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NanopatterningPublished by: BCC Research Published: Jan. 31, 2006 - 145 Pages Table of ContentsINTRODUCTION NANOPATTERNING STUDY BACKGROUND STUDY GOALS AND OBJECTIVES INTENDED AUDIENCE SCOPE AND FORMAT METHODOLOGY AND INFORMATION SOURCES ANALYST CREDENTIALS RELATED BCC, INC. RESEARCH BCC ONLINE SERVICES DISCLAIMER EXECUTIVE SUMMARY Summary Table: GLOBAL FORECAST FOR NANOPATTERNING TOOL, TEMPLATE AND CONSUMABLE SALES BY TECHNOLOGY TYPE, THROUGH 2010 ($ MILLIONS) Summary Figure: GLOBAL FORECAST FOR NANOPATTERNING TOOL, TEMPLATE AND CONSUMABLE SALES BY TECHNOLOGY TYPE, 2004-2010 ($ MILLIONS) OVERVIEW GENERAL DESCRIPTION OF NANOPATTERNING DEFINITIONS RATIONALE HISTORY POTENTIAL NANOPATTERNING APPLICATIONS NANOSENSORS Table 1 GLOBAL FORECAST FOR NANOSENSOR SALES, THROUGH 2010 ($ BILLIONS) Figure 1 GLOBAL FORECAST FOR NANOSENSOR MARKET TRENDS, 2004-2010 ($ BILLIONS) ELECTRONICS Table 2 ITRS TECHNOLOGY NODES (MINIMUM LINE WIDTH/YEAR) Table 3 GLOBAL FORECAST SALES OF MICROLITHOGRAPHY TOOLS BY TYPE, THROUGH 2010 ($ BILLIONS) Figure 2 GLOBAL FORECAST FOR SALES TRENDS OF MICROLITHOGRAPHY TOOLS, 2004-2010 ($ BILLIONS) MICROFLUIDIC DEVICES Table 4 GLOBAL FORECAST FOR MICROFLUIDIC DEVICE SALES, THROUGH 2010 ($ BILLIONS) Figure 3 GLOBAL FORECAST SALES TRENDS IN MICROFLUIDIC DEVICES, 2004-2010 ($ BILLIONS) NANO-OPTICS/ OPTOELECTRONICS Table 5 GLOBAL FORECAST OF NANOPHOTONIC DEVICES SALES, THROUGH 2010 ($ BILLIONS) Figure 4 GLOBAL FORECAST FOR SALES OF NANOPHOTONIC DEVICES, 2004-2010 ($ BILLIONS) ADDITIONAL APPLICATIONS NANOPATTERNING PROCESSES AND TECHNOLOGIES I SUMMARY OVERALL MARKET SIZE AND GROWTH TRENDS Table 6 GLOBAL FORECAST FOR NANOPATTERNING TOOLS AND OTHER SUPPLIES MARKET, THROUGH 2010 ($ MILLIONS) Figure 5 GLOBAL FORECAST FOR NANOPATTERNING TECHNOLOGY MARKET, 2004-2010 ($ MILLIONS) Figure 6 SHARE OF GLOBAL NANOPATTERNING TECHNOLOGY MARKET, 2004 AND 2010 (%) MARKET SEGMENTATION Technology Segments Table 7 NANOPATTERNING TECHNOLOGY SEGMENTS Table 8 GLOBAL FORECAST OF NANOPATTERNING TOOLS, TEMPLATES AND CONSUMABLES BY TECHNOLOGY TYPE, THROUGH 2010 ($ MILLIONS) Figure 7 SHARE OF GLOBAL NANOPATTERNING TECHNOLOGY MARKET, 2004 AND 2010 (%) End-user Segments Table 9 GLOBAL FORECAST OF NANOPATTERNING TOOL, TEMPLATE AND CONSUMABLE SALES BY END-USER SEGMENT, THROUGH 2010 ($ MILLIONS) Figure 8 SHARE OF GLOBAL NANOPATTERNING END-USER MARKET, 2004 AND 2010 (%) NANOIMPRINT LITHOGRAPHY INTRODUCTION Figure 9 NANOIMPRINT LITHOGRAPHY PROCESSES Table 10 GLOBAL FORECAST FOR NIL MARKET, THROUGH 2010 ($ MILLIONS) Figure 10 NIL TECHNOLOGY MARKET SHARES, 2004-2010 (%) HOT EMBOSSING Process Description Figure 11 HOT EMBOSSING LITHOGRAPHY Applications Advantages and Disadvantages Technologies Tools Table 11 HEL TOOL MANUFACTURERS Specialized vs. Multipurpose Tools Full-wafer vs. Step-and-stamp Tools Parallel Plate vs. Air Pressure Template/Wafer Sizes Alignment Accuracy Automation Templates Resists Patent Analysis Figure 12 ANNUAL TRENDS IN NUMBER OF U.S. HOT EMBOSSING LITHOGRAPHY PATENTS ISSUED AND