A MEMS MICROPHONE

FIGURE 7: REGIONAL PERCENTAGES OF MARKET SHARE FOR MEMS MICROPHONES IN 2006 AND 2011

FIGURE 8: ILLUSTRATIONS OF US PATENTS ISSUED TO COMPANIES IN MEMS MICROPHONES FROM JANUARY 2002 AND DECEMBER 2006

FIGURE 9: U.S. PATENTS GRANTED FOR MEMS MICROPHONES BY REGION FROM 2002 THROUGH 2006

Abstract

Silicon microphones are among a broad range of devices known as micro-electromechanical systems (MEMS), an emerging field in which various sensors and mechanical devices are constructed on a single wafer using processes developed for making Integrated Circuits (ICs). The chief advantage of micromachining silicon microphones is cost. Several sensors can be processed on a chip simultaneously and can be integrated with passive and active electronic devices. Silicon micro-machined microphones (also known as silicon microphones or MEMS microphones) have begun to emerge as a competitor technology to the electret condenser microphone (ECM).

MEMS microphones are more compact than traditional microphone systems because they capture sound and convert it to a digital signal on the same chip. When sound waves hit the microphone's membrane, a thin metal mesh in the middle of the chip, it vibrates, producing a voltage that contains information about the analogue sound signal. But since the analogue signal is produced and converted to a digital signal on the same chip, it never has to experience the harsh electromagnetic environment outside the circuit. And, because interference is less of an issue, insulation is not needed. This allows engineers to place the microphone anywhere that a chip can fit, for example, into a laptop in which multiple microphones can even fit in the bezel surrounding a laptop's monitor.

MEMS microphone solutions developed on the CMOS (complimentary metal oxide semiconductors) MEMS platform frees consumer electronic device designers and manufacturers from many of the problems associated with ECMs. CMOS MEMS microphones also integrate an analogue-to-digital converter on the chip, creating a microphone with a robust digital output. Since the majority of portable applications will ultimately convert the analogue output of the microphone to a digital signal for processing, the system architecture can be made completely digital, removing noise-prone analogue signals from the circuit board and simplifying the overall design.

Many of these new “miniature” silicon microphones for consumer and computer communication devices are approximately one-half the size and operate on just one-third the power of conventional microphones.

study goal and objectives

The new iRAP study has focused on MEMS microphones that can be used in mobile phones, digicams, camcorders, laptops, automotive hands-free calling and hearing aids. Production will be low-cost and high-volume. Therefore, the objectives include thorough coverage of the underlying economic issues driving the MEMS microphones business, as well as assessments of new advanced MEMS microphones that are being developed. Another important objective is to provide realistic market data and forecasts for MEMS microphones. This report provides the most thorough and up-to-date assessment.

REASONS FOR DOING THE STUDY

The MEMS microphones market is an attractive, and still growing, multimillion-dollar market characterized by very high production volumes of MEMS microphones that are extremely reliable and low in cost. So far, the development of the MEMS microphone market has been technology-push oriented. The ECM is entrenched, inexpensive ($0.50 or less), and in terms of traditional metrics such as frequency response and sensitivity, it captures sound relatively faithfully.

Micro-machined microphone chips can match and extend the performance of existing devices, for instance, by using sensor arrays. Silicon microphones also offer advantages to the OEM in the form of improved manufacturing methods (reliability, yield, assembly cost) combined with robustness. They also offer additional functionality, such as the ability to incorporate multiple microphones into portable electronic devices for noise suppression and beam forming. Therefore, iRAP felt a need to do a detailed technology update and analysis in this industry.

Contributions of the study

This study segmented markets into four applications for MEMS microphone products. The first application consists of mobile phones, digicams, camcorders; the second is laptops; the third is automotive hands-free calling and the last one is hearing aids. Manufacturers of MEMS microphones expect competition to persist and intensify in the future from a number of different sources. Microphones are facing competition in a new, rapidly evolving and highly competitive sector of the audio communication market. Increased competition could result in reduced prices and gross margins for microphone products and could require increased spending by research and development, sales and marketing and customer support.

