Introduction
Study Background
Study Goals And Objectives
Intended Audience
Scope And Format
Methodology And Information Sources
Analyst Credentials
Related Bcc, Inc. Research
Bcc On-Line Services
Disclaimer
Executive Summary
Summary Table:
Global Market For Lithographic Chemicals By Type, Through 2009 ($ Millions)
Summary Figure:
Global Market For Lithographic Chemicals By Type, 2003-2009 ($ Millions)
Lithographic Chemicals Overview
The Lithographic Process
Definition Of Lithography
General Description Of Lithography Process
Optical Lithography
Figure 1 Elements Of An Optical Lithography System
Emerging Lithographic Technologies
Table 1 Itrs Technology Nodes Minimum Line Width Per Year, 1995-2018 (Nm)
Table 2 Principal Microlithography Technologies
Table 2 (Continued)
Applications
Figure 2 Semiconductor Vs. Other Applications Share Of Total Market For Microlithographic Chemicals, 2003 And 2009 (%)
Integrated Circuits
Figure 3 Milestones In Number Of Transistors Per Chip, 1971-2003
Photomasks
Figure 4 Photomask Blank
Figure 5 Finished Photomask
Printed Circuit Boards
Hard Disk Drive Read/Write Heads
Micro-Electromechanical Systems
Flat Panel Displays
Image Sensors
Lithographic Chemicals
Resists
Description
Trends In Resist Technology
Optical Photoresists
Photomask Resists
Figure 6 Photoresist Principles
Maskless (Laser Direct Imaging) Resists
Color Resists
Next-Generation Resists
Extreme Ultraviolet Resists
X-Ray Resists
Electron Beam Resists
Ion Beam Resists
Nano-Imprint Resists
Step And Flash Imprint Lithograph Resists
Micro-Contact Lithography Resists
Thick Film Resists
Resist Types And Applications
Table 3 Resist Types And Applications
Thin Film Vs. Thick Film Resists
Thin Film Resists
Ultraviolet Resists
Pcb Fabrication
Semiconductors And Other Microelectronic Devices
Deep Ultraviolet Resists
Ngl Resists
Color Resists
Thick Film Resists
Patent Analysis
Patents Issued
Table 4 Resist Patents
Table 4 (Continued)
Patent Holders
Figure 7 Resist Patent Holders, 1975 Through Late 2004 (%)
Figure 8 Resist Patent Holders By Region, 1975 Through Late 2004 (%)
Resist Technologies
Figure 9 Resist Patents By Type Of Resist Technology, 1975 Through Late 2004 (%)
Patent Applications
Table 5 Photoresist Patent Applications
Figure 10 Resist Patent Applications By Type Of Resist, 1975 Through Late 2004 (%)
Manufacturers
Table 6 Resist Manufacturers
Dopants
Description
Trends In Doping Technology
Diffusion Doping
Figure 11 Diffusion Process (Diffusion Furnace ¾ ~1,000°C)
Ion Implantation
Figure 12 Doping By Ion Implantation Process
Dopant Types And Applications
Arsine
Diborane
Phosphine
Other Types Of Dopants
Patent Analysis
Table 7 Doping Precursor Patents
Table 7 (Continued)
Table 8 Photoresist Patent Applications
Table 8 (Continued)
Manufacturers
Table 9 Dopant Gas Manufacturers
Etchants
Description
Trends In Etching Technology
Figure 13 Isotropic Vs. Anisotropic Etching
Plasma Etching
Sputtering (Ion Milling)
Reactive Ion Etching
Other Dry Etching Technologies
Etchant Types And Applications
Wet Etchants
Table 10 Wet Etchants
Table 10 (Continued)
Dry Etchants
Table 11 Dry Etchants
Patent Analysis
Table 12 Doping Precursor Patents
Table 13 Etchant Patent Applications
Figure 14 Etchant Patents By Type Of Technology, 1975 Through Late 2004 (%)
