Ion implantation and molecular beam epitaxy (MBE) are critical technologies in semiconductor manufacturing. Implantation also plays an important role in other industries such as medical devices. This new BCC study highlights the established beamline ion implantation process, the emerging plasma immersion ion implantation process, ion assisted deposition, and MBE. The report covers in depth the applications of these technologies to the semiconductor industry, including thin-film silicon-on-insulator wafers manufactured by ion implantation. The use of ion implantation and ion assisted deposition in the medical and industrial markets is studied as well. Market forecasts of equipment shipments, services provided, and materials used are presented from 2001 to 2006, for both ion implantation and MBE. Other features include profiles of the leading companies worldwide involved in implantation and MBE, and growth trends.
Additional Information
INTRODUCTION
Ion implantation and molecular beam epitaxy (MBE) are two of the critical deposition technologies used in semiconductor manufacturing. Implantation also plays an important role in other industrial applications such as enhancing the properties of medical devices and prolonging the life of industrial tooling and components.
There are several key implantation technologies. While beamline ion implantation is well established, the newer plasma immersion ion implantation (PIII) process is not yet widely accepted. However, the hybrid ion assisted deposition process, combining ion bombardment with a thin-film coating process such as physical vapor deposition (PVD), is becoming more common.
Several epitaxy technologies exist as well. The two principal processes are metal organic chemical vapor deposition (MOCVD) and MBE. Until about 1995, MOCVD was used almost exclusively for production epitaxial deposition and MBE was primarily an R&D tool. Now, several applications have emerged where MBE is superior to MOCVD, and MBE is being increasingly used in production.
A previous BCC report, GB-186C, entitled, Thin Layer Deposition: Highlighting Implantation and Epitaxy, Plasma, Thermal and Ion, was published in October 1996. This report studied a number of thin layer deposition technologies and covered ion implantation, epitaxy as a whole, including both MOCVD and MBE, together with CVD, PVD and thermal spray deposition. Updated reports on CVD, now including MOCVD and PVD were published in 2000. In addition, a 1998 report on high-performance ceramic coatings covered thermal spray, CVD, PVD and other ceramic coating techniques. As BCC has not studied either ion implantation or MBE since 1996, this report is intended as an update on these two technologies.
OBJECTIVES OF THIS STUDY AND ITS CONTRIBUTION
The principal objective of this study is to review ion implantation and MBE technologies and their applications, and to present a comprehensive analysis of their worldwide markets. To our knowledge, this is the only current published study of either technology, though some parts of the semiconductor implantation market are addressed in other publications.
A more specific goal is to examine the role of PIII compared with beamline ion implantation in each of the markets studied. At present, all production doping of semiconductor integrated circuits is done by beamline implantation, but the potential of PIII for ultrashallow doping and other applications has been promoted extensively. The process also has promise in applications to industrial materials, the purpose for which PIII was originally developed, and industrial PIII equipment is already used in commercial job shops.
Another goal is to separate the market for MBE epitaxial deposition from that for MOCVD epitaxial deposition. These two markets are generally combined. This makes it difficult to obtain strategic information about the more rapidly growing MBE segment.
AUDIENCE FOR THIS REPORT
This report is directed at companies and organizations interested in developments in ion implantation and MBE, including:
manufacturers and suppliers of equipment for ion implantation and MBE
companies involved in the development and manufacturing of integrated circuits, including foundries
manufacturers and suppliers of silicon and compound semiconductor wafers
providers of ion implantation contract services
manufacturers of medical devices and equipment
manufacturers and users of industrial tools, dies, molds and components
companies involved in manufacturing and supplying advanced materials
SCOPE AND CONTENT OF REPORT
The report covers ion implantation and MBE technologies in depth, including their advantages, current and emerging applications, equipment and materials, and present and future markets. Within each market, forecasts of equipment shipments, services provided, and materials used are presented for the period from 2001 to 2006. A comparison of the year from 2000 to 2001 is included. All major equipment manufacturers and service providers in implantation and MBE are also profiled.
