Atomic Layer Deposition
BCC Research
January 1, 2010 217 Pages - SKU: WA2585134
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THIS REPORT:
- Provides information on the basic atomic layer deposition (ALD) process, with its variants and upgrades, focusing on raw materials and equipment used
- Identifies various types of precursors and production systems, determines their current market status, defines trends, and presents forecasts of growth, with data for 2008, estimates for 2009, and compound annual growth rates (CAGRs) through 2014
- Discusses technological issues, including the latest process developments, and compares them with alternative thin film methods
- Analyzes the ALD industry on a worldwide basis from the standpoint of both manufacturing and consumption
- Supplies a detailed description of current and potential applications of ALD technology
- Examines commercial and public research activities in major regions of the world.
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- CHAPTER ONE : INTRODUCTION
- STUDY GOALS AND OBJECTIVES
- REASONS FOR DOING THIS STUDY
- INTENDED AUDIENCE
- SCOPE OF REPORT
- METHODOLOGY AND INFORMATION SOURCES
- RELATED BCC RESEARCH STUDIES
- ANALYST CREDENTIALS
- BCC ONLINE SERVICES
- DISCLAIMER
- CHAPTER TWO: EXECUTIVE SUMMARY
- EXECUTIVE SUMMARY
- SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION MARKET,THROUGH 2014 ($ MILLIONS)
- SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)
- CHAPTER THREE: OVERVIEW
- INTRODUCTION
- THIN FILMS, NANOFILMS, AND ALD FILMS
- TABLE 1 THIN FILM TECHNOLOGIES, 2009
- FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, AND SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2008 (%)
- REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT EVENTS
- TABLE 2 ATOMIC LAYER DEPOSITION—TECHNOLOGICAL MILESTONES
- FIGURE 2 ATOMIC LAYER DEPOSITION—WORLDWIDE PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2008
- CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION
- TABLE 3 ALD FILMS AND APPLICATIONS, 2009
- ELECTRONICS
- Established Applications
- Semiconductor Devices
- Passive Components and Embedded Devices
- Recording Heads
- Optoelectronic Devices
- Advanced Displays
- Emerging Applications
- TABLE 4 ALD APPLICATIONS IN ELECTRONICS, 2009
- MECHANICAL/CHEMICAL
- Established Applications
- Wear and Corrosion Resistant Coatings
- MEMS and MOEMS
- Sensors
- Particle Coatings
- Catalysts and Membranes
- Emerging Applications
- TABLE 5 ALD APPLICATIONS IN THE MECHANICAL/CHEMICAL SECTOR, 2009
- ENERGY
- Established Applications
- Photovoltaic Cells and Photothermal Coatings
- High Temperature Superconductors
- Solid Oxide Fuel Cells
- Batteries
- Emerging Applications
- TABLE 6 ALD APPLICATIONS IN THE ENERGY SECTOR, 2009
- OPTICS
- Established Applications
- Optical Coatings
- X-ray Diffraction Devices
- Emerging Applications
- TABLE 7 ALD APPLICATIONS IN OPTICS, 2009
- MEDICAL/BIOLOGICAL/DENTAL
- Established Applications
- Biocompatible Coatings
- Emerging Applications
- TABLE 8 ALD APPLICATIONS IN THE
- MEDICAL/BIOLOGICAL/DENTAL SECTOR, 2009
- NANOTECHNOLOGY
- Established Applications
- Nanoparticles
- Nanowires
- Nanotubes
- Nanolaminates and Nanocomposites
- Emerging Applications
- TABLE 9 ALD APPLICATIONS IN NANOTECHNOLOGY, 2009