Manufacturers
Table 14 Liquid Etchant Manufacturers
Deposition Precursors
Description
Trends In Deposition Technology
Deposition Technologies
Physical Vapor Deposition Systems
Chemical Vapor Deposition
Figure 15 Chemical Vapor Deposition
Chemical Vapor Deposition
Figure 16 Chemical Vapor Deposition Furnace System
Low Pressure Cvd
Plasma Enhanced Cvd (Pecvd)
Epitaxy
Figure 17 Epitaxial Reactor
Spin Coating
Materials
Dielectrics
Silicon Thin Films
Table 15 Silicon Thin Film Precursors
Low-K Dielectrics
Gaseous Precursors
Table 16 Low-K Dielectric Precursors
Spin-On Dielectrics
High-K Dielectrics
Table 17 High-K Dielectric Candidates
Conductive Films
Polysilicon
Metals
Table 18 Metals Used In Metallization Applications
Table 19 Sputtering Target Materials Used In Metallization
Table 20 Common Cvd Precursors Used In Metallization
Patent Analysis
Table 21 Selected Deposition Precursor Patents
Table 21 (Continued)
Figure 18 Deposition Precursor Patents By Type Of Material, 1975 Through Late 2004 (%)
Figure 18 (Continued)
Table 22 Deposition Precursor Patent Applications
Table 22 (Continued)
Figure 19 Deposition Precursor Patent Applications By Type Of Material, Through Late 2004 (%)
Manufacturers
Table 23 Deposition Precursor Suppliers
Developers
Description
Trends In Developer Technology
Application
Materials
Positive Developers
Negative Developers
Developer Types And Applications
Metal Ion Free Developers
Negative Developers
Patent Analysis
Table 24 Photoresist Developer Patents
Figure 20 Photoresist Developer Patents By Type Of Material, 1975 Through Late 2004 (%)
Figure 21 Trends In Number Of New Photoresist Developer Patents Issued Over Time, 1985-2003
Manufacturers
Table 25 Photoresist Developer Suppliers
Strippers And Removers
Description
Technology Trends
Wet Stripping
Dry Stripping
Stripper Recycling
Products And Applications
Solvent-Based Removers
Aqueous/Semi-Aqueous Removers
Patent Analysis
Table 26 Photoresist Stripper And Remover Patents
Table 26 (Continued)
Table 26 (Continued)
Figure 22 Photoresist Stripper And Remover Patent Holders, 1975 Through Late 2004 (%)
Table 27 Deposition Precursor Patent Applications
Table 27 (Continued)
Manufacturers
Table 28 Stripper And Remover Suppliers
Other Chemicals
Description
Products And Applications
Patent Analysis
Table 29 Other Lithographic Chemical Patents
Table 29 (Continued)
Table 29 (Continued)
Figure 23 Other Lithographic Chemical Patents By Type Of Chemical, 1975 Through Late 2004 (%)
Manufacturers
Table 30 Other Lithographic Chemical Suppliers
Global Market For Lithographic Chemicals
Summary
Figure 24 Global Market For Lithographic Chemicals, 2003-2009 ($ Millions)
Detailed Market Estimates And Projections
Market By Type Of Chemical
Table 31 Global Market For Lithographic Chemicals By Type Of Chemical, Through 2009 ($ Millions)
Figure 25 Global Market For Lithographic Chemicals By Type Of Chemical, 2003 And 2009 (%)
Resists
Resist Market By Application
Table 32 Global Market For Lithographic Resists By Application, Through 2009 ($ Million)
Figure 26 Global Market For Lithographic Resists By Application, 2003 And 2009 (%)
Resist Market By Resist Type
Table 33 Global Market For Lithographic Resists By Resist Type, Through 2009 ($ Million)
