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Thin-layer Deposition: CVD, Ion Implantation, & EpitaxyBCC ResearchApril 1, 2008 203 Pages - SKU: WA2272825 |
REPORT HIGHLIGHTS
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- INTRODUCTION
- STUDY GOALS AND OBJECTIVES
- REASONS FOR DOING THE STUDY
- INTENDED AUDIENCE
- SCOPE OF REPORT
- METHODOLOGY
- INFORMATION SOURCES
- ANALYST’S CREDENTIALS
- RELATED BCC REPORTS
- BCC ONLINE SERVICES
- DISCLAIMER
- SUMMARY
- SUMMARY TABLE VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)
- SUMMARY FIGURE GLOBAL VALUE OF THE CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)
- OVERVIEW
- THIN FILM DEPOSITION PROCESS STATUS
- TABLE 1 STATUS OF MAJOR DEPOSITION STUDIES BY BCC RESEARCH
- DEPOSITION TECHNOLOGIES COVERED IN THIS REPORT
- TABLE 2 KEY THIN FILM TECHNOLOGIES INCLUDED
- MAJOR APPLICATIONS
- TABLE 3 KEY APPLICATIONS OF THIN FILM TECHNOLOGIES BY MARKET
- CLASSIFICATION OF MATERIALS
- TABLE 4 TYPICAL MATERIALS AND THEIR APPLICATIONS
- INDUSTRY STRUCTURE
- INDUSTRY STRUCTURE
- TABLE 5 KEY COMPANIES IN THE CVD, ION IMPLANTATION, AND EPITAXY BUSINESS
- TABLE 5 (CONTINUED)
- THIN FILM INDUSTRY CHANGES
- TECHNOLOGY CONTINUES TO EXPAND IN CHINA
- MERGER AND ACQUISITION TREND CONTINUES
- GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING
- TABLE 6 ESTMATED GLOBAL MANUFACTURING OFCVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT (%)
- FIGURE 1 ESTIMATED GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING, 2007-2013 (%)
- GLOBAL CONSUMPTION OF CVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT
- TABLE 7 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)
- FIGURE 2 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)
- MARKET SHARES
- TABLE 8 MARKET SHARES OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURERS, 2007
- COMPANY PROFILES
- AIXTRON, AACHEN, GERMANY
- AMEC INC., SHANGHAI, CHINA
- APPLIED MATERIALS, INC., SANTA CLARA, CA
- ASM INTERNATIONAL, THE NETHERLANDS
- CVD EQUIPMENT CORPORATION, RONKOKOMA, NY
- IBIS TECHNOLOGY CORPORATION, DANVERS, MA
- IMPLANT SCIENCES CORPORATION, WAKEFIELD, MA.
- NOVELLUS SYSTEMS, INC., SAN JOSE, CA
- OERLIKON BALZERS, KOLN, GERMANY
- OXFORD INSTRUMENTS, OXON, UNITED KINGDOM
- RIBER COPORATION, BEZONS CEDEX, FRANCE
- RICHTER PRECISION, INC., EAST PETERSBURG, PA
- TOKYO ELECTRON LIMITED, TOKYO, JAPAN
- ULVAC TECHNOLOGIES, INC., METHUEN, MASSACHUSETTS
- VARIAN SEMICONDUCTOREQUIPMENT ASSOCIATES, GLOUCESTER, MA
- VEECO INSTRUMENTS, INC., WOODBURY, NY
- THIN FILM TECHNOLOGY
- CVD TECHNOLOGY
- BASIC THERMAL CVD
- TABLE 9 KEY TECHNICAL ADVANTAGES OF THE CVD PROCESS
- Coating Technology
- METALLO-ORGANIC CVD
- TABLE 10 KEY TECHNICAL ADVANTAGES OF MOCVD
- ATMOSPHERIC PRESSURE CVD
- TABLE 11 MAJOR ADVANTAGES OF THE APCVD PROCESS
- LOW-PRESSURE CVD
- PLASMA-ENHANCED CVD
- TABLE 12 KEY ADVANTAGES OF PLASMA-ENHANCED CVD
- HIGH-DENSITY PLASMA CVD
- TABLE 13 MAJOR TECHNICAL ADVANTAGES OF HDP-CVD
- TEOS Ozone Chemistry
- TABLE 14 KEY TECHNICAL ADVANTAGES OF TEOS/OZONE CHEMISTRY
- DEVELOPMENTS THAT ARE EXPANDING CVD
- CARBON NANOTUBES AND CVD
- CLUSTER TOOLS
- Definition
- Advantages
- TABLE 15 TECHNICAL ADVANTAGES OF CLUSTER TOOLS
- ION IMPLANTATION TECHNOLOGY
- TABLE 16 KEY TECHNICAL ADVANTAGES OF ION IMPLANTATION
- BEAMLINE ION IMPLANTATION
- TABLE 17 KEY ADVANTAGES OF BEAMLINE IMPLANTATION
- PLASMA IMMERSION ION IMPLANTATION (PIII)
- TABLE 18 KEY ADVANTAGES OF PIII
- ION-ASSISTED DEPOSITION
- Ion Beam-Assisted Deposition (IBAD)
- TABLE 19 KEY TECHNICAL ADVANTAGES OF IBAD/PIIID
- EPITAXY