APPLIED FOR Figure 13 U.S. HOT EMBOSSING PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGY (% OF PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Table 12 MAJOR HEL PATENT AND PATENT APPLICATION ASSIGNEES Figure 14 U.S. HOT EMBOSSING PATENTS AND PATENT APPLICATIONS: MAJOR INTELLECTUAL PROPERTY PORTFOLIOS (%) Figure 15 U.S. HOT EMBOSSING PATENTS AND PATENT APPLICATIONS: APPLIED TECHNOLOGIES BY TYPE OF END USE (% OF PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Market Assessment Sales Figure 16 SHARE OF HEL TOOLS, TEMPLATES AND CONSUMABLES SALES, 2004 (%) Tools Masks Resists and Other Consumables Sales by Application Type Figure 17 HEL SALES BY APPLICATION TYPE, 2004 (%) Market Drivers Target Market Size and Growth Trends Table 13 GLOBAL FORECAST FOR HEL TECHNOLOGY TARGET MARKETS, THROUGH 2010 ($ MILLIONS) Figure 18 GLOBAL FORECAST OF HEL TARGET MARKETS, 2004-2010 ($ MILLIONS) Table 14 GLOBAL FORECAST FOR NANOPATTENRING TARGET MARKETS, THROUGH 2010 ($ BILLIONS) Competition and Market Shares Figure 19 SHARE OF HEL TARGET NANOPATTERNING MARKETS, 2004 AND 2010 (%) Market Projections: 2005 to 2010 Table 15 GLOBAL FORECAST FOR HEL TOOLS, TEMPLATES AND CONSUMABLES MARKET, THROUGH 2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 ULTRAVIOLET NANOIMPRINT LITHOGRAPHY Process Description Figure 20 ULTRAVIOLET NANOLITHOGRAPHY Applications Advantages and Disadvantages Technologies Tools Resist Dispensing Mechanism Alignment Capability Throughput Defects Stamps Resists Table 16 COMMON UV-CURABLE ACRYLATE MONOMERS Patent Analysis Figure 21 ANNUAL TRENDS IN NUMBERS OF U.S. UV-NIL PATENTS ISSUED AND APPLIED FOR Figure 22 U.S. UV-NIL PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGY (% OF TOTAL PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Figure 23 U.S. UV-NIL BASIC TECHNOLOGY PATENTS AND PATENT APPLICATIONS BY TYPE (% OF BASIC UV-NIL PATENTS SINCE 1976/PATENT APPLICATIONS PENDING) Table 17 MAJOR UV-NIL PATENT AND PATENT APPLICATION ASSIGNEES Figure 24 U.S. UV-NIL AND PATENT APPLICATIONS: MAJOR INTELLECTUAL PROPERTY PORTFOLIOS (% OF PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Figure 25 U.S. UV-NIL PATENTS AND PATENT APPLICATIONS: APPLIED TECHNOLOGIES BY TYPE OF END USE (% OF PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Market Assessment Sales Figure 26 SALES OF UV-NIL TOOLS, TEMPLATES AND CONSUMABLES, 2004 (%) Tools Masks Resists and Other Consumables Sales by Application Type Figure 27 UV-NIL SALES BY APPLICATION TYPE, 2004 (% OF TOTAL HEL SALES) Market Drivers Shrinking Semiconductor Feature Sizes Sales of All Types of NGL Tools Competitiveness of UV-NIL Technology Trends in Other UV-NIL Markets Table 18 GLOBAL SALES OF SEMICONDUCTORS AND SEMICONDUCTOR EQUIPMENT, 2004 ($ BILLIONS) Market Projections: 2005 to 2010 Table 19 GLOBAL FORECAST FOR UV-NIL TOOLS, TEMPLATES AND CONSUMABLES MARKET, THROUGH 2010 ($ MILLIONS) Semiconductors and Microelectronics Table 20 GLOBAL FORECAST FOR UV-NIL TOOLS FOR SEMICONDUCTOR/ MICROELECTRONICS FABRICATION MARKET, THROUGH 2010 ($ MILLIONS) Data