Each market is analyzed in detail. These analyses include product demand, the effect of economic conditions on market growth, manufacturing activity and the influence of other market forces. Market drivers are studied, including demand for implantation or MBE equipment and services. In addition, we discuss any significant trends observed in the industry that relate to the use of technology or materials. One example is the rapidly growing service markets in the semiconductor industry for merchant wafers manufactured by implantation and MBE.
A unique feature of the report is estimates of the present numbers of ion implanters and MBE reactors used for semiconductor production worldwide, by geographic region. The regional distribution of ion implanters and MBE reactors will affect future equipment demand. A feature of the forecasts for semiconductor equipment is a breakdown of shipments by type of implanter such as high current or specialty.
METHODOLOGY AND INFORMATION SOURCES
The data for this report were obtained primarily from interviews with more than 80 individuals in companies and research institutions engaged in ion implantation or MBE. These include manufacturers of implantation and MBE equipment and materials, service providers, industrial and consumer product manufacturing companies, and industry experts. Other data were obtained from company literature, reports and press releases, as well as technical and trade articles, government publications and the World Wide Web. BCC reports provided additional information.
ANALYST CREDENTIALS
Ralph B. Alexander, the author of this report, has been involved with ion implantation and other areas of surface engineering for 17 years. After cofounding and running an ion implantation service company, he became an independent consultant in coatings and surface modification processes for industrial applications. His most recent work centers on market analysis and market development. Dr. Alexander received his D.Phil. in physics from Oxford University.
Title
Introduction
Objectives Of This Study And Its Contribution
Audience For This Report
Scope And Content Of Report
Methodology And Information Sources
Analyst Credentials
Related Bcc Publications
Reports
Newsleters
Bcc On-Line Services
Executive Summary
Overview
Key Technologies
Major Applications
Typical Materials
Industry Structure
Semiconductor Market
Medical Market
Industrial Market
Worldwide Markets For Equipment, Services And Materials
Leading Companies In Implantation And Mbe
Ion Implantation And Epitaxy Technologies
Ion Implantation
Beamline Ion Implantation
Plasma Immersion Ion Implantation (Piii)
Ion-Assisted Deposition
Ion Beam Assisted Deposition (Ibad)
Plasma Immersion Ion Implantation With Deposition (Piiid)
Pulsed Ion Beam Surface Treatment
Epitaxy
Molecular Beam Epitaxy (Mbe)
Metal Organic Chemical Vapor Deposition (Mocvd)
Patent Analysis
Patents By Technology
Patents By Organization Type
Patents By Worldwide Region
Ion Implantation And Epitaxy Industry
Market Approach
Implantation And Epitaxy Industry Structure
Leading Implantation And Mbe Equipment Manufacturers
Leading Service Companies
Contract Service Providers
Semiconductor Merchant Wafer Suppliers
Current Worldwide Market Shares
Equipment Manufacturing
Services
Ion Implantation And Epitaxy In The Semiconductor Market
Semiconductor Applications - Implantation
Doping Of Integrated Circuits By Implantation
Plasma Doping
Silicon-On-Insulator (Soi) Technology
Hydrogen Implantation And Wafer Bonding
Oxygen Implantation (Simox)
Comparison Of Hydrogen And Oxygen Implantation Processes
Emerging Applications Of Implantation
Ultrashallow Junctions
Modification Of Dielectric Constant
Types Of Ion Implanters