- MOLECULAR BEAM EPITAXY (MBE)
- TABLE 20 MAJOR TECHNICAL ADVANTAGES OF MBE
- Metal Organic Chemical Vapor Deposition (MOCVD)
- DEVELOPMENTS THAT COULD EXPAND ION IMPLANTATION AND EPITAXY
- TABLE 21 DEVELOPMENTS THAT COULD EXPAND THE USE OF ION IMPLANTATION AND EPITAXY
- ANALYSIS OF PATENTS FOR CVD, ION IMPLANTATION, AND EPITAXY
- PATENTS BY TECHNICAL TOPIC
- TABLE 22 THIN FILM PRODUCT PATENTS BY TECHICAL TOPIC, 2005-2007
- PATENTS BY GLOBAL REGION
- TABLE 23 CVD, ION IMPLANTATION, AND EPITAXY-RELATED PATENTS BY REGION, 2005-2007
- PATENTS BY ASSIGNEES
- TABLE 24 ASSIGNEES WITH THREE OR MORE PATENTS
- TABLE 24 (CONTINUED)
- SAMPLE PATENT ABSTRACTS
- CVD Method for Depositing a High-k Dielectric Film
- Fabricating Semiconductor Structures with Epitaxially Grown Source and Drain Structures
- Ion Implantation System with an Interlock Function
- Ion Implantation used in Silicon-in-insulator Wafer Transfer Process
- Fabricating Nitride-based Transistors with a Protective Layer and a Low Damage Recess
- Multicomponent Barrier Layers in Quantum Well Active Regions Enhance Confinement and Speed
- Multicomponent Barrier (Continued)
- CVD, ION IMPLANTATION, AND EPITAXY MARKETS
- INDUSTRY APPROACH
- INDUSTRY COMPETITIVENESS
- MEASUREMENT OBJECTIVES
- CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS MARKET
- CVD, ION IMPLANTATION, AND EPITAXY
- MICROELECTRONICS PRODUCT DEFINITON
- TABLE 25 BASIC PRODUCTS USING CVD, ION IMPLANTATION, AND EPITAXY PRODUCTS
- CHANGING PRODUCT CHARACTERISTICS
- TABLE 26 INTEGRATED CIRCUIT CHARACTERISTICS
- INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN MICROELECTRONICS
- ECONOMIC CONDITIONS IN MICROELETRONICS
- TABLE 27 GLOBAL DEMAND FOR KEY MICROELECTRONIC PRODUCTS BY TYPE, THROUGH 2007 ($ BILLIONS)
- THIN FILM PRODUCT DEVELOPMENT AND STANDARDS
- SEMI
- Impact of Globalization
- Standards
- TABLE 28 KEY ADVANTAGES OF STANDARDS
- SEMATECH
- Importance to Thin Film Equipment
- International Technology Roadmap for Semiconductors (ITRS)
- The Semiconductor Industry Association
- TABLE 29 CHALLENGES FOR THE SIA
- GLOBAL ECONOMIC ENVIRONMENT
- Continued Chip Industry Growth Seen by Many
- TABLE 30 ECONOMIC IMPACT ON CHIP INDUSTRY, 2008
- TECHNOLOGY ADVANCES
- CVD Metal Fill Technology
- Using Epitaxy to Extend CMOS
- MICROELECTRONICS COMPETITIVENSS FACTORS
- Driving Force for CVD, Ion Implantation, and Epitaxy
- Impact of Market Growth Factors
- TABLE 31 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS INDUSTRY (%)
- SEMICONDUCTOR APPLICATIONS FOR CVD
- MICROELECTRONIC MARKET SEGMENTS
- CVD APPLICATIONS
- TABLE 32 BASIC/EMERGING CVD SEMICONDUCTOR APPLICATIONS
- Changes in Applications with Copper
- Dielectric Processing Options
- TABLE 33 CHANGING APPLICATIONS OF CVD FOR SEMICONDUCTORS
- Impact of Larger Wafer Sizes
- New Applications—MEMS Devices and Nanotechnology
- TABLE 34 ADVANTAGES OF CVD IN MAKING CARBON NANOTUBES
- IMPLANTATION APPLICATIONS FOR SEMICONDUCTORS
- TABLE 35 SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION
- Doping of Integrated Circuits
- TABLE 36 DOPANT SPECIES USED IN CMOS IMPLANTS
- Plasma Doping
- Silicon-on-Insulator Technology
- Hydrogen Implantation and Wafer Bonding
- Oxygen Implantation (SIMOX)
- Other Semiconductor Applications
- EPITAXY APPLICATIONS FOR SEMICONDUCTORS
- MOCVD for Silicon Wafers
- MBE Applications
- TABLE 37 COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED BY MBE
- Quantum Well Lasers
- KEY MATERIALS USED IN SEMICONDUCTOR APPLICATIONS
- CVD MATERIALS
- TABLE 38 MAJOR MATERIALS DEPOSITED BY CVD IN THE FABRICATION OF SEMICONDUCTORS