This study analyses the competing technologies and provides a realistic market data about the size and growth of the MEMS microphones application segments, competition between companies for market share and a technology overview.

This report provides the most thorough and up-to-date assessment that can be found anywhere on the subject. The study also provides an extensive quantification of the many important facets of market developments in emerging markets for MEMS microphones. This contributes to the determination of what kinds of strategic responses suppliers may adopt in order to compete in these dynamic markets.

SCOPE AND FORMAT

The iRAP study focuses on MEMS microphones’ market size and growth, new developments, including a detailed patent analysis, company profiles and industry trends. Another contribution of this report is to provide a detailed and comprehensive study of the market in North America, Europe, Japan and the rest of the world (ROW) for MEMS microphones and potential future business opportunities. These markets have also been estimated according to types of integration, i.e. single chip vs two-chip; and according to the application segments.

TO WHOM THE STUDY CATERS

The study benefits the existing manufacturers of mobile phones, digicams, camcorders, laptops, automobile hands-free calling devices and hearing aids, who seek to expand revenues and market opportunities through adding new technologies such as MEMS microphones, which are positioned to become a preferred solution over conventional ECM applications.

This study provides a technical overview of the MEMS microphones which find applications in mobile phones, digicams, camcorders, laptops, hand-free calling devices and hearing aids, looking at major technology developments and recent patents. Audiences for this study include directors of technologies, marketing and sales executives, business-unit managers and other decision makers as users and suppliers of MEMS microphones, as well as companies peripheral to this business or competitors such as ECM microphone producers,

REPORT SUMMARY

Four major applications are discussed in this report, which will create most of the market for MEMS microphones over the next five years. These are mobile phones, digicams, camcorders, laptops, hand-free calling devices and hearing aids

Manufacturers of MEMS microphones expect competition to persist and intensify in the future from a number of different sources. Microphones are facing competition in a new, rapidly evolving and highly competitive sector of the audio communication market. Increased competition could result in reduced prices and gross margins for microphone products and could require increased spending by research and development, sales and marketing and customer support.

Micro-machined microphone chips can match and extend the performance of existing devices, for instance, by using sensor arrays. Silicon microphones also offer advantages to the OEM in the form of improved manufacturing methods (reliability, yield, assembly cost) combined with robustness. They also offer additional functionality, such as the ability to incorporate multiple microphones into portable electronic devices for noise suppression and beam forming.

The potential for smaller footprint components and resistance to electromagnetic interference also supports new cell phone designs. Moreover, MEMS microphones meet price points set by electret microphones by leveraging established high-volume silicon manufacturing processes. This combination of size, performance and functionality, and low cost are highly desirable for OEMs and consumers alike.

The range of possible applications of these microphones derives from their important advantages as compared to conventional ECM technologies. Based on silicon MEMS technology, the new microphone achieves the same acoustic and electrical properties as conventional microphones, but is more rugged and exhibits higher heat resistance. These properties offer designers of a wide range of products greater flexibility and new opportunities to integrate microphones.

Major findings of this report are:
  • The MEMS microphones market is an attractive, and still growing, multimillion-dollar market characterized by very high production volumes of MEMS microphones that are extremely reliable and low in cost.
  • In 2006, the global market for MEMS microphones has reached $140 million and will increase to $922 million by 2011 with an annual average growth rate of 45.7%.
  • Mobile phones, digcams and camcorders will have the largest share in 2006 followed by laptops.
  • From 2006 to 2011, the largest growth rate will be for laptops - as much as 72% AAGR from 2006 to 2011.
  • Regionally, North America had about 21.4% of the market in 2006, followed by Europe at 16.4 %, Japan at 14.2%, and the rest of world at 47.8 %.
  • There are less than a dozen players who are sharing the global market in 2006. BY 2011, the number of companies producing MEMS microphones will double.


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