Storage Other Segments Templates, Resists and Other Consumables Long-Range Market Prospects: 2010 to 2015 CONTACT (SOFT) NANOLITHOGRAPHY Process Description Figure 28 CONTACT NANOLITHOGRAPHY Applications Advantages and Disadvantages Technologies Tools Templates Resists and Inks Patent Analysis Figure 29 GLOBAL FORECAST OF U.S. MICROCONTACT PATENTS ISSUED AND APPLIED FOR, 2001-2005 AND PENDING (UNITS) Figure 30 U.S. MICROCONTACT PRINTING PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGY (% OF TOTAL PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS. PENDING) Table 21 MAJOR MICROCONTACT PRINTING PATENT AND PATENT APPLICATION ASSIGNEES Figure 31 U.S. MICROCONTACT PRINTING PATENTS AND PATENT APPLICATIONS: MAJOR INTELLECTUAL PROPERTY PORTFOLIOS (% OF PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Figure 32 U.S. MICROCONTACT PRINTING PATENTS AND PATENT APPLICATIONS: APPLIED TECHNOLOGIES BY TYPE OF END USE (% OF PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Commercial Assessment Sales Figure 33 MCP TOOL, TEMPLATE AND CONSUMABLE SALES, 2004 ($ MILLIONS) Tools Masks Resists and Other Consumables Sales by Application Type Figure 34 MCP SALES BY APPLICATION TYPE, 2004 (% OF TOTAL MCP SALES) Market Drivers Market Size and Growth Trends Figure 35 GLOBAL TRENDS IN MCP TARGET MARKETS, 2004-2010 ($ MILLIONS) Competition and Market Shares Figure 36 MCP NANOPATTERNING TARGET MARKET SHARE, 2004-2010 (%) Market Projections: 2005 to 2010 Table 22 GLOBAL FORECAST FOR MCP TOOLS, TEMPLATES AND CONSUMABLES MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 OTHER NANOIMPRINT TECHNOLOGIES Soft-UV Nanoimprint Process Description Applications Advantages and Disadvantages Technology Tools Templates Resists Market Assessment Sales Market Drivers Projected Market Table 23 GLOBAL FORECAST FOR SOFT UV NANOLITHOGRAPHY TOOLS, TEMPLATES AND CONSUMABLES MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 Combined Nanoimprint and Photolithography (CNP) Process Description Figure 37 COMBINED NANOIMPRINT AND PHOTOLITHOGRAPHY Applications Advantages and Disadvantages Technology Tools Templates Resist Market Assessment Sales Market Drivers Projected Market Long-range Market Prospects: 2010 to 2015 NANOPATTERNING PROCESSES AND TECHNOLOGIES II SCANNING PROBE NANOLITHOGRAPHY Table 24 GLOBAL FORECAST FOR SPL MARKETS, THROUGH 2010 ($ MILLIONS) Figure 38 SPL TECHNOLOGY SHARES, 2004 AND 2010 (%) DIP-PEN NANOLITHOGRAPHY Process Description Figure 39 DIP-PEN LITHOGRAPHY Applications Advantages/Limitations Technology Tools Inks Table 25 DPN INK-SUBSTRATE COMBINATIONS Patent Analysis Figure 40 U.S. DPN-RELATED PATENTS AND PATENT APPLICATIONS (%) Figure 41 DPN APPLIED TECHNOLOGY PATENT APPLICATIONS BY TECHNOLOGY TYPE (%) Figure 42 U.S. DPN-RELATED PATENTS AND PATENT APPLICATIONS BY ASSIGNEE (%) Market Assessment Sales Figure 43 DPN TOOL AND CONSUMABLE SALES, 2004 (%) Figure 44 DPN SALES BY APPLICATION TYPE, 2004 (% OF TOTAL MCP SALES) Market Drivers Market Size and Growth Trends Figure 45 DPN TECHNOLOGY TARGET MARKETS, 2004 AND 2010 (%) Competition