- Dielectrics
- Conductors
- ION IMPLANTATION MATERIALS
- TABLE 39 KEY MATERIALS USED FOR ION IMPLANTATION IN SEMICONDUCTOR FABRICATION
- MBE MATERIALS
- TABLE 40 TYPICAL MATERIALS USED IN MBE OPERATIONS
- SEMICONDUCTOR MARKET DRIVERS AND TRENDS
- THIN FILM EQUIPMENT DEMAND
- CMOS Business Model
- Fluctuating Growth Trends
- TABLE 41 GLOBAL GROWTH TREND FOR SEMICONDUCTORS AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)
- CVD
- ION IMPLANTATION
- MBE
- OTHER MICROELECTRONIC APPLICATIONS
- COMPONENTS
- FLAT-PANEL DISPLAYS
- LIGHT-EMITTING DIODES
- TABLE 42 OVERVIEW OF OTHER MICROELECTRONIC APPLICATIONS FOR THIN FILM EQUIPMENT
- Market Drivers for Other Microelectronic Products
- FORECAST ASSUMPTIONS—CVD, ION IMPLANTATION, AND EPITAXY IN MICROELECTRONICS
- TABLE 43 FORECAST ASSUMPTIONS: THIN FILM GROWTH IN THE MICROELECTRONICS INDUSTRY
- TABLE 43 (CONTINUED)
- TABLE 44 PROJECTED GLOBAL GROWTH TREND FOR CVD, ION IMPLANTATION, AND EPITAXY THIN FILM TECHNOLOGIES, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
- FORECAST—VALUE OF CVD SHIPMENTS
- TABLE 45 VALUE OF GLOBAL CVD EQEUIPMENT SHIPMENTS FOR THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
- FIGURE 3 GLOBAL CVD SHIPMENTS FOR MICROELECTRONICS ($ MILLIONS)
- FORECAST—VALUE OF IMPLANTATION EQUIPMENT SHIPMENTS
- TABLE 46 FORECAST—VALUE OF GLOBAL IMPLANTATION EQUIPMENT FOR THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
- FIGURE 4 GLOBAL SHIPMENT VALUE OF ION IMPLANTATION EQUIPMENT FOR MICROELECTRONICS ($ MILLIONS)
- FORECAST—VALUE OF MBE EQUIPMENT SHIPMENTS
- TABLE 47 FORECAST—GLOBAL VALUE OF MBE SHIPMENTS FOR MICROELECTRONIC APPLICATIONS, THROUGH 2013 ($ MILLIONS)
- FIGURE 5 GLOBAL VALUE OF MBE EQUIPMENT FOR MICROELECTRONICS, 2007-2013 ($ MILLIONS)
- FORECAST-VALUE OF DEPOSITED CVD MATERIALS
- Measurement Considerations
- TABLE 48 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
- FIGURE 6 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF ION IMPLANTATION MATERIALS
- TABLE 49 GLOBAL VALUE OF MATERIALS USED FOR IMPLANTATION IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ THOUSANDS)
- FIGURE 7 GLOBAL VALUE OF MATERIALS IMPLANTED IN THE MICROELECTRONICS MARKET, 2007-2013 ($ THOUSANDS)
- FORECAST—VALUE OF MBE MATERIALS
- TABLE 50 GLOBAL VALUE OF MATERIALS USED FOR MBE IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
- FIGURE 8 GLOBAL VALUE OF MATERIALS CONSUMED BY MBE BY THE MICROELECTRONICS INDUSTRY, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF THIN FILM EQUIPMENT SERVICES
- TABLE 51 VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SERVICES IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
- SUMMARY
- TABLE 52 SUMMARY OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SHIPMENTS, MATERIALS AND SERVICES FOR MICROELECTRONICS, THROUGH 2013 ($ MILLIONS)
- Summary (Continued)
- CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET
- CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET
- MEDICAL PRODUCT DEFINITION
- TABLE 53 BASIC TYPES OF MEDICAL DEVICES
- INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN THE MEDICAL PRODUCT MARKET
- GLOBAL ECONOMICS
- TABLE 54 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND SUPPLIES BY REGION, 2007-2013 (%)
- TABLE 55 POSITIVE ECONOMIC FACTORS FOR THE MEDICAL DEVICE INDUSTRY
- COST ISSUES
- TECHNOLOGY
- MEDICAL MARKET COMPETITIVENESS FACTORS
- Driving Force for CVD and Ion Implantation
- Impact of Market Growth Factors
- TABLE 56 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY (%)