- CHAPTER FOUR: GLOBAL MARKET
- ALD MATERIALS AND EQUIPMENT—ANALYSIS OUTLINE
- GLOBAL MARKET SUMMARY
- TABLE 10 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005 THROUGH 2014 ($ MILLIONS)
- FIGURE 3 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)
- ALD MATERIALS
- INTRODUCTION
- METAL SOURCES
- TABLE 11 METAL SOURCES, 2009
- Earlier Metal Precursors
- Current Technical Issues
- Latest Technological Developments, 2006 to Present
- Metal Beta-Ketoiminate and Beta-Diiminate
- Complexes
- Diimine Copper Complexes
- Precursors Containing Electron Donating Group-
- Substituted Alkenyl Ligands
- Phosphoamidinate Precursors
- Organometallic Precursors for High-Purity Metal
- Films
- FUNCTIONAL GROUP SOURCES
- Elemental Films Using Boron Compounds
- INERT GASES
- CURRENT MARKET STATUS
- Current Market Summary
- TABLE 12 GLOBAL MARKET FOR ALD MATERIALS, THROUGH 2009 ($ MILLIONS)
- Revenues by Material Type
- TABLE 13 ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, 2009 ($ MILLIONS/%)
- TABLE 14 ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE,2009 ($ MILLIONS/%)
- FIGURE 4 ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2009
- (%)
- Revenues by Application
- TABLE 15 ALD MATERIALS: GLOBAL REVENUES BY APPLICATION,
- 2009 ($ MILLIONS/%)
- FIGURE 5 ALD MATERIALS: MARKET SHARE BY APPLICATION,
- 2009 (%)
- TABLE 16 ALD PRECURSORS FOR SEMICONDUCTOR DEVICES:
- GLOBAL REVENUES BY FUNCTION, 2009 ($ MILLIONS/%)
- Revenues by Region
- TABLE 17 ALD MATERIALS: REVENUES BY REGION, THROUGH
- 2009 ($ MILLIONS)
- FIGURE 6 ALD MATERIALS: MARKET SHARE BY REGION, 2009 (%)
- ALD EQUIPMENT AND TECHNOLOGIES
- EXISTING TECHNOLOGIES
- TABLE 18 ALD TECHNOLOGIES
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2006 TO PRESENT
- Rapid Vapor Deposition ALD
- Variable Temperature and Dose Atomic Layer Deposition
- Microwave-aided ALD
- Hybrid Chemical Vapor Deposition
- Field-aided Preferential Deposition
- CURRENT MARKET STATUS
- Current Market Summary
- TABLE 19 GLOBAL MARKET FOR ALD EQUIPMENT, THROUGH 2009 ($ MILLIONS)
- Revenues by Equipment Type
- TABLE 20 ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, 2009 ($MILLIONS/%)
- FIGURE 7 ALD EQUIPMENT: MARKET SHARE BY TYPE, 2009 (%)
- Revenues by Application
- TABLE 21 ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%)
- FIGURE 8 ALD EQUIPMENT: MARKET SHARE BY APPLICATION,2009 (%)
- Revenues by Region
- TABLE 22 ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)
- FIGURE 9 ALD EQUIPMENT: MARKET SHARE BY REGION, 2009 (%)
- MARKET GROWTH TRENDS
- INDUSTRY GROWTH AND TECHNOLOGICAL TRENDS
- Semiconductor Devices
- Industry Growth
- TABLE 23 FORECAST—SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2014 ($ BILLIONS)
- Technological Trends
- TABLE 24 IC CONFIGURATIONS, 2006-2015
- Magnetic Recording Media
- Industry Growth
- TABLE 25 FORECAST—HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)
- FIGURE 10 FORECAST—HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2014 (%)
- TABLE 26 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)
- FIGURE 11 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2009 AND 2014 (MILLION UNITS)
- FIGURE 12 FORECAST—HARD DISKS: PRODUCTION SHARE BY TYPE, 2014 (%)
- Technological Trends
- Advanced Displays
- Industry Growth