Resist Market By Resist Type (Continued)
Figure 27 Global Market For Lithographic Resists By Resist Type, 2003 And 2009
Integrated Circuit Applications
Historical Sales
Figure 28 Global Photoresist Sales Share Of The Semiconductor Industry, By Type Of Resist, 2003 (%)
Market Drivers
Global Semiconductor Output
Table 34 Global Semiconductor Production, Through 2009 ($ Billions)
Figure 29 Global Semiconductor Production, 2002-2009 ($ Billions)
Shifts In Lithographic Technology
Figure 30 Trends In Market Share Of Installed Base Of Semiconductor Lithography Tools, 2003 And 2009 (%)
Rising Photoresist Prices
Projected Market
Table 35 Projected Global Market For Semiconductor Resists, By Type, Through 2009 ($ Millions)
Photomask Applications
Historical Sales
Figure 31 Sales Of Electron Beam Vs. Laser Resists In Photomask Manufacture, 2003 (%)
Market Drivers
Trends In Photomask Production
Table 36 Global Photomask Sales, Through 2009 ($ Billions)
Figure 32 Global Photomask Sales, 2003-2009 ($ Billions)
Photomask Lithography Technology Trends
Projected Market
Table 37 Projected Global Market For Photomask Resists, Through 2009 ($ Millions)
Printed Circuit Boards
Historical Sales
Market Drivers
Printed Circuit Board Production
Table 38 Projected Pcb Sales, Through 2009 ($ Billions)
Figure 33 Projected Pcb Sales, 2003-2009 ($ Billions)
Projected Market
Table 39 Projected Market For Pcb Resists, Through 2009 ($ Millions)
Lcd Displays
Historical Sales
Figure 34 Sales Of Color Vs. Other Resists Used In Lcd Display Manufacture, 2003 (%)
Market Drivers
Global Lcd Display Output
Table 40 Projected Global Lcd Display Sales, Through 2009 ($ Billions)
Figure 35 Projected Global Lcd Display Sales, 2003-2009 ($ Billions)
New Color Technologies
Projected Markets
Table 41 Projected Global Market For Lcd Resists, Through 2009 ($ Millions)
Mems And Other Microdevices
Historical Sales
Market Drivers
Mems Production
Table 42 Projected Global Sales Of Mems/Microdevices, Through 2009 ($ Billion)
Figure 36 Projected Global Sales Of Mems/Microdevices, 2003-2009 ($ Billions)
Projected Markets
Table 43 Projected Global Market For Resists Used In Mems/Microdevice Manufacture, Through 2009 ($ Millions)
Dopants
Historical Sales
Figure 37 Global Dopant Consumption By Type, 2003 (%)
Market Drivers
Output Of Microelectronic Devices
Table 44 Global Output Of Microelectronic Devices Requiring Dopants In Production, Through 2009 ($ Billions)
Figure 38 Global Output Of Selected Microelectronic Devices, 2003-2009 ($ Billions)
Environmental, Health And Safety Concerns
Projected Market
Table 45 Projected Market For Dopants By Type, Through 2009 ($ Millions)
Etchants
Historical Sales
Figure 39 Sales Of Wet Vs. Dry Etchants, 2003 (%)
Wet Etchants
Figure 40 Wet Etchant Sales, 2003 (%)
Dry Etchants
Figure 41 Dry Etchant Sales, 2003 (%)
Market Drivers
Increasing Complexity Of Microelectronic Devices
Decreasing Feature Sizes
Increasing Yields
Environmental Issues
Projected Market
Table 46 Projected Global Market For Etchants, Through 2009 ($ Million)
Figure 42 Trends In Global Dry Etchant Market Composition, 2003 And 2009 (%)
Figure 43 Trends In Global Share Of Wet Etchant Market, 2003 And 2009 (%)
Deposition Precursors
Historical Sales