- MEDICAL INDUSTRY APPLICATIONS
- CVD PROCESS
- TABLE 57 OVERVIEW OF CVD APPLICATIONS IN THE MEDICAL INDUSTRY
- ION IMPLANTATION APPLICATIONS
- TABLE 58 MAJOR MEDICAL APPLICATIONS OF ION IMPLANTATION IN THE MEDICAL INDUSTRY
- TYPES OF CVD AND ION IMPLANTATION EQUIPMENT USED IN MEDICAL APPLICATIONS
- MAJOR MATERIALS USED FOR MEDICAL APPPLICATIONS
- CVD MATERIALS
- TABLE 59 KEY MATERIALS DEPOSITED BY CVD FOR MEDICAL APPLICATIONS
- ION IMPLANTATION MATERIALS
- TABLE 60 KEY MATERIALS USE FOR ION IMPLANTATION AND IBAD IN THE MEDICAL MARKET
- MEDICAL MARKET DRIVERS AND TRENDS
- THIN FILM EQUIPMENT DEMAND
- Fluctuating Growth Trends
- TABLE 61 GLOBAL GROWTH TREND FOR MEDICAL EQUIPMENT AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)
- CVD
- ION IMPLANTATION
- FORECAST ASSUMPTIONS—CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY
- TABLE 62 FORECAST ASUMPTIONS—THIN FILM GROWTH IN THE MEDICAL PRODUCTS INDUSTRY
- TABLE 63 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION TECHNOLOGIES IN MEDICAL, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
- FORECAST—VALUE OF MEDICAL CVD SHIPMENTS
- TABLE 64 VALUE OF GLOBAL CVD SHIPMENTS FOR THE MEDICAL EQUIPMENT MARKET, THROUGH 2013 ($ MILLIONS)
- FIGURE 9 GLOBAL SHIPMENTS OF CVD EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF MEDICAL IMPLANT EQUIPMENT SHIPMENTS
- TABLE 65 FORECAST—VALUE OF GLOBAL ION IMPLANTATION EQUIPMENT SHIPMENTS FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLONS)
- FIGURE 10 GLOBAL VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR MEDICAL PRODUCTS, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF CVD DEPOSITED MATERIALS
- Measurement Considerations
- TABLE 66 GLOBAL VALUE OF CVD-DEPOSITED MATERIALS IN THE MEDICAL SUPPLY INDUSTRY, THROUGH 2013 ($ MILLIONS)
- FIGURE 11 GLOBAL VALUE OF THIN FILM EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLIONS)
- FORECAST—VALUE OF IMPLANTATION MATERIALS
- TABLE 67 GLOBAL VALUE OF MATERIALS USED FOR ION IMPLANTATION IN THE MEDICAL SUPPLY INDUSTRY ($ THOUSANDS)
- FIGURE 12 VALUE OF MATERIALS USED FOR ION IMPLANTATION APPLICATIONS, 2007-2013 ($ THOUSANDS)
- FORECAST—VALUE OF THIN FILM EQUIPMENT SERVICES
- CVD Services
- Ion Implantation Services
- TABLE 68 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE MEDICAL MARKET, THROUGH 2013 ($ MILLIONS)
- CVD IN THE CUTTING TOOL MARKET
- CVD IN THE CUTTING TOOL MARKET
- PRODUCT DEFINITION
- TABLE 69 BASIC TYPES OF CUTTING TOOLS
- CUTTING TOOL INDUSTRY COMPETITIVENESS
- ECONOMIC CONDITIONS
- Economic Warnings
- INTERNATIONAL CONDITIONS
- Changing Market Shares
- TABLE 70 GLOBAL CUTTING TOOL MARKET BY REGION, 2007-2013 (%)
- TECHNOLOGY
- CUTTING TOOL GROWTH FACTORS
- Driving Force for CVD
- Impact of Market Growth Factors
- TABLE 71 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD IN THE CUTTING TOOL INDUSTRY (%)
- CUTTING TOOL APPPLICATIONS
- TABLE 72 MAJOR CVD CUTTING TOOL APPLICATIONS
- TYPES OF CVD REACTORS
- CVD versus PVD Process
- ADVANTAGES OF CVD IN CUTTING TOOL COATING
- MAJOR MATERIALS USED IN CUTTING TOOLS
- TABLE 73 KEY MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY
- CUTTING TOOL MARKET DRIVERS AND TRENDS
- CVD EQUIPMENT DEMAND
- Fluctuating Growth Trends
- TABLE 74 GLOBAL GROWTH TREND FOR THE CUTTING TOOL INDUSTRY AND CVD EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)
- FORECAST ASSUMPTIONS—CVD IN CUTTING TOOLS
- TABLE 75 FORECAST ASSUMPTIONS FOR CVD GROWTH IN CUTTING TOOLS
- TABLE 76 PROJECTED GLOBAL GROWTH TREND OF CVD FOR THE CUTTING TOOL INDUSTRY, THROUGH 2013