High-Current Implanters
Medium-Current Implanters
High-Energy Implanters
Specialty Implanters For Soi And Piii
Semiconductor Applications - Epitaxy
Emerging Mbe Applications
Metamorphic High Electron Mobility Transistors (Metamorphic Hemts)
Quantum Well Lasers
Compound Semiconductor On Silicon Wafers
Types Of Mbe Systems
Key Materials Used In Semiconductor Applications
Implantation
Mbe
The Semiconductor Industry
Semiconductor Market
The Ubiquitous Chip
Product Demand
Compound Semiconductors
Trade Organizations And Technology Development
International Sematech
The Semiconductor Industry Association (Sia)
Semiconductor Equipment And Materials International (Semi)
Technology Roadmap
Semiconductor Growth Factors
Economic Conditions
Manufacturing Activity
Impact Of Market Growth Factors
Semiconductor Market Drivers And Trends
Impact Of Implantation And Mbe
Implantation Equipment Demand
Mbe Equipment Demand
Larger Wafer Size
Insourcing Model For Implantation Services
Semiconductor Merchant Wafers
Forecast Assumptions: Implantation And Mbe In Semiconductors
Forecast: Value Of Implantation And Mbe Equipment Shipments
Implantation Equipment Shipments
Mbe Equipment Shipments
Forecast: Value Of Implantation And Mbe Services
Implantation Contract Services
Merchant Wafer Services
Forecast: Value Of Implantation And Mbe Materials
Ion Implantation In The Medical Market
Medical Industry Applications
Biomedical Applications Of Ion Implantation
Orthopedic Devices
Polymeric Medical Products
Biomedical Applications Of Ibad/Piiid
Ibad-Coated Heart Valve Recall
Emerging Applications Of Ion Implantation And Ibad/Piiid
Radioactive Brachytherapy Seeds
Tissue Engineering
Types Of Ion Implantation And Ibad/Piiid Equipment
Key Materials Used In Biomedical Applications
The Medical Industry
Medical Market
Product Demand
Orthopedic Prostheses
Medical Market Growth Factors
Economic Factors
Health Care Cost Issues
Impact Of Market Growth Factors
Medical Market Drivers And Trends
Impact Of Implantation And Ibad/Piiid
Implantation Services Demand
Forecast Assumptions: Medical Implantation
Forecast: Value Of Implantation Services
Forecast: Value Of Implantation Materials
Ion Implantation In The Industrial Market
Industrial Applications
Industrial Applications Of Ion Implantation
Industrial Applications Of Ibad/Piiid
Ion Implantation Of Tooling
Ion Implantation Of Components
Ion Implantation And Ibad/Piiid Equipment Types
Key Materials Used In Industrial Applications
The Industrial Market
Industrial Market
Product Demand
Automotive Market
Aerospace Market
Technology Development Programs
Industrial Market Growth Factors
Economic Conditions
Manufacturing Activity
Implantation Processing Cost Issues
Impact Of Market Growth Factors
Industrial Market Drivers And Trends
Impact Of Implantation And Ibad/Piiid
Forecast Assumptions: Industrial Implantation
Forecast: Value Of Implantation Equipment Shipments
Forecast: Value Of Implantation Services
Forecast: Value Of Implantation Materials
Appendix: Profiles Of Major Worldwide Companies Involved In Implantation And Mbe As Equipment Manufacturers Or Service Providers
Aea Technology, Plc
Asociación De La Industria Navarra (Ain)
Applied Epi, Inc.
Applied Materials, Inc.
Axcelis Technologies, Inc.
Beamalloy Corp.
Danish Tribology Center
Empire Hard Chrome, Inc.
Ibis Technology Corp.
Implant Center, Inc.
Implant Sciences Corp.
Ion Implant Services, Inc.
Iqe Inc.
Nissin Ion Equipment Co.
North Star Research Corp.
Picogiga Sa
Riber Sa
Silicon Genesis Corp.
Soitec Sa
Southwest Research Institute
Spire Biomedical Inc.
Sumitomo Eaton Nova Corp. (Sen)
Tech-Ni-Plant Ltd.
Tecvac Ltd.
Triion A/S
Ulvac Corp.
Unimerco Group A/S
Varian Semiconductor Equipment Associates, Inc.