- TABLE 27 FORECAST—ADVANCED DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ BILLIONS)
- Technological Trends
- New Films
- Roll-to-roll and Large Area Coatings
- Other Applications
- EQUIPMENT UPGRADES
- NANOTECHNOLOGY AND OTHER TECHNOLOGICAL
- FACTORS
- Nanotechnology
- TABLE 28 THE NANOTECHNOLOGY INDUSTRY
- TABLE 29 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT, THROUGH 2014 ($ BILLIONS)
- Comparison with Alternative Technologies
- TABLE 30 DEPOSITION METHODS FOR NANOFILMS
- New Product Development
- New Generation of Composite Materials
- REGIONAL TRENDS
- PROJECTED ATOMIC LAYER DEPOSITION MARKET
- KEY OBSERVATIONS
- TABLE 31 FACTORS AFFECTING SALES OF ALD PRECURSORS AND EQUIPMENT, 2010-2014
- ALD MATERIALS MARKET FORECAST
- Revenues by Material Type
- TABLE 32 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, THROUGH 2014 ($ MILLIONS)
- TABLE 33 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, THROUGH 2014 ($ MILLIONS)
- FIGURE 13 FORECAST—ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2014 (%)
- Revenues by Application
- TABLE 34 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)
- FIGURE 14 FORECAST—ALD MATERIALS: MARKET SHARE BY APPLICATION, 2014 (%)
- TABLE 35 FORECAST—ALD PRECURSORS FOR SEMICONDUCTOR
- DEVICES: GLOBAL REVENUES BY FUNCTION, THROUGH 2014 ($
- MILLIONS)
- Revenues by Region
- TABLE 36 FORECAST—ALD MATERIALS: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)
- FIGURE 15 FORECAST—ALD MATERIALS: MARKET SHARE BY REGION, 2014 (%)
- ALD EQUIPMENT MARKET FORECAST
- Revenues by Equipment Type
- TABLE 37 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ MILLIONS)
- FIGURE 16 FORECAST—ALD EQUIPMENT: MARKET SHARE BY TYPE, 2014 (%)
- Revenues by Application
- TABLE 38 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)
- FIGURE 17 FORECAST—ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2014 (%)
- Revenues by Region
- TABLE 39 FORECAST—ALD EQUIPMENT: REVENUES BY REGION,THROUGH 2014 ($ MILLIONS)
- FIGURE 18 FORECAST—ALD EQUIPMENT: MARKET SHARE BY REGION, 2014 (%)
- CHAPTER FIVE: GLOBAL INDUSTRY STRUCTURE
- GLOBAL INDUSTRY STRUCTURE
- MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT
- TABLE 40 MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT
- FIGURE 19 ALD MANUFACTURERS: DISTRIBUTION BY SIZE, 2009 (NUMBER OF COMPANIES)
- TABLE 41 ALD MANUFACTURERS: DISTRIBUTION BY REGION, 2005 AND 2009 (NUMBER OF COMPANIES)
- TABLE 42 NOTABLE INDUSTRY CHANGES SINCE 2005 OTHER PLAYERS IN THE ALD INDUSTRY
- TABLE 43 OTHER RELEVANT INDUSTRY PLAYERS ATOMIC LAYER DEPOSITION PRODUCTION BY REGION
- TABLE 44 ALD PRODUCTION BY REGION, 2007-2014 (PERCENT OF SALES)
- ATOMIC LAYER DEPOSITION CONSUMPTION BY REGION
- TABLE 45 ALD CONSUMPTION BY REGION, 2007-2014 (PERCENT OF SALES)
- COMPANY PROFILES
- ADEKA
- AIR LIQUIDE
- AIR PRODUCTS AND CHEMICALS
- AIXTRON
- AKZO NOBEL
- APPLIED MATERIALS
- ASM INTERNATIONAL
- ASM International (Continued)
- ATMI
- BENEQ
- Beneq (Continued)
- CAMBRIDGE NANOTECH
- H. C. STARCK
- HITACHI KOKUSAI ELECTRIC
- INTEGRATED PROCESS SYSTEMS
- JOHNSON MATTHEY
- JUSUNG ENGINEERING
- KURT J. LESKER
- LINDE
- NOVELLUS SYSTEMS
- OXFORD INSTRUMENTS
- PICOSUN
- PRAXAIR
- ROHM AND HAAS
- SHIN-ETSU CHEMICAL
- SIGMA-ALDRICH
- Sigma-Aldrich (Continued)
- TEGAL
- TOP PLAYERS MARKET SHARE