- FORECAST—VALUE OF CVD CUTTING TOOL INDUSTRY SHIPMENTS
- TABLE 77 FORECAST—VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL MARKET, THROUGH 2013 ($ MILLIONS)
- FIGURE 13 GLOBAL VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL INDUSTRY, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF DEPOSITED CVD MATERIALS
- Measurement Considerations
- TABLE 78 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)
- FIGURE 14 GLOBAL VALUE OF MATERIALS FOR CVD IN THE CUTTING TOOL INDUSTRY ($ MILLIONS)
- FORECAST—VALUE OF CVD SERVICES
- TABLE 79 GLOBAL VALUE OF CVD COATING SERVICES IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)
- CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
- CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
- PRODUCT DEFINITION
- TABLE 80 BASIC TYPES OF INDUSTRIAL PRODUCTS
- INDUSTRIAL MARKET COMPETITIVENESS
- AUTOMOTIVE MARKET
- Domestic and International Economic Conditions
- TABLE 81 CLOSING GAP BETWEEN U.S AND ASIAN AUTOMAKERS (% OF MARKET)
- External Factors
- TABLE 82 EXTERNAL FACTORS IMPACTING THE AUTO INDUSTRY
- Technology
- AEROSPACE MARKET
- Economic Considerations
- TABLE 83 U.S. AEROSPACE SALES BY PRODUCT, 2001-2006 ($ BILLIONS)
- International Market
- Technology
- MARKET GROWTH FACTORS FOR INDUSTRIAL CVD AND ION IMPLANTATION
- Driving Force for CVD
- Impact of Market Growth Factors
- TABLE 84 IMPACT OF MAJOR FACTORS ON CVD AND ION IMPLANTATION GROWTH IN THE INDUSTRIAL MARKET (%)
- INDUSTRIAL THIN FILM APPLICATIONS
- CVD PROCESS
- ION IMPLANTATION APPLICATIONS
- TABLE 85 MAJOR APPLICATIONS FOR CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
- TYPES OF CVD AND ION IMPLANTATI0N EQUIPMENT USED IN INDUSTRIAL APPLICATIONS
- MAJOR MATERIALS USED FOR INDUSTRIAL APPLICATIONS
- CVD MATERIALS
- TABLE 86 KEY MATERIALS DEPOSITED BY CVD FOR INDUSTRIAL APPLICATIONS
- ION IMPLANTATION MATERIALS
- TABLE 87 KEY MATERIALS USED FOR ION IMPLANTATION IN THE INDUSTRIAL MARKET
- INDUSTRIAL MARKET DRIVERS AND TRENDS
- THIN FILM EQUIPMENT DEMAND
- Fluctuating Growth Trends
- TABLE 88 GLOBAL GROWTH TREND FOR INDUSTRIAL PRODUCTS AND THIN FIILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)
- CVD
- ION IMPLANTATION
- FORECAST ASSUMPTIONS—CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
- TABLE 89 FORECAST ASSUMPTIONS—THIN FILM GROWTH IN THE INDUSTRIAL MARKET
- TABLE 90 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION THIN FILM TECHNOLOGIES IN THE INDUSTRIAL SECTORS, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
- FORECAST—VALUE OF INDUSTRIAL CVD EQUIPMENT SHIPMENTS
- TABLE 91 VALUE OF GLOBAL CVD SHIPMENTS FOR THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
- FIGURE 15 GLOBAL VALUE OF AUTOMOTIVE CVD SYSTEMS IN THE AUTOMOTIVE MARKET, 2007-2013 ($ MILLIONS)
- FIGURE 16 GLOBAL VALUE OF CVD SYSTEMS IN THE AEROSPACE MARKET, THROUGH 2013 ($ MILLIONS)
- FORECAST—VALUE OF INDUSTRIAL ION IMPLANTANTION EQUIPMENT SHIPMENTS
- TABLE 92 FORECAST—VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR THE INDUSTRIAL SEGMENT, THROUGH 2013 ($ MILLIONS)
- FIGURE 17 GLOBAL VALUE OF ION-RELATED EQUIPMENT IN THE AUTOMOTIVE AND AEROSPACE INDUSTRIES, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF CVD DEPOSITED MATERIALS
- Measurement Considerations
- TABLE 93 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE INDUSTRIAL MARKETS, THROUGH 2013 ($ MILLIONS)
- FIGURE 18 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD FOR THE INDUSTRIAL MARKET, 2007-2013 ($ MILLIONS)
- FORECAST—VALUE OF ION IMPLANTATION MATERIALS