Vg Semicon
List Of Tables
Summary Table:
Value Of Worldwide Ion Implantation And Mbe Industries, Through 2006
1 Key Implantation And Epitaxy Technologies
2 Major Applications Of Ion Implantation Technologies By Market
3 Major Mbe Applications
4 Typical Materials And Their Applications
5 Value Of Worldwide Shipments Of Ion Implantation And Mbe Equipment, Through 2006
6 Value Of Worldwide Ion Implantation And Mbe Services, Through 2006
7 Value Of Worldwide Ion Implantation And Mbe Materials, Through 2006
8 Summary Of Value Of Worldwide Ion Implantation, Through 2006
9 Summary Of Value Of Worldwide Mbe, Through 2006
10 Value Of Worldwide Ion Implantation And Mbe Equipment Shipments, Services And Materials By Market, Through 2006
11 Leading Companies In The Implantation Business
12 Leading Companies In The Mbe Business
13 Major Technical Advantages Of Ion Implantation
14 Key Advantages Of Beamline Implantation
15 Key Advantages Of Piii
16 Major Technical Advantages Of Ibad/Piiid
17 Major Technical Advantages Of Mbe
18 U.S. Ion Implantation And Mbe Patents By Technology Type, 2000
19 U.S. Mbe Patents By Organization Type, 2000
20 U.S. Ion Implantation And Mbe Patents By Worldwide Region, 2000
21 Leading Worldwide Manufacturers Of Implantation And Mbe Equipment, 2001
22 Leading Worldwide Implantation Contract Service Providers, 2001
23 Leading Worldwide Suppliers Of Semiconductor Merchant Wafers Manufactured By Implantation And Mbe, 2001
24 Worldwide Market Shares Of Implantation And Mbe Equipment Manufacturing By Region, 2001
25 Integrated Circuit Characteristics
26 Current And Emerging Semiconductor Applications Of Ion Implantation
27 Dopant Species Used For Implants In Cmos Transistors
28 Advantages And Disadvantages Of Beamline Implantation For Semiconductor Processing
29 Advantages And Disadvantages Of Piii For Semiconductor Processing
30 Comparative Advantages Of Implantation Processes For Producing Soi Wafers
31 Current And Emerging Compound Semiconductor Devices Manufactured By Mbe
32 Key Materials Used For Ion Implantation In Semiconductor Fabrication
33 Key Materials Used For Mbe In Semiconductor Fabrication
34 Growth Potential Of The Semiconductor Market, Through 2006
35 Worldwide Semiconductor Sales, 1994-2001
36 Worldwide Share Of Semiconductor Consumption By Region, 2001
37 Key Technical Programs Sponsored By Sematech
38 Key Goals Of The Semiconductor Industry Association
39 Impact Of Major Factors On The Growth Of Implantation And Epitaxy In The Semiconductor Industry
40 Worldwide Growth Trends In Implantation Equipment For Semiconductors, Through 2000
41 Worldwide Distribution Of Production Ion Implanters For Semiconductors By Region, 2001
42 Worldwide Distribution Of Mbe Reactors By Region, 2001
43 Insourcing Model For Implantation Services In The Semiconductor Market
44 Forecast Assumptions: Implantation And Mbe Growth For Semiconductors
45 Value Of Worldwide Shipments Of Implantation Equipment For Semiconductors, Through 2006
46 Worldwide Shipments Of Implantation Equipment For Semiconductors By Implanter Type, Through 2006
47 Worldwide Shipments Of Implantation Equipment For Semiconductors By Region, Through 2006
48 Value Of Worldwide Shipments Of Mbe Equipment For Semiconductors, Through 2006
49 Value Of Worldwide Implantation Contract Services For Semiconductors, Through 2006
50 Value Of Worldwide Implantation And Mbe Services For Semiconductor Merchant Wafers, Through 2006
51 Worldwide Value Of Materials Used For Implantation In The Semiconductor Market, Through 2006
52 Worldwide Value Of Materials Used For Mbe 999 In The Semiconductor Market, Through 2006
53 Summary Of Worldwide Ion Implantation And Mbe Equipment Shipments, Services And Materials For Semiconductor Manufacturing, Through 2006