and Market Shares Figure 46 DPN SHARE OF NANOPATTERNING TARGET MARKETS, 2004 AND 2010 (%) Market Projections: 2005 to 2010 Table 26 GLOBAL FORECAST FOR DPN TOOL AND CONSUMABLE MARKETS BY APPLICATION, 2004-2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 OTHER SCANNING-PROBE NANOLITHOGRAPHY TECHNOLOGIES Process Description Contact Scanning-probe Lithography Nanoshaving Nanografting Nanopen Reader and Writer Field-enhanced Oxidation Electron Resist Exposure Electrostatic AFM Lithography Applications Advantages and Disadvantages Technology Tools Table 27 SCANNING PROBE MICROSCOPE MANUFACTURERS Atomic Force Microscopes Figure 47 ATOMIC FORCE MICROSCOPE PROBE Scanning Tunneling Microscopes Figure 48 SCANNING TUNNELING MICROSCOPE Resists Patents Figure 49 U.S. SCANNING PROBE NANOLITHOGRAPHY PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGY (% OF TOTAL PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Figure 50 U.S. SCANNING PROBE NANOLITHOGRAPHY PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGY (% OF TOTAL PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Table 28 U.S. NON-DPN SPN APPLIED TECHNOLOGY PATENTS AND PATENT APPLICATIONS BY SEGMENT Table 29 MAJOR NON-DPN SPN PATENT AND PATENT APPLICATION ASSIGNEES Market Assessment Sales Market Drivers SPM Sales Table 30 GLOBAL FORECAST OF SPMS MARKET SALES, THROUGH 2010 ($ MILLIONS) Figure 51 GLOBAL FORECAST OF SPM SALES, 2004-2010 ($ MILLIONS) Market Projections: 2005 to 2010 Table 31 GLOBAL FORECAST OF SPL TOOL AND CONSUMABLE MARKETS, THROUGH 2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 NANOPATTERNING PROCESSES AND TECHNOLOGIES III NANOSTENCIL LITHOGRAPHY PROCESS DESCRIPTION Atomic Force Microscope Method Figure 52 AFM NANOSTENCIL SYSTEM Pulsed Laser Deposition Method APPLICATIONS ADVANTAGES AND DISADVANTAGES TECHNOLOGY Tools Masks PATENTS MARKET ASSESSMENT Long-range Market Prospects: 2010 to 2015 NANOPATTERNING PROCESSES AND TECHNOLOGIES IV OTHER NANOPATTERNING TECHNOLOGIES Table 32 PROJECTED MARKET FOR OTHER NANOPATTERNING TECHNOLOGIES, THROUGH 2010 ($ MILLIONS) SELF-ASSEMBLED NANOSTRUCTURES Process Description Epitaxially Self-assembled Quantum Dots Nanopatterning of Self-assembled Monolayers Using Block Copolymer Lithography Figure 53 BLOCK COPOLYMER LITHOGRAPHY PROCESS Lithographically-induced Self-assembly Figure 54 LITHOGRAPHICALLY-INDUCED SELF-ASSEMBLY Applications Epitaxially-grown Quantum Dots Other Self-assembled Nanostructures Advantages and Disadvantages Technology Tools Mask Self-assembling Materials Patent Analysis Figure 55 U.S. SELF-ASSEMBLY NANOPATTERNING PATENTS AND PATENT APPLICATIONS (%) Table 33 U.S. SELF-ASSEMBLING NANOPATTERNING PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGIES (NUMBER OF PATENTS/PATENT APPLICATIONS) Figure 56 U.S. SELF-ASSEMBLING NANOPATTERNING PATENTS AND PATENT APPLICATIONS: BASIC VS. APPLIED TECHNOLOGIES (BASIC TECHNOLOGY PATENTS/PATENT APPLICATIONS AS A % OF THE TOTAL) Figure 57 U.S. SELF-ASSEMBLY NANOPATTERNING: APPLIED TECHNOLOGY PATENTS AND PATENT APPLICATIONS BY APPLICATION TYPE (%) Table 34 MAJOR SELF-ASSEMBLY NANOPATTERNING PATENT AND PATENT APPLICATION ASSIGNEES Figure 58 U.S. SELF-ASSEMBLY NANOPATTERNING PATENTS AND PATENT APPLICATIONS: MAIN INTELLECTUAL PROPERTY PORTFOLIOS (% OF TOTAL PATENTS ISSUED SINCE 1976/PATENT APPLICATIONS PENDING) Market Assessment Sales Market Drivers Growth of Telecommunications and Computer-related Markets for Quantum Dots Commercial Outlook for Block Copolymer Lithography Commercial Prospects for LISA Market Projections: 2005 to 2010 Table 35 PROJECTED MARKET FOR SELF-ASSEMBLY NANOPATTERNING TECHNOLOGIES, THROUGH 2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 Laser-based Particle Deposition Process Description Figure 59 LASER BASED PARTICLE DEPOSITION PROCESS Applications Advantages and Disadvantages Technologies Materials Patent Analysis Market Assessment Sales Market Drivers Trends in the Nanobiosensor Market LBPD Competitiveness Market Projections: 2005 to 2010 Table 36 PROJECTED LBPD TOOL AND CONSUMABLE MARKETS, THROUGH 2010 ($ MILLIONS) Long-range Market Prospects: 2010 to 2015 Roll-to-roll Manufacturing Process Description Figure 60 ROLL-TO-ROLL MANUFACTURING PROCESS Applications Advantages and Disadvantages Technologies Market Assessment Long-range Market Prospects: 2010 to 2015 Additional Nanopatterning Technologies Sputtering Nanopatterning Magnetic Films by Nitrogen Implantation Electrostatic Nanopatterning INDUSTRY STRUCTURE AND COMPETITION MARKET SHARES NANOIMPRINT LITHOGRAPHY TOOLS Figure 61 IMPRINT LITHOGRAPHY MARKET SHARES, 2002 (% OF TOTAL SALES) SCANNING PROBE LITHOGRAPHY TOOLS Table 37 SCANNING PROBE MICROSCOPE MARKET LEADER SALES, 2003 ($ MILLIONS) Figure 62 SCANNING PROBE MICROSCOPE MARKET SHARES, 2003 (% OF TOTAL SALES BY VALUE) APPENDIX LIST OF ACRONYMS USED VENDOR PROFILES AMO GMBH COVION ORGANIC SEMICONDUCTORS GMBH CYRIUM TECHNOLOGIES, INC. DUPONT PHOTOMASKS, INC. EV GROUP EVIDENT TECHNOLOGIES HEWLETT-PACKARD IBM CORP. IMS CHIPS KOMAG LEICA MICROSYSTEMS AG MICRO RESIST TECHNOLOGY GMBH MOLECULAR IMPRINTS, INC. NANOINK, INC. NANONEX NANOOPTO CORP. OBDUCAT AB OPTOMEC INC. POTOMAC PHOTONICS, INC. QUANTISCRIPT, INC. QUESANT INSTRUMENT CORP. SIGMA-ALDRICH CORP. STMICROELECTRONICS SÜSS MICROTEC AG TOPPAN PRINTING CO., LTD. TRANSFER DEVICES, INC. ULTRADOTS, INC. UNIVERSAL DISPLAY CORP. VEECO INSTRUMENTS, INC. AbstractThe report contains: Technology definitions; An overview of nanopatterning technologies (process equipment, supplies, consumables and software), their stage of development and conditions that must be satisfied to commercialize them; A detailed patent analysis; Applications, such as biosensors, medical diagnostics, MEMS, etc.; A discussion of potential users; Global nanopatterning market trends by technology, product and application segment with forecasts to 2010; Assessment of factors that will influence long-term development; Analysis of the industry's structure (e.g., firm size and financial performance, ownership, market shares).Get Full Details About This Report >> |
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