- TABLE 94 GLOBAL VALUE OF MATERIALS USED FOR IONRELATED INDUSTRIAL APPLICATIONS, THROUGH 2013 ($ THOUSANDS)
- FIGURE 19 GLOBAL VALUE OF MATERIALS USED FOR IONRELATED INDUSTRIAL APPLICATIONS, 2007-2013 ($ THOUSANDS)
- FORECAST—VALUE OF THIN FILM EQUIPMENT SERVICES
- CVD Services
- Ion Services
- TABLE 95 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
- Ion Services (Continued)
- LIST OF TABLES
- SUMMARY TABLE VALUE OF GLOBAL CVD, ION IMPLANTATION,
- AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)
- TABLE 1 STATUS OF MAJOR DEPOSITION STUDIES BY BCC
- RESEARCH
- TABLE 2 KEY THIN FILM TECHNOLOGIES INCLUDED
- TABLE 3 KEY APPLICATIONS OF THIN FILM TECHNOLOGIES BY
- MARKET
- TABLE 4 TYPICAL MATERIALS AND THEIR APPLICATIONS
- TABLE 5 KEY COMPANIES IN THE CVD, ION IMPLANTATION, AND
- EPITAXY BUSINESS
- TABLE 6 ESTMATED GLOBAL MANUFACTURING OFCVD, ION
- IMPLANTATION, AND EPITAXY EQUIPMENT (%)
- TABLE 7 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND
- EPITAXY CONSUMPTION, 2007-2013 (%)
- TABLE 8 MARKET SHARES OF GLOBAL CVD, ION IMPLANTATION,
- AND EPITAXY MANUFACTURERS, 2007
- TABLE 9 KEY TECHNICAL ADVANTAGES OF THE CVD PROCESS
- TABLE 10 KEY TECHNICAL ADVANTAGES OF MOCVD
- TABLE 11 MAJOR ADVANTAGES OF THE APCVD PROCESS
- TABLE 12 KEY ADVANTAGES OF PLASMA-ENHANCED CVD
- TABLE 13 MAJOR TECHNICAL ADVANTAGES OF HDP-CVD
- TABLE 14 KEY TECHNICAL ADVANTAGES OF TEOS/OZONE
- CHEMISTRY
- TABLE 15 TECHNICAL ADVANTAGES OF CLUSTER TOOLS
- TABLE 16 KEY TECHNICAL ADVANTAGES OF ION IMPLANTATION
- TABLE 17 KEY ADVANTAGES OF BEAMLINE IMPLANTATION
- TABLE 18 KEY ADVANTAGES OF PIII
- TABLE 19 KEY TECHNICAL ADVANTAGES OF IBAD/PIIID
- TABLE 20 MAJOR TECHNICAL ADVANTAGES OF MBE
- TABLE 21 DEVELOPMENTS THAT COULD EXPAND THE USE OF ION
- IMPLANTATION AND EPITAXY
- TABLE 22 THIN FILM PRODUCT PATENTS BY TECHICAL TOPIC,
- 2005-2007
- TABLE 23 CVD, ION IMPLANTATION, AND EPITAXY-RELATED
- PATENTS BY REGION, 2005-2007
- TABLE 24 ASSIGNEES WITH THREE OR MORE PATENTS
- TABLE 25 BASIC PRODUCTS USING CVD, ION IMPLANTATION, AND
- EPITAXY PRODUCTS
- TABLE 26 INTEGRATED CIRCUIT CHARACTERISTICS
- TABLE 27 GLOBAL DEMAND FOR KEY MICROELECTRONIC
- PRODUCTS BY TYPE, THROUGH 2007 ($ BILLIONS)
- TABLE 28 KEY ADVANTAGES OF STANDARDS
- TABLE 29 CHALLENGES FOR THE SIA
- TABLE 30 ECONOMIC IMPACT ON CHIP INDUSTRY, 2008
- TABLE 31 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD,
- ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS
- INDUSTRY (%)
- TABLE 32 BASIC/EMERGING CVD SEMICONDUCTOR APPLICATIONS
- TABLE 33 CHANGING APPLICATIONS OF CVD FOR
- SEMICONDUCTORS
- TABLE 34 ADVANTAGES OF CVD IN MAKING CARBON NANOTUBES
- TABLE 35 SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION
- TABLE 36 DOPANT SPECIES USED IN CMOS IMPLANTS
- TABLE 37 COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED
- BY MBE
- TABLE 38 MAJOR MATERIALS DEPOSITED BY CVD IN THE
- FABRICATION OF SEMICONDUCTORS
- TABLE 39 KEY MATERIALS USED FOR ION IMPLANTATION IN
- SEMICONDUCTOR FABRICATION
- TABLE 40 TYPICAL MATERIALS USED IN MBE OPERATIONS
- TABLE 41 GLOBAL GROWTH TREND FOR SEMICONDUCTORS AND
- THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND
- PERCENTAGE RATIO)
- TABLE 42 OVERVIEW OF OTHER MICROELECTRONIC APPLICATIONS
- FOR THIN FILM EQUIPMENT
- TABLE 43 FORECAST ASSUMPTIONS: THIN FILM GROWTH IN THE
- MICROELECTRONICS INDUSTRY
- TABLE 44 PROJECTED GLOBAL GROWTH TREND FOR CVD, ION
- IMPLANTATION, AND EPITAXY THIN FILM TECHNOLOGIES,
- THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
- TABLE 45 VALUE OF GLOBAL CVD EQEUIPMENT SHIPMENTS FOR
- THE MICROELECTRONICS INDUSTRY, THROUGH 2013