54 Current And Emerging Biomedical Applications Of Ion Implantation
55 Current And Emerging Biomedical Applications Of Ibad/Piiid
56 Key Materials Used For Ion Implantation And Ibad/Piiid In The Medical Market
57 Worldwide Share Of Medical Device Production By Region, 2001 And 2006
58 Impact Of Major Factors On The Growth Of Implantation And Ibad/Piiid In The Medical Industry
59 Worldwide Growth Trends For Implantation Services In The Medical Industry, Through 2000
60 Forecast Assumptions - Implantation Growth In The Medical Market
61 Value Of Worldwide Implantation Services In The Medical Industry, Through 2006
62 Worldwide Market Share Of Implantation Services In The Medical Industry By Application, 2001 And 2006
63 Worldwide Value Of Materials Used For Ion Implantation And Ibad/Piiid In The Medical Market, Through 2006
64 Summary Of Worldwide Ion Implantation Equipment Shipments, Services And Materials In The Medical Market, Through 2006
65 Surface Properties Modified In Industrial Applications Of Ion Implantation
66 Industrial Applications Of Ibad/Piiid
67 Basic Types Of Industrial Tooling Suitable For Ion Implantation And Ibad/Piiid
68 Examples Of Industrial Applications Of Ion Implantation For Tooling
69 Examples Of Industrial Applications Of Ion Implantation For Components
70 Key Materials Used For Ion Implantation And Ibad/Piiid In The Industrial Market
71 U.S. Sales Of Automobiles And Light Trucks, 1994-2001
72 U.S. Aerospace Sales, 1994-2001
73 Impact Of Major Factors On The Growth Of Implantation And Ibad/Piiid In The Industrial Market
74 Forecast Assumptions - Implantation Growth In The Industrial Market
75 Value Of Worldwide Shipments Of Implantation Equipment In The Industrial Market, Through 2006
76 Worldwide Shipments Of Implantation Equipment In The Industrial Market By System Type, Through 2006
77 Value Of Worldwide Implantation Services In The Industrial Market, Through 2006
78 Worldwide Value Of Materials Used For Ion Implantation And Ibad/Piiid In The Industrial Market, Through 2006
79 Summary Of Worldwide Ion Implantation Equipment Shipments, Services And Materials In The Industrial Market, Through 2006
List Of Figures
Summary Figure:
Value Of Worldwide Ion Implantation Industry, 2000-2006
1 Value Of Worldwide Shipments Of Ion Implantation And Mbe Equipment, 2000-2006
2 Value Of Worldwide Ion Implantation And Mbe Services, 2000-2006
3 Leading Worldwide Suppliers Of Semiconductor Merchant Wafers Manufactured By Implantation And Mbe, 2001
4 Worldwide Market Shares Of Implantation And Mbe Equipment Manufacturing By Region, 2001
5 Major Types Of Doping Implant For Cmos Transistors
6 Worldwide Growth Trends In Implantation Equipment For Semiconductors, Through 2000
7 Worldwide Distribution Of Production Ion Implanters For Semiconductors By Region, 2001
8 Worldwide Distribution Of Production Mbe Reactors By Region, 2001
9 Worldwide Shipments Of Implantation Equipment For Semiconductors By Implanter Type, 2000-2006
10 Worldwide Shipments Of Implantation Equipment For Semiconductors By Region, 2001-2006
11 Value Of Worldwide Shipments Of Mbe Equipment For Semiconductors, Through 2000-2006
12 Value Of Worldwide Implantation And Mbe Services For Semiconductors, 2000-2006
13 Worldwide Growth Trends For Implantation Services In The Medical Industry, 1996- 2000
14 Value Of Worldwide Implantation Services In The Medical Industry, 2000-2006
15 Worldwide Market Share Of Implantation Services In The Medical Industry By Application, 2001 And 2006
16 Value Of Worldwide Implantation Services In The Industrial Market, 2000-2006
Title Index: # | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z
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