Table 47 Global Consumption Of Deposition Precursors By Type, 2003 ($ Millions)
Gaseous Precursors
Figure 44 Gaseous Precursor Market Shares, 2003 (%)
Spin-On Materials
Sputtering Targets
Figure 45 Sputtering Target Market Shares, 2003 (%)
Market Drivers
Decreasing Feature Size
Technical And Cost Issues
Projected Market
Table 48 Projected Global Market For Deposition Precursors By Type, Through 2009 ($ Millions)
Silicon Precursors
Reactant Gases
Low-K Dielectrics
High-K Dielectrics
Spin-On Materials
Sputtering Targets
Developers, Strippers And Removers
Historical Sales
Figure 46 Market For Photoresist Developers, Strippers And Removers, 2003 (%)
Figure 46 (Continued)
Figure 47 Microelectronics Market Share For Resist Developers, 2003 (%)
Figure 47 (Continued)
Figure 48 Microelectronics Market Share For Strippers And Removers, 2003 (%)
Market Drivers
Economic And Environmental Considerations
Projected Market
Table 49 Projected Global Market For Developers, Strippers, And Removers, Through 2009 ($ Millions)
Other Chemicals
Historical Sales
Figure 49 Sales Of Other Microlithographic Chemicals, 2003 (%)
Figure 49 (Continued)
Market Drivers
Photoresist Sales
Overall Microelectronic Device Sales
Projected Market
Table 50 Projected Global Market For Other Lithographic Chemicals, Through 2009 (Million $)
Market Segment By Major End-User Segment
Figure 50 Microlithography Chemical Market Shares By End-User Segment, 2003 And 2009 (%)
Geographical Markets
Figure 51 Microlithography Chemical Market Shares By Region, 2003 And 2009 (%)
Other Developments That May Influence The Market For Microlithographic Chemicals
Economic Trends
Environmental/Health/Safety/Other Impacts Of Microlithographic Processes And Chemicals
Environmental/Health/Safety/Other…(Continued)
Environmental/Health/Safety/Other…(Continued)
Government Sponsorship
United States
Focus Center Research Program
Other Defense Department Initiatives
National Laboratories
National Nanotechnology Initiative
Europe
Medea
Eu Nanotechnology Research
Japan
Asuka
Nanotechnology Research
Selete
Other Countries
Industry Structure And Competition
Photoresists
Figure 52 Global Photoresist Company Market Shares, 2003 (%)
Figure 52 (Continued)
Liquid Chemicals
Figure 53 Lithography Wet Chemicals Market Shares, 2003 (%)
Gases
Figure 54 Lithography Gases Market Shares, 2002 (%)
Company Profiles
Air Products And Chemicals, Inc.
Applied Materials, Inc.
Arch Chemicals, Inc.
Asm International N.V.
Atmi, Inc.
Az Electronic Materials
The Boc Group Plc
Cyantec, Inc.
Dongjim Semichem
Dongwoo Fine Chemicals Co., Ltd.
Dow Chemical Co.
Dow Corning Corp.
Dupont Electronic Technologies
Ekc Technologies
Electra Polymers & Chemicals Ltd.
Electron Transfer Technologies
Eternal Chemical Co., Ltd
General Chemical Corp.
Hitachi Chemical Co., Ltd
Honeywell Electronic Materials
Huntsman
Jsr Corp.
Kanto Kagaku
L'air Liquide Sa
Mallinckrodt Baker, Inc.
Macdermid, Inc.
Matheson Tri-Gas, Inc.
Merck Kgaa
Mitsubishi Materials Corp.
Nikko Materials Usa, Inc.
Nippon Sanso Kk
Praxair, Inc.
Rd Chemical
Rohm And Haas Co.
Shin-Etsu Chemical Co., Ltd.
Shipley Co., Llc
Silecs Oy
Sumitomo Chemical Co. Ltd.
Taiyo Ink Mfg. Co., Ltd.
Tokyo Ohka Kogyo Co., Ltd.
Tosoh Corp.
Wako Pure Chemical Industries, Ltd.