- ($ MILLIONS)
- TABLE 46 FORECAST—VALUE OF GLOBAL IMPLANTATION
- EQUIPMENT FOR THE MICROELECTRONICS MARKET, THROUGH
- 2013 ($ MILLIONS)
- TABLE 47 FORECAST—GLOBAL VALUE OF MBE SHIPMENTS FOR
- MICROELECTRONIC APPLICATIONS, THROUGH 2013 ($ MILLIONS)
- TABLE 48 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN
- THE MICROELECTRONICS INDUSTRY, THROUGH 2013
- ($ MILLIONS)
- TABLE 49 GLOBAL VALUE OF MATERIALS USED FOR
- IMPLANTATION IN THE MICROELECTRONICS MARKET,
- THROUGH 2013 ($ THOUSANDS)
- TABLE 50 GLOBAL VALUE OF MATERIALS USED FOR MBE IN THE
- MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
- TABLE 51 VALUE OF GLOBAL CVD, ION IMPLANTATION, AND
- EPITAXY SERVICES IN THE MICROELECTRONICS INDUSTRY,
- THROUGH 2013 ($ MILLIONS)
- TABLE 52 SUMMARY OF GLOBAL CVD, ION IMPLANTATION, AND
- EPITAXY SHIPMENTS, MATERIALS AND SERVICES FOR
- MICROELECTRONICS, THROUGH 2013 ($ MILLIONS)
- TABLE 53 BASIC TYPES OF MEDICAL DEVICES
- TABLE 54 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND
- SUPPLIES BY REGION, 2007-2013 (%)
- TABLE 55 POSITIVE ECONOMIC FACTORS FOR THE MEDICAL
- DEVICE INDUSTRY
- TABLE 56 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD
- AND ION IMPLANTATION IN THE MEDICAL INDUSTRY (%)
- TABLE 57 OVERVIEW OF CVD APPLICATIONS IN THE MEDICAL
- INDUSTRY
- TABLE 58 MAJOR MEDICAL APPLICATIONS OF ION IMPLANTATION
- IN THE MEDICAL INDUSTRY
- TABLE 59 KEY MATERIALS DEPOSITED BY CVD FOR MEDICAL
- APPLICATIONS
- TABLE 60 KEY MATERIALS USE FOR ION IMPLANTATION AND IBAD
- IN THE MEDICAL MARKET
- TABLE 61 GLOBAL GROWTH TREND FOR MEDICAL EQUIPMENT AND
- THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND
- PERCENTAGE RATIOS)
- TABLE 62 FORECAST ASUMPTIONS—THIN FILM GROWTH IN THE
- MEDICAL PRODUCTS INDUSTRY
- TABLE 63 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION
- TECHNOLOGIES IN MEDICAL, THROUGH 2013 (VALUE AND
- PERCENTAGE RATIO)
- TABLE 64 VALUE OF GLOBAL CVD SHIPMENTS FOR THE MEDICAL
- EQUIPMENT MARKET, THROUGH 2013 ($ MILLIONS)
- TABLE 65 FORECAST—VALUE OF GLOBAL ION IMPLANTATION
- EQUIPMENT SHIPMENTS FOR THE MEDICAL SUPPLY BUSINESS,
- THROUGH 2013 ($ MILLONS)
- TABLE 66 GLOBAL VALUE OF CVD-DEPOSITED MATERIALS IN THE
- MEDICAL SUPPLY INDUSTRY, THROUGH 2013 ($ MILLIONS)
- TABLE 67 GLOBAL VALUE OF MATERIALS USED FOR ION
- IMPLANTATION IN THE MEDICAL SUPPLY INDUSTRY
- ($ THOUSANDS)
- TABLE 68 VALUE OF GLOBAL CVD AND ION IMPLANTATION
- SERVICES IN THE MEDICAL MARKET, THROUGH 2013
- ($ MILLIONS)
- TABLE 69 BASIC TYPES OF CUTTING TOOLS
- TABLE 70 GLOBAL CUTTING TOOL MARKET BY REGION, 2007-2013
- (%)
- TABLE 71 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD IN
- THE CUTTING TOOL INDUSTRY (%)
- TABLE 72 MAJOR CVD CUTTING TOOL APPLICATIONS
- TABLE 73 KEY MATERIALS DEPOSITED BY CVD IN THE CUTTING
- TOOL INDUSTRY
- TABLE 74 GLOBAL GROWTH TREND FOR THE CUTTING TOOL
- INDUSTRY AND CVD EQUIPMENT, THROUGH 2007 (VALUE AND
- PERCENTAGE RATIO)
- TABLE 75 FORECAST ASSUMPTIONS FOR CVD GROWTH IN CUTTING
- TOOLS
- TABLE 76 PROJECTED GLOBAL GROWTH TREND OF CVD FOR THE
- CUTTING TOOL INDUSTRY, THROUGH 2013
- TABLE 77 FORECAST—VALUE OF CVD EQUIPMENT FOR THE
- CUTTING TOOL MARKET, THROUGH 2013 ($ MILLIONS)
- TABLE 78 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN
- THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)
- TABLE 79 GLOBAL VALUE OF CVD COATING SERVICES IN THE
- CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)
- TABLE 80 BASIC TYPES OF INDUSTRIAL PRODUCTS
- TABLE 81 CLOSING GAP BETWEEN U.S AND ASIAN AUTOMAKERS
- (% OF MARKET)