- FIGURE 20 ATOMIC LAYER DEPOSITION—TOP 25 MANUFACTURERS BY REGION, 2009 (%)
- TABLE 46 ALD MATERIALS—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)
- TABLE 47 ALD EQUIPMENT—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)
- CHAPTER SIX: INDUSTRY COMPETITIVENESS
- ALD DEVELOPMENT ACTIVITIES
- TABLE 48 ORGANIZATIONS INVOLVED IN ALD RESEARCH,WORLDWIDE UNITED STATES
- Albany Nanotech
- TABLE 49 ALBANY NANOTECH RESEARCH
- Argonne National Laboratory
- TABLE 50 ARGONNE NATIONAL LABORATORY RESEARCH
- Harvard University
- TABLE 51 HARVARD UNIVERSITY RESEARCH
- Stanford University
- TABLE 52 STANFORD UNIVERSITY RESEARCH
- SVTC Technologies
- University of California, Los Angeles
- TABLE 53 UCLA RESEARCH
- University of Colorado at Boulder
- TABLE 54 UNIVERSITY OF COLORADO AT BOULDER RESEARCH
- EUROPE
- Eindhoven University of Technology
- TABLE 55 EINDHOVEN UNIVERSITY OF TECHNOLOGY RESEARCH
- Helsinki University of Technology
- TABLE 56 TKK RESEARCH
- IMEC
- TABLE 57 IMEC RESEARCH
- University of Helsinki
- TABLE 58 UNIVERSITY OF HELSINKI RESEARCH
- ASIA PACIFIC
- Korea Advanced Institute of Science and Technology
- TABLE 59 KAIST RESEARCH
- Semiconductor Leading Edge Technologies
- SUMMARY OF GLOBAL R&D ACTIVITIES IN ALD TECHNOLOGY
- Summary of Global …(Continued)
- FIGURE 21 CURRENT GLOBAL ALD RESEARCH AND
- DEVELOPMENT BY SUBJECT (%)
- OTHER CONSIDERATIONS
- KEY GROWTH MARKETS
- TABLE 60 GLOBAL GROWTH FORECAST FOR CURRENT AND
- POTENTIAL ALD APPLICATIONS, 2009-2014
- DRIVING FORCES AND THEIR IMPACT ON MARKET
- GROWTH
- TABLE 61 PERCENTAGE IMPACT OF MAJOR COMPETITIVE
- FACTORS ON THE GROWTH OF THE ALD MARKET, 2009-2014
- CHAPTER SEVEN: U.S. PATENT ANALYSIS
- INTRODUCTION
- SUMMARY OF PATENTS AWARDED DURING THE PERIOD 2007 THROUGH 2009
- TABLE 62 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2009
- TABLE 63 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2008
- TABLE 64 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2007
- GENERAL TRENDS
- TABLE 65 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS,2003-2009
- FIGURE 22 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS,2003-2009 (NUMBER OF PATENTS)
- TRENDS BY COUNTRY AND REGION
- FIGURE 23 SHARES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION BY REGION, 2007-2009 (%)
- FIGURE 24 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2007-2009 (%)
- FIGURE 25 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY,2003-2005 (NUMBER OF PATENTS)
- TRENDS BY ASSIGNEE
- TABLE 66 ASSIGNEES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION, 2007-2009
- FIGURE 26 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2007-2009 (%)
- TRENDS BY PATENT CATEGORY
- FIGURE 27 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY CATEGORY, 2007-2009 (%)
- TRENDS BY APPLICATION
- FIGURE 28 ATOMIC LAYER DEPOSITION: SHARES OF U.S.PATENTS BY APPLICATION, 2007-2009 (%)
- TRENDS BY FILM TYPE
- FIGURE 29 ATOMIC LAYER DEPOSITON: SHARES OF U.S.PATENTS BY FILM TYPE, 2007-2009 (%)
- LIST OF TABLES
- SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION MARKET, THROUGH 2014 ($ MILLIONS)
- TABLE 1 THIN FILM TECHNOLOGIES, 2009
- TABLE 2 ATOMIC LAYER DEPOSITION—TECHNOLOGICAL MILESTONES
- TABLE 3 ALD FILMS AND APPLICATIONS, 2009
- TABLE 4 ALD APPLICATIONS IN ELECTRONICS, 2009
