Impact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights)

Published by: Frost & Sullivan

Published: Mar. 31, 2007 - 116 Pages

Table of Contents

1. Executive Summary

1. Scope and Methodology

1. Overview

2. Scope of the Research Service

3. Methodology

2. Key Research Findings

1. Technology Snapshot

2. Key Technologies and Innovations

3. Analyst Insights

2. Micromanufacturing

1. Technology Snapshot

1. Overview of Micromanufacturing

2. Importance of Micromanufacturing

2. Bulk Micromanufacturing

1. Overview of Etching

2. Isotropic and Anisotropic Etching

3. Dry and Wet Etching

3. Surface Micromachining

1. General Description

2. Surface Micromachining Process

4. The LIGA Process

1. General Description

2. Electroplating

3. The SLIGA Process

3. MEMS Technology and Applications Overview

1. MEMS Senors

1. Technology Viewpoint

2. Pressure Sensors

3. Accelerometers

4. Gyroscopes

5. Gas Sensors

6. Proximity/Position Sensors

7. Flow Sensors

8. Humidity; Temperature/Thermal Sensors

9. Mechanical Stress Sensors

10. Acoustic Wave Sensors

2. MEMS Actuators

1. Technology Viewpoint

2. Micromotors

3. Micropumps

4. Microvalves

5. Microturbines

6. Micromirrors

7. MEMS Actuator Types and Lab-on-a-Chip Systems

4. Technology Impact and Adoption Factor Analysis

1. Technology Impact Analysis

1. MEMS versus Conventional Technology

2. Technology Roadmap

3. Technology Features; Benefits; and Trends

2. Technology Adoption Factor Analysis

1. Analysis of Technology Drivers

2. Analysis of Technology Restraints

5. Global Technology Developments

1. Innovations in MEMS Sensors--Global Developments

1. Dissolved Wafer Process for Manufacture of MEMS Pressure Sensors--Integrated Sensing Systems Inc.--USA

2. Nonsilicon-Based Process for MEMS Tactile Sensors--Thailand

3. Vibration Power Harvesting--USA

4. iMEMS and iSensor Technologies--Analog Devices--USA

5. MEMS-Based Capacitive Sensors for RF Communication-- University of Twente--Netherlands

6. Optic Fibers MEMS Pressure sensors--Nanjing Normal University--China

7. MEMS Pressure Sensors for Harsh Environments--Iowa State University--USA

8. Digital Pressure Sensor Technology--Switzerland

9. System-on-Chip for Wireless Sensor Networks--Dust Networks Inc.--USA

10. Passive Wireless Sensors--Georgia Institute of Technology--USA

2. Innovations in MEMS Actuators--Global Developments

1. Integrated System for Rotating Microengines--TEGAM Inc.--USA

2. MEMS Silicon Clocks--SiTime Inc.--USA

3. MEMS-Based Industrial Equipment Monitoring--Germany

4. MEMS Gas Turbine Engine--USA

5. Microchip for MEMS Flow Control System--Microstaq Inc.--USA

6. Combustion Driven Fluidic Actuator--Georgia Institute of Technology--USA

7. Microvision Inc.--USA

8. Digital Microfluidics--University of Washington

9. Micromachined Vibratory Gyroscopes--University of Berkley

6. Innovative Developments in Micromachine Tools and Processes

1. University Research--World

1. 1st Generation Micromilling--Georgia Institute of Technology--USA

2. 3-Axis MesoMill--MIT--USA

3. Industrial Development and Systems Integration Applications--ITRI--Taiwan

4. Microforming--Extrusion of Micropins--Northwestern University--Illinois

2. Corporate Research--USA

1. 4-Axis Micromill--Atometric Inc.

2. Nanowires as Replacements for Lithography--Hewlett Packard

3. 3-Axis Micromill--Micro Machines International Inc.

7. Funding Analysis and Worldwide Innovation Assessment

1. Venture Capital; Public Sector and Company Funding; and SWOT Analysis

1. Venture Capital Funding

2. Public Sector Funding

3. Company Funding and SWOT Analysis

2. Worldwide Innovation Assessment

1. USA and Latin America

2. Canada

3. Europe

4. Asia Pacific

8. Patent Analysis and Key Contacts

1. Patent Analysis

1. Recent Patents

2. Patent Analysis--Worldwide

2. Database of Key Participants

1. Research Contacts

2. Corporate Contacts

9. Decision Support Database

1. Database Tables

1. Global Semiconductor and Semiconductor Equipment Market--World (1999 to 2006)

2. Machine Tool Production--World (1999 to 2006)

3. PCB Sales--World (1999 to 2006)

4. Consumer Electronics Contribution to Electronic Industry--World (1999 to 2006)

5. Control and Instrumentation Contribution to the Electronics Industry--World (1999 to 2006)

Abstract

This Frost & Sullivan research service titled Impact Analysis of MEMS Based Sensors and Actuators on Industrial Automation provides key findings in MEMS-based sensors and actuators, technology analysis of MEMS, and key technology trends that can impact the industrial automation sector.

Technology Overview

Miniaturization of Technologies Paving the Way for MEMS

With micromechatronics superseding the era of mechatronics, miniaturization has revolutionized existing technologies. The advances are dramatic to the extent that they can enable a tiny chip to sense, think, act, and communicate to become a microsystem or a "system-on-chip". The key enabling technology in the microsystems domain is the microelectromechanical system (MEMS), which has been moving toward the creation of sand-sized microsystems. In a microsystems assembly, integrated circuits (ICs) act as the "thinking" tank of the system, while MEMS devices such as sensors can provide active perception and facilitate control. These highly compact machines are energy efficient, faster, and less expensive.

The widespread use of MEMS technology has increasingly optimized the performance, size, and cost of sensing systems. "Key innovations in MEMS-based sensors and actuators are taking place in many associated industrial applications such as heating, ventilation, and air-conditioning (HVAC) applications, industrial safety, processing, and control," cites the analyst of this research service. "The research and development focus is also shifting toward a large array or a network of MEMS sensors rather than just single MEMS devices."

MEMS Technology Can Enable Industrial Automation Achieve Higher Standards

Industrial automation is a prominent business, which is taking strides toward intelligent, distributed, as well as wireless monitoring and control. Companies have started exploring new technologies and opportunities in the field of industrial automation due to increasing demand for variety, custom-built products, and need for product differentiation. This has made it difficult for manufacturers to mass produce components. Subsequently, smaller volumes and batch production involve significant expenditure by the organization.

"Since MEMS technology offers the solution to these challenges, it is likely to play an increasingly vital role in this sector," states the analyst. "The industrial automation arena can now offer the opportunities to MEMS developers and providers to create and provide higher value MEMS-based sensors and actuating devices that could command a higher price compared to MEMS devices used in more price-sensitive, higher-volume applications."

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