- TABLE 82 EXTERNAL FACTORS IMPACTING THE AUTO INDUSTRY
- TABLE 83 U.S. AEROSPACE SALES BY PRODUCT, 2001-2006
- ($ BILLIONS)
- TABLE 84 IMPACT OF MAJOR FACTORS ON CVD AND ION
- IMPLANTATION GROWTH IN THE INDUSTRIAL
- MARKET (%)
- TABLE 85 MAJOR APPLICATIONS FOR CVD AND ION
- IMPLANTATION IN THE INDUSTRIAL MARKET
- TABLE 86 KEY MATERIALS DEPOSITED BY CVD FOR INDUSTRIAL
- APPLICATIONS
- TABLE 87 KEY MATERIALS USED FOR ION IMPLANTATION IN THE
- INDUSTRIAL MARKET
- TABLE 88 GLOBAL GROWTH TREND FOR INDUSTRIAL PRODUCTS
- AND THIN FIILM EQUIPMENT, THROUGH 2007 (VALUE AND
- PERCENTAGE RATIOS)
- TABLE 89 FORECAST ASSUMPTIONS—THIN FILM GROWTH IN THE
- INDUSTRIAL MARKET
- TABLE 90 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION
- THIN FILM TECHNOLOGIES IN THE INDUSTRIAL SECTORS,
- THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
- TABLE 91 VALUE OF GLOBAL CVD SHIPMENTS FOR THE
- INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
- TABLE 92 FORECAST—VALUE OF ION IMPLANTATION EQUIPMENT
- SHIPPED FOR THE INDUSTRIAL SEGMENT, THROUGH 2013
- ($ MILLIONS)
- TABLE 93 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN
- THE INDUSTRIAL MARKETS, THROUGH 2013 ($ MILLIONS)
- TABLE 94 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED
- INDUSTRIAL APPLICATIONS, THROUGH 2013 ($ THOUSANDS)
- TABLE 95 VALUE OF GLOBAL CVD AND ION IMPLANTATION
- SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2013
- ($ MILLIONS)
- LIST OF FIGURES
- SUMMARY FIGURE GLOBAL VALUE OF THE CVD, ION
- IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013
- ($ MILLIONS)
- FIGURE 1 ESTIMATED GLOBAL CVD, ION IMPLANTATION, AND
- EPITAXY MANUFACTURING, 2007-2013 (%)
- FIGURE 2 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND
- EPITAXY CONSUMPTION, 2007-2013 (%)
- FIGURE 3 GLOBAL CVD SHIPMENTS FOR MICROELECTRONICS
- ($ MILLIONS)
- FIGURE 4 GLOBAL SHIPMENT VALUE OF ION IMPLANTATION
- EQUIPMENT FOR MICROELECTRONICS ($ MILLIONS)
- FIGURE 5 GLOBAL VALUE OF MBE EQUIPMENT FOR
- MICROELECTRONICS, 2007-2013 ($ MILLIONS)
- FIGURE 6 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD, 2007-
- 2013 ($ MILLIONS)
- FIGURE 7 GLOBAL VALUE OF MATERIALS IMPLANTED IN THE
- MICROELECTRONICS MARKET, 2007-2013 ($ THOUSANDS)
- FIGURE 8 GLOBAL VALUE OF MATERIALS CONSUMED BY MBE BY
- THE MICROELECTRONICS INDUSTRY, 2007-2013 ($ MILLIONS)
- FIGURE 9 GLOBAL SHIPMENTS OF CVD EQUIPMENT FOR THE
- MEDICAL SUPPLY BUSINESS, 2007-2013 ($ MILLIONS)
- FIGURE 10 GLOBAL VALUE OF ION IMPLANTATION EQUIPMENT
- SHIPPED FOR MEDICAL PRODUCTS, 2007-2013 ($ MILLIONS)
- FIGURE 11 GLOBAL VALUE OF THIN FILM EQUIPMENT FOR THE
- MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLIONS)
- FIGURE 12 VALUE OF MATERIALS USED FOR ION IMPLANTATION
- APPLICATIONS, 2007-2013 ($ THOUSANDS)
- FIGURE 13 GLOBAL VALUE OF CVD EQUIPMENT FOR THE CUTTING
- TOOL INDUSTRY, 2007-2013 ($ MILLIONS)
- FIGURE 14 GLOBAL VALUE OF MATERIALS FOR CVD IN THE
- CUTTING TOOL INDUSTRY ($ MILLIONS)
- FIGURE 15 GLOBAL VALUE OF AUTOMOTIVE CVD SYSTEMS IN THE
- AUTOMOTIVE MARKET, 2007-2013 ($ MILLIONS)
- FIGURE 16 GLOBAL VALUE OF CVD SYSTEMS IN THE AEROSPACE
- MARKET, THROUGH 2013 ($ MILLIONS)
- FIGURE 17 GLOBAL VALUE OF ION-RELATED EQUIPMENT IN THE
- AUTOMOTIVE AND AEROSPACE INDUSTRIES, 2007-2013
- ($ MILLIONS)
- FIGURE 18 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD FOR
- THE INDUSTRIAL MARKET, 2007-2013 ($ MILLIONS)
- FIGURE 19 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED
- INDUSTRIAL APPLICATIONS, 2007-2013 ($ THOUSANDS)
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