- TABLE 5 ALD APPLICATIONS IN THE MECHANICAL/CHEMICAL SECTOR, 2009
- TABLE 6 ALD APPLICATIONS IN THE ENERGY SECTOR, 2009
- TABLE 7 ALD APPLICATIONS IN OPTICS, 2009
- TABLE 8 ALD APPLICATIONS IN THE MEDICAL/BIOLOGICAL/DENTAL SECTOR, 2009
- TABLE 9 ALD APPLICATIONS IN NANOTECHNOLOGY, 2009
- TABLE 10 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005 THROUGH 2014 ($ MILLIONS)
- TABLE 11 METAL SOURCES, 2009
- TABLE 12 GLOBAL MARKET FOR ALD MATERIALS, THROUGH 2009 ($MILLIONS)
- TABLE 13 ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, 2009 ($ MILLIONS/%)
- TABLE 14 ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, 2009 ($ MILLIONS/%)
- TABLE 15 ALD MATERIALS: GLOBAL REVENUES BY APPLICATION,2009 ($ MILLIONS/%)
- TABLE 16 ALD PRECURSORS FOR SEMICONDUCTOR DEVICES:GLOBAL REVENUES BY FUNCTION, 2009 ($ MILLIONS/%)
- TABLE 17 ALD MATERIALS: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)
- TABLE 18 ALD TECHNOLOGIES
- TABLE 19 GLOBAL MARKET FOR ALD EQUIPMENT, THROUGH 2009 ($MILLIONS)
- TABLE 20 ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, 2009 ($ MILLIONS/%)
- TABLE 21 ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%)
- TABLE 22 ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS)
- TABLE 23 FORECAST—SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2014 ($ BILLIONS)
- TABLE 24 IC CONFIGURATIONS, 2006-2015
- TABLE 25 FORECAST—HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)
- TABLE 26 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS)
- TABLE 27 FORECAST—ADVANCED DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ BILLIONS)
- TABLE 28 THE NANOTECHNOLOGY INDUSTRY
- TABLE 29 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT, THROUGH 2014 ($ BILLIONS)
- TABLE 30 DEPOSITION METHODS FOR NANOFILMS
- TABLE 31 FACTORS AFFECTING SALES OF ALD PRECURSORS AND EQUIPMENT, 2010-2014
- TABLE 32 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, THROUGH 2014 ($ MILLIONS)
- TABLE 33 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, THROUGH 2014 ($ MILLIONS)
- TABLE 34 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)
- TABLE 35 FORECAST—ALD PRECURSORS FOR SEMICONDUCTOR DEVICES: GLOBAL REVENUES BY FUNCTION, THROUGH 2014 ($ MILLIONS)
- TABLE 36 FORECAST—ALD MATERIALS: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)
- TABLE 37 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ MILLIONS)
- TABLE 38 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS)
- TABLE 39 FORECAST—ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS)
- TABLE 40 MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT
- TABLE 41 ALD MANUFACTURERS: DISTRIBUTION BY REGION, 2005 AND 2009 (NUMBER OF COMPANIES)
- TABLE 42 NOTABLE INDUSTRY CHANGES SINCE 2005
- TABLE 43 OTHER RELEVANT INDUSTRY PLAYERS
- TABLE 44 ALD PRODUCTION BY REGION, 2007-2014 (PERCENT OF SALES)
- TABLE 45 ALD CONSUMPTION BY REGION, 2007-2014 (PERCENT OF SALES)
- TABLE 46 ALD MATERIALS—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)
- TABLE 47 ALD EQUIPMENT—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES)
- TABLE 48 ORGANIZATIONS INVOLVED IN ALD RESEARCH,WORLDWIDE
- TABLE 49 ALBANY NANOTECH RESEARCH
- TABLE 50 ARGONNE NATIONAL LABORATORY RESEARCH
- TABLE 51 HARVARD UNIVERSITY RESEARCH
- TABLE 52 STANFORD UNIVERSITY RESEARCH
- TABLE 53 UCLA RESEARCH
- TABLE 54 UNIVERSITY OF COLORADO AT BOULDER RESEARCH
- TABLE 55 EINDHOVEN UNIVERSITY OF TECHNOLOGY RESEARCH
- TABLE 56 TKK RESEARCH
- TABLE 57 IMEC RESEARCH
- TABLE 58 UNIVERSITY OF HELSINKI RESEARCH
- TABLE 59 KAIST RESEARCH
- TABLE 60 GLOBAL GROWTH FORECAST FOR CURRENT AND POTENTIAL ALD APPLICATIONS, 2009-2014
- TABLE 61 PERCENTAGE IMPACT OF MAJOR COMPETITIVE FACTORS ON THE GROWTH OF THE ALD MARKET, 2009-2014
- TABLE 62 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2009
- TABLE 63 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2008
- TABLE 64 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2007
- TABLE 65 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS, 2003-2009
- TABLE 66 ASSIGNEES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION, 2007-2009
- LIST OF FIGURES
- SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION MARKET,2005-2014 ($ MILLIONS)
- FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, AND SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2008 (%)
- FIGURE 2 ATOMIC LAYER DEPOSITION—WORLDWIDE PATENT APPLICATIONS AND PATENTS ISSUED, 1990-2008
- FIGURE 3 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005-2014 ($ MILLIONS)
- FIGURE 4 ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2009 (%)
- FIGURE 5 ALD MATERIALS: MARKET SHARE BY APPLICATION, 2009 (%)
- FIGURE 6 ALD MATERIALS: MARKET SHARE BY REGION, 2009 (%)
- FIGURE 7 ALD EQUIPMENT: MARKET SHARE BY TYPE, 2009 (%)
- FIGURE 8 ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2009 (%)
- FIGURE 9 ALD EQUIPMENT: MARKET SHARE BY REGION, 2009 (%)
- FIGURE 10 FORECAST—HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2014 (%)
- FIGURE 11 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2009 AND 2014 (MILLION UNITS)
- FIGURE 12 FORECAST—HARD DISKS: PRODUCTION SHARE BY TYPE, 2014 (%)
- FIGURE 13 FORECAST—ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2014 (%)
- FIGURE 14 FORECAST—ALD MATERIALS: MARKET SHARE BY APPLICATION, 2014 (%)
- FIGURE 15 FORECAST—ALD MATERIALS: MARKET SHARE BY REGION, 2014 (%)
- FIGURE 16 FORECAST—ALD EQUIPMENT: MARKET SHARE BY TYPE, 2014 (%)
- FIGURE 17 FORECAST—ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2014 (%)
- FIGURE 18 FORECAST—ALD EQUIPMENT: MARKET SHARE BY REGION, 2014 (%)
- FIGURE 19 ALD MANUFACTURERS: DISTRIBUTION BY SIZE, 2009 (NUMBER OF COMPANIES)
- FIGURE 20 ATOMIC LAYER DEPOSITION—TOP 25 MANUFACTURERS BY REGION, 2009 (%)
- FIGURE 21 CURRENT GLOBAL ALD RESEARCH AND DEVELOPMENT BY SUBJECT (%)
- FIGURE 22 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS,2003-2009 (NUMBER OF PATENTS)
- FIGURE 23 SHARES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION BY REGION, 2007-2009 (%)
- FIGURE 24 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2007-2009 (%)
- FIGURE 25 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2003-2005 (NUMBER OF PATENTS)
- FIGURE 26 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2007-2009 (%)
- FIGURE 27 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY CATEGORY, 2007-2009 (%)
- FIGURE 28 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY APPLICATION, 2007-2009 (%)
- FIGURE 29 ATOMIC LAYER DEPOSITON: SHARES OF U.S. PATENTS BY FILM TYPE, 2007-2